[Scan]
initial_time=2016-02-17T23:35:33
final_time=2016-02-17T23:35:56
ip_count=19
run=1032
dataset=11
scan=608
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.36806E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.92403E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.19934E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=4.44162E-10
mult1=-1.00502E-8
mult2=-2.79584E-9
rf_tmon=-3.4455E-3
rf_agc=3.49077E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.57824E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.0573E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=2.16476E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36415E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.57643E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.02162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.72801E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.16332E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.05622E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=1.26749E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.26994E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.68835E-8
tplens_vset=1.4E-1
tplens_vmon=1.60178E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26622E1
iondef2_imon=1.56634E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.09249E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=2.00362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34048E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87756E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12604E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64698E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.54095E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.33065E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02139E1
cs_anode2_imon=2.27668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72776E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67614E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.08911E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83071E-1
olens1_imon=9.84869E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0941E0
cs_ionaccel_imon=-2.1582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.36839E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.50538E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.59022E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63996E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=1.00598E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61723E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65978E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.06267E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22611E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.00412E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15754E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16774E-1	-7.98345E-1	-9.13112E0	-9.14166E0	5.43594E-3	9.2864E-2	2.73098E1	-3.2675E1	-3.26437E1	2.6796E1	1.69725E-7	2.52276E-3	2.52276E-3	6.29128E-3	1.9934E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16894E-1	-7.98345E-1	-9.13115E0	-9.14195E0	5.43594E-3	9.2864E-2	2.73125E1	-3.26772E1	-3.26533E1	2.6781E1	1.69654E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16703E-1	-7.98035E-1	-9.13126E0	-9.14185E0	5.38826E-3	9.29594E-2	2.73346E1	-3.26443E1	-3.26178E1	2.68001E1	1.69924E-7	2.5216E-3	2.5216E-3	6.32784E-3	1.98854E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.16774E-1	-7.97963E-1	-9.13167E0	-9.14173E0	5.76973E-3	9.31263E-2	2.73151E1	-3.26561E1	-3.26225E1	2.68178E1	1.69581E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16536E-1	-7.98249E-1	-9.13124E0	-9.1418E0	5.81741E-3	9.3174E-2	2.73267E1	-3.26344E1	-3.2638E1	2.67938E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09688E0	-8.16584E-1	-7.98011E-1	-9.13148E0	-9.14183E0	6.12736E-3	9.33647E-2	2.72793E1	-3.26765E1	-3.25882E1	2.67962E1	1.69654E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16607E-1	-7.98202E-1	-9.13098E0	-9.14202E0	5.79357E-3	9.3174E-2	2.73526E1	-3.26669E1	-3.26308E1	2.68112E1	1.69653E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0968E0	-8.16345E-1	-7.9844E-1	-9.13115E0	-9.14216E0	5.29289E-3	9.32217E-2	2.72636E1	-3.26446E1	-3.26368E1	2.68058E1	1.69731E-7	2.52473E-3	2.52473E-3	6.31299E-3	1.98696E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.1656E-1	-7.98273E-1	-9.13141E0	-9.14202E0	5.57899E-3	9.34601E-2	2.73198E1	-3.26762E1	-3.26195E1	2.68256E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.97903E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16727E-1	-7.97939E-1	-9.13103E0	-9.14211E0	5.57899E-3	9.35078E-2	2.73131E1	-3.26774E1	-3.26407E1	2.6772E1	1.69653E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.97647E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16846E-1	-7.97939E-1	-9.13124E0	-9.14209E0	5.65052E-3	9.3317E-2	2.73381E1	-3.26855E1	-3.26398E1	2.681E1	1.69581E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.97994E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16822E-1	-7.98202E-1	-9.13122E0	-9.14199E0	5.48363E-3	9.31263E-2	2.73027E1	-3.26999E1	-3.26362E1	2.68052E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00021E-1
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16798E-1	-7.98106E-1	-9.13129E0	-9.14207E0	5.74589E-3	9.34601E-2	2.73306E1	-3.26978E1	-3.26515E1	2.68198E1	1.69731E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.97818E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16631E-1	-7.9844E-1	-9.13122E0	-9.14185E0	6.03199E-3	9.3317E-2	2.73201E1	-3.26235E1	-3.26666E1	2.6797E1	1.69581E-7	2.52197E-3	2.52197E-3	6.31779E-3	1.97812E-1
1.8E1	9.1E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16679E-1	-7.98225E-1	-9.13122E0	-9.14204E0	5.84126E-3	9.30309E-2	2.73201E1	-3.26464E1	-3.2638E1	2.68028E1	1.69734E-7	2.51838E-3	2.51838E-3	6.31879E-3	1.98088E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16488E-1	-7.98106E-1	-9.13134E0	-9.14185E0	5.48363E-3	9.29594E-2	2.73351E1	-3.26867E1	-3.26524E1	2.67926E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16631E-1	-7.98345E-1	-9.13124E0	-9.14166E0	5.34058E-3	9.31978E-2	2.73132E1	-3.26718E1	-3.26515E1	2.68163E1	1.69728E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16631E-1	-7.98082E-1	-9.13146E0	-9.14173E0	5.57899E-3	9.33647E-2	2.73139E1	-3.26608E1	-3.2626E1	2.67897E1	1.69653E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16441E-1	-7.98059E-1	-9.13129E0	-9.14147E0	5.45979E-3	9.3174E-2	2.72988E1	-3.26681E1	-3.25793E1	2.68377E1	1.69723E-7	2.52025E-3	2.52025E-3	6.30212E-3	1.99227E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16822E-1	-7.97963E-1	-9.13129E0	-9.14173E0	5.50747E-3	9.31025E-2	2.72776E1	-3.26622E1	-3.26366E1	2.67614E1	1.69654E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00412E-1