[Scan]
initial_time=2016-02-17T23:36:05
final_time=2016-02-17T23:36:28
ip_count=19
run=1032
dataset=11
scan=609
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36516E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.91818E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.57163E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.5042E-10
mult1=-9.32203E-9
mult2=-2.85456E-9
rf_tmon=-4.79263E-3
rf_agc=3.23004E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.59543E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67919E0
bslens_imon=2.44415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1973E1
lens5a_imon=1.96421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=3.06697E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=2.17127E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39203E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64521E1
os_ef1alow_imon=2.98495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.57169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84041E1
cs_ef1a_imon=2.98739E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.72814E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1088E1
os_restr1_imon=4.26732E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.16561E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63062E1
os_ef1bup_imon=3.05029E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.26377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93583E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.29634E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.68086E-8
tplens_vset=1.4E-1
tplens_vmon=1.60722E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26048E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26862E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.0644E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74466E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88093E0
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71802E1
cs_ef2a_imon=3.21467E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.14665E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.54573E-1
os_ef2bup_imon=-5.45557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1066E1
os_restr2_imon=3.54099E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02041E1
cs_anode2_imon=2.26384E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.05862E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09393E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.84457E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10002E0
cs_ionaccel_imon=-2.14713E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55861E1
einzel_imon=7.63224E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-1.09065E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86049E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.28607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.27733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=5.93401E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.57149E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64238E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=1.00459E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62412E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73673E-2
os_fil2_imon=-2.36221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09191E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84197E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38266E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.29581E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22587E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2929E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16822E-1	-7.98416E-1	-9.1311E0	-9.14197E0	5.81741E-3	9.28879E-2	2.73063E1	-3.2649E1	-3.26384E1	2.68418E1	1.69943E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.99E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16989E-1	-7.9844E-1	-9.13138E0	-9.14209E0	5.6982E-3	9.28879E-2	2.72996E1	-3.26676E1	-3.26272E1	2.67968E1	1.69723E-7	2.52448E-3	2.52448E-3	6.30212E-3	1.99394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16846E-1	-7.9844E-1	-9.13131E0	-9.14228E0	5.8651E-3	9.28879E-2	2.73213E1	-3.26625E1	-3.26301E1	2.67763E1	1.69956E-7	2.52027E-3	2.52027E-3	6.33538E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16941E-1	-7.98202E-1	-9.13119E0	-9.1423E0	5.57899E-3	9.3317E-2	2.73003E1	-3.26849E1	-3.26206E1	2.67932E1	1.69653E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16536E-1	-7.98011E-1	-9.13131E0	-9.1423E0	5.8651E-3	9.30309E-2	2.73231E1	-3.26512E1	-3.26398E1	2.68214E1	1.69798E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.9917E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16727E-1	-7.97987E-1	-9.13126E0	-9.14242E0	5.93662E-3	9.31263E-2	2.73358E1	-3.26703E1	-3.26313E1	2.68599E1	1.69802E-7	2.51935E-3	2.51935E-3	6.31288E-3	1.9989E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16679E-1	-7.97915E-1	-9.13146E0	-9.14218E0	5.98431E-3	9.34124E-2	2.73173E1	-3.26609E1	-3.26242E1	2.67535E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16488E-1	-7.98178E-1	-9.13148E0	-9.14199E0	5.8651E-3	9.36985E-2	2.73201E1	-3.26476E1	-3.26206E1	2.68169E1	1.69802E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98419E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16345E-1	-7.98059E-1	-9.13153E0	-9.14187E0	5.81741E-3	9.37223E-2	2.72973E1	-3.26543E1	-3.2617E1	2.68012E1	1.69656E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.00108E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16321E-1	-7.98154E-1	-9.13174E0	-9.14171E0	5.79357E-3	9.35316E-2	2.7288E1	-3.26738E1	-3.26508E1	2.67914E1	1.6987E-7	2.51096E-3	2.51096E-3	6.33977E-3	1.9968E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09711E0	-8.16369E-1	-7.98249E-1	-9.1316E0	-9.14192E0	5.84126E-3	9.32932E-2	2.72895E1	-3.265E1	-3.26254E1	2.6801E1	1.69654E-7	2.51552E-3	2.51552E-3	6.25827E-3	2.01372E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.16536E-1	-7.98178E-1	-9.13115E0	-9.1419E0	5.60284E-3	9.33886E-2	2.73484E1	-3.26729E1	-3.26284E1	2.68172E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99456E-1
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16655E-1	-7.98059E-1	-9.13122E0	-9.14192E0	5.60284E-3	9.32455E-2	2.73464E1	-3.27257E1	-3.26708E1	2.67688E1	1.69798E-7	2.52169E-3	2.52169E-3	6.35059E-3	2.00021E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.16703E-1	-7.97892E-1	-9.13117E0	-9.14207E0	5.6982E-3	9.35078E-2	2.72588E1	-3.26669E1	-3.26266E1	2.6792E1	1.69875E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00151E-1
1.8E1	8.0E1	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16631E-1	-7.97701E-1	-9.13148E0	-9.14216E0	5.72205E-3	9.34124E-2	2.73363E1	-3.26897E1	-3.26326E1	2.67896E1	1.69943E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.00363E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0968E0	-8.16631E-1	-7.98154E-1	-9.13124E0	-9.14187E0	5.48363E-3	9.34124E-2	2.73381E1	-3.2652E1	-3.26437E1	2.6798E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00325E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.16703E-1	-7.98082E-1	-9.13122E0	-9.14183E0	5.45979E-3	9.33409E-2	2.73411E1	-3.26398E1	-3.2647E1	2.67878E1	1.69725E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.16655E-1	-7.98321E-1	-9.131E0	-9.14183E0	5.43594E-3	9.33886E-2	2.73116E1	-3.26874E1	-3.25765E1	2.67943E1	1.69949E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.16536E-1	-7.98154E-1	-9.13107E0	-9.14187E0	5.38826E-3	9.32217E-2	2.7269E1	-3.26434E1	-3.26488E1	2.68214E1	1.69798E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16417E-1	-7.98225E-1	-9.13124E0	-9.14195E0	5.19753E-3	9.32932E-2	2.73375E1	-3.26862E1	-3.26048E1	2.6819E1	1.69802E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98419E-1