[Scan]
initial_time=2016-02-17T23:37:33
final_time=2016-02-17T23:37:54
ip_count=19
run=1032
dataset=11
scan=612
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36312E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.91234E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.45266E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.15611E-10
mult1=-9.6561E-9
mult2=-2.81642E-9
rf_tmon=-4.36222E-3
rf_agc=3.37902E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.60606E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.06235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05373E1
cs_ea1_imon=2.18531E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41882E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.59698E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.00721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.72698E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.19108E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20884E0
cs_ionrep_imon=1.25559E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.28183E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.68322E-8
tplens_vset=1.4E-1
tplens_vmon=1.64203E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.60167E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.07492E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=2.00434E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8349E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.68302E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=3.54095E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.32199E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.09459E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83119E-1
olens1_imon=9.84324E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-2.02124E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.57276E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.85864E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.70005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.45634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.36478E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=6.36621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.59539E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06729E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64233E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=1.00626E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61897E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65659E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55781E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99693E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22457E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73107E-1
res40_imon=-2.69158E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16345E-1	-7.98225E-1	-9.13131E0	-9.14199E0	5.45979E-3	9.32932E-2	2.73381E1	-3.26697E1	-3.26343E1	2.68016E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00151E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16011E-1	-7.98178E-1	-9.13115E0	-9.14207E0	5.50747E-3	9.3174E-2	2.73045E1	-3.26664E1	-3.26199E1	2.68166E1	1.69725E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.01047E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16512E-1	-7.97892E-1	-9.13107E0	-9.14209E0	5.57899E-3	9.31263E-2	2.73263E1	-3.27015E1	-3.26337E1	2.67896E1	1.69806E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09711E0	-8.16393E-1	-7.97963E-1	-9.13122E0	-9.14173E0	5.57899E-3	9.32455E-2	2.73104E1	-3.26856E1	-3.25894E1	2.68175E1	1.69581E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09673E0	-8.1656E-1	-7.98225E-1	-9.131E0	-9.14173E0	5.88894E-3	9.31978E-2	2.73299E1	-3.26425E1	-3.2652E1	2.68268E1	1.69798E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.16464E-1	-7.98368E-1	-9.13105E0	-9.14192E0	5.55515E-3	9.3317E-2	2.73161E1	-3.26689E1	-3.26249E1	2.6796E1	1.69798E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16369E-1	-7.98702E-1	-9.13103E0	-9.14197E0	5.60284E-3	9.32693E-2	2.73026E1	-3.26697E1	-3.2611E1	2.68356E1	1.69794E-7	2.52765E-3	2.52765E-3	6.30212E-3	1.98894E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.16202E-1	-7.98726E-1	-9.13124E0	-9.14209E0	5.65052E-3	9.32455E-2	2.73003E1	-3.26663E1	-3.26609E1	2.68142E1	1.7004E-7	2.52521E-3	2.52521E-3	6.30171E-3	1.98446E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16274E-1	-7.98535E-1	-9.1311E0	-9.14216E0	5.19753E-3	9.31501E-2	2.73328E1	-3.2688E1	-3.26278E1	2.6836E1	1.69654E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.98592E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16584E-1	-7.98321E-1	-9.13126E0	-9.14228E0	6.00815E-3	9.33409E-2	2.72971E1	-3.26634E1	-3.26327E1	2.68082E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9917E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16679E-1	-7.98225E-1	-9.13098E0	-9.1423E0	5.62668E-3	9.3317E-2	2.73243E1	-3.26579E1	-3.26074E1	2.6813E1	1.69731E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.99577E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16751E-1	-7.98178E-1	-9.13141E0	-9.14195E0	5.76973E-3	9.31978E-2	2.72911E1	-3.27094E1	-3.2645E1	2.67741E1	1.69728E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99456E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16488E-1	-7.9844E-1	-9.13157E0	-9.14199E0	5.48363E-3	9.3174E-2	2.72805E1	-3.26927E1	-3.26891E1	2.68016E1	1.69718E-7	2.5216E-3	2.5216E-3	6.31761E-3	2.00145E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16369E-1	-7.98464E-1	-9.13129E0	-9.14202E0	5.57899E-3	9.35078E-2	2.72591E1	-3.26425E1	-3.26508E1	2.67926E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98764E-1
1.8E1	1.04E2	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16655E-1	-7.98392E-1	-9.13103E0	-9.14223E0	5.76973E-3	9.32455E-2	2.72991E1	-3.26717E1	-3.26284E1	2.68053E1	1.69654E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00499E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16679E-1	-7.98368E-1	-9.13136E0	-9.14218E0	5.8651E-3	9.3174E-2	2.72931E1	-3.26855E1	-3.26771E1	2.68118E1	1.6987E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.01047E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16607E-1	-7.98368E-1	-9.1311E0	-9.14199E0	5.81741E-3	9.31501E-2	2.73033E1	-3.26987E1	-3.26182E1	2.67848E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16798E-1	-7.98035E-1	-9.13095E0	-9.14218E0	5.55515E-3	9.33647E-2	2.72827E1	-3.26278E1	-3.26661E1	2.67836E1	1.69875E-7	2.50789E-3	2.50789E-3	6.31288E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16417E-1	-7.98106E-1	-9.13129E0	-9.14202E0	5.36442E-3	9.32455E-2	2.72918E1	-3.26335E1	-3.26602E1	2.68053E1	1.69725E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16464E-1	-7.97963E-1	-9.1315E0	-9.14211E0	5.50747E-3	9.32932E-2	2.73165E1	-3.26494E1	-3.26194E1	2.68136E1	1.69581E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9951E-1