[Scan]
initial_time=2016-02-17T23:38:29
final_time=2016-02-17T23:38:50
ip_count=19
run=1032
dataset=11
scan=614
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08879E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36655E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.97253E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.43812E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.02951E-10
mult1=-1.01257E-8
mult2=-2.7745E-9
rf_tmon=-3.06443E-3
rf_agc=3.41507E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.57614E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=2.00614E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12561E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5331E1
cs_ef1b_imon=3.04253E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.17269E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40561E0
lens1_imon=2.50891E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.57932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.00036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.72704E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.19108E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26411E0
cs_ionrep_imon=1.26352E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=3.27318E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.69151E-8
tplens_vset=1.4E-1
tplens_vmon=1.60118E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.12748E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=2.03787E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16548E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.10812E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87035E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00825E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.59893E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.5305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.29254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.10382E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.07008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09151E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=9.82648E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55985E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.33851E-1
window_imon=-1.21756E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-8.24728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=8.06415E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.09479E0
defgridb_imon=5.89757E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33378E1
os_fil1_imon=9.58145E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07143E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63875E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=1.00574E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65555E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67389E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95697E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.41583E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.1E1	0.0E0	1.47E2	4.1E1	-2.0975E0	-8.16655E-1	-7.97987E-1	-9.1315E0	-9.14187E0	5.38826E-3	9.35078E-2	2.73222E1	-3.26632E1	-3.2629E1	2.67806E1	1.69875E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99283E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0968E0	-8.16584E-1	-7.98416E-1	-9.13136E0	-9.14166E0	5.55515E-3	9.32455E-2	2.73185E1	-3.26993E1	-3.26344E1	2.68088E1	1.69653E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0968E0	-8.16393E-1	-7.98082E-1	-9.13153E0	-9.14183E0	5.6982E-3	9.30309E-2	2.73007E1	-3.26416E1	-3.26447E1	2.67851E1	1.69786E-7	2.52262E-3	2.52262E-3	6.33809E-3	2.01444E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16536E-1	-7.97963E-1	-9.13131E0	-9.14173E0	5.62668E-3	9.3174E-2	2.73478E1	-3.26795E1	-3.2614E1	2.68058E1	1.69734E-7	2.52179E-3	2.52179E-3	6.31879E-3	2.00425E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09673E0	-8.16345E-1	-7.98059E-1	-9.13112E0	-9.14171E0	5.38826E-3	9.3317E-2	2.73027E1	-3.2644E1	-3.26194E1	2.67842E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09704E0	-8.16488E-1	-7.98082E-1	-9.13136E0	-9.14185E0	5.67436E-3	9.33886E-2	2.72591E1	-3.26649E1	-3.26189E1	2.67902E1	1.69802E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09711E0	-8.16488E-1	-7.98154E-1	-9.13129E0	-9.14202E0	5.88894E-3	9.32932E-2	2.73504E1	-3.26566E1	-3.26395E1	2.6802E1	1.69725E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9731E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09704E0	-8.16417E-1	-7.97939E-1	-9.13146E0	-9.14176E0	5.93662E-3	9.35793E-2	2.72799E1	-3.26687E1	-3.26188E1	2.68142E1	1.69731E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.96945E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09727E0	-8.16584E-1	-7.98011E-1	-9.13167E0	-9.14185E0	5.72205E-3	9.35078E-2	2.72803E1	-3.27068E1	-3.25936E1	2.67821E1	1.69654E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98075E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09696E0	-8.16345E-1	-7.98154E-1	-9.13169E0	-9.14171E0	5.74589E-3	9.34124E-2	2.72943E1	-3.26374E1	-3.2638E1	2.6789E1	1.6969E-7	2.51918E-3	2.51918E-3	6.30469E-3	1.99999E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.16321E-1	-7.98202E-1	-9.13136E0	-9.14202E0	5.74589E-3	9.32932E-2	2.73629E1	-3.26655E1	-3.26826E1	2.68082E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.16488E-1	-7.9844E-1	-9.13134E0	-9.14192E0	5.31673E-3	9.3317E-2	2.73586E1	-3.2638E1	-3.26591E1	2.6786E1	1.69725E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.01219E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16584E-1	-7.98512E-1	-9.13165E0	-9.14197E0	5.50747E-3	9.31263E-2	2.73411E1	-3.26891E1	-3.25894E1	2.68076E1	1.69581E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98764E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16774E-1	-7.98464E-1	-9.13146E0	-9.14199E0	5.88894E-3	9.30071E-2	2.73157E1	-3.26514E1	-3.26148E1	2.68238E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99456E-1
1.8E1	1.13E2	1.0E0	7.27E2	5.0E2	-2.09549E0	-8.16536E-1	-7.98106E-1	-9.13157E0	-9.14199E0	5.67436E-3	9.28164E-2	2.73669E1	-3.27044E1	-3.26548E1	2.6807E1	1.69875E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99977E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-8.1625E-1	-7.98202E-1	-9.13179E0	-9.14192E0	5.84126E-3	9.30309E-2	2.73429E1	-3.26374E1	-3.2623E1	2.6819E1	1.70097E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16441E-1	-7.9844E-1	-9.13157E0	-9.1418E0	5.88894E-3	9.31978E-2	2.72892E1	-3.26962E1	-3.26225E1	2.6818E1	1.69875E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.16298E-1	-7.98202E-1	-9.13174E0	-9.14202E0	5.65052E-3	9.31263E-2	2.72937E1	-3.26651E1	-3.2644E1	2.68094E1	1.6987E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.1625E-1	-7.98035E-1	-9.13181E0	-9.14207E0	5.67436E-3	9.32693E-2	2.73641E1	-3.27145E1	-3.26225E1	2.67824E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98764E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16488E-1	-7.97939E-1	-9.13148E0	-9.14211E0	5.55515E-3	9.35078E-2	2.73051E1	-3.26831E1	-3.2629E1	2.67998E1	1.69581E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.9951E-1