[Scan]
initial_time=2016-02-17T23:39:25
final_time=2016-02-17T23:39:46
ip_count=19
run=1032
dataset=11
scan=616
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.36531E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.91273E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.54588E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.10104E-10
mult1=-9.921E-9
mult2=-2.7226E-9
rf_tmon=-3.51505E-3
rf_agc=3.40846E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.55538E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.76847E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20133E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53178E1
cs_ef1b_imon=3.06559E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.20081E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42303E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.57175E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8407E1
cs_ef1a_imon=3.01514E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.72242E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.2531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=2.19648E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26411E0
cs_ionrep_imon=1.26496E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02188E1
cs_anode1_imon=3.25408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.68637E-8
tplens_vset=1.4E-1
tplens_vmon=1.58075E0
tplens_imon=-3.9668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03047E2
lens6_imon=2.98742E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.07802E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31759E0
ionrepsh_imon=2.01119E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.14848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84451E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10601E1
os_restr2_imon=3.53483E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.30299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.0708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.08974E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=9.85266E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-2.09693E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55738E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=1.28445E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82586E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-9.50867E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.77575E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.58829E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.60608E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06939E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63922E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=1.00704E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61663E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6094E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97115E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31744E-3
inlet_lpb_pmon=1.9844E-1
chamber_ion_pmon=1.69716E-7
chamber_cvt_pmon=2.51523E-3
foreline_cvt_pmon=2.51523E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18157E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.5E1	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16345E-1	-7.97939E-1	-9.13126E0	-9.14204E0	5.53131E-3	9.32932E-2	2.73246E1	-3.26543E1	-3.26319E1	2.68268E1	1.69654E-7	2.51552E-3	2.51552E-3	6.28006E-3	1.99803E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.1625E-1	-7.98202E-1	-9.13112E0	-9.14185E0	5.43594E-3	9.33409E-2	2.72904E1	-3.26866E1	-3.26407E1	2.68046E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.15964E-1	-7.97939E-1	-9.13103E0	-9.14192E0	5.60284E-3	9.34124E-2	2.7319E1	-3.26764E1	-3.26382E1	2.68192E1	1.69728E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16059E-1	-7.97725E-1	-9.13122E0	-9.1419E0	5.57899E-3	9.34124E-2	2.73075E1	-3.26819E1	-3.26266E1	2.68016E1	1.69798E-7	2.51739E-3	2.51739E-3	6.35059E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16393E-1	-7.98059E-1	-9.13086E0	-9.14209E0	5.79357E-3	9.31025E-2	2.72751E1	-3.26701E1	-3.26046E1	2.67907E1	1.69802E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16393E-1	-7.97963E-1	-9.13117E0	-9.14226E0	5.48363E-3	9.31025E-2	2.73275E1	-3.26213E1	-3.2662E1	2.68076E1	1.69806E-7	2.51693E-3	2.51693E-3	6.34661E-3	1.98696E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16488E-1	-7.98178E-1	-9.13095E0	-9.14202E0	5.17368E-3	9.31263E-2	2.73116E1	-3.26567E1	-3.26691E1	2.68136E1	1.69653E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9985E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16488E-1	-7.98249E-1	-9.13146E0	-9.14209E0	5.60284E-3	9.30309E-2	2.73027E1	-3.26609E1	-3.2678E1	2.67962E1	1.69725E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.00363E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16226E-1	-7.98035E-1	-9.13115E0	-9.14221E0	5.62668E-3	9.30548E-2	2.73057E1	-3.26969E1	-3.26338E1	2.68004E1	1.69875E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1625E-1	-7.98106E-1	-9.13134E0	-9.14202E0	5.79357E-3	9.32932E-2	2.72951E1	-3.26832E1	-3.26207E1	2.67998E1	1.69654E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16298E-1	-7.98202E-1	-9.13095E0	-9.14197E0	5.57899E-3	9.28879E-2	2.73369E1	-3.27095E1	-3.265E1	2.67902E1	1.69802E-7	2.52099E-3	2.52099E-3	6.28552E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16464E-1	-7.98368E-1	-9.13134E0	-9.14197E0	5.84126E-3	9.29594E-2	2.73129E1	-3.26993E1	-3.26975E1	2.67962E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.97903E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16274E-1	-7.98082E-1	-9.13117E0	-9.14214E0	5.76973E-3	9.29117E-2	2.73003E1	-3.26476E1	-3.26464E1	2.67926E1	1.69728E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.97903E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16488E-1	-7.98106E-1	-9.13124E0	-9.14195E0	5.45979E-3	9.30071E-2	2.7324E1	-3.26773E1	-3.26313E1	2.68041E1	1.7016E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.97984E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.09688E0	-8.16488E-1	-7.98178E-1	-9.1315E0	-9.14207E0	5.14984E-3	9.31263E-2	2.73039E1	-3.26813E1	-3.26567E1	2.67999E1	1.69728E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16584E-1	-7.98082E-1	-9.13143E0	-9.1419E0	5.43594E-3	9.32217E-2	2.72937E1	-3.26669E1	-3.26543E1	2.6801E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09704E0	-8.16345E-1	-7.98154E-1	-9.13107E0	-9.14211E0	5.55515E-3	9.3317E-2	2.73279E1	-3.26621E1	-3.26152E1	2.68013E1	1.69802E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.1594E-1	-7.98154E-1	-9.13117E0	-9.14197E0	5.22137E-3	9.31263E-2	2.7301E1	-3.26791E1	-3.26319E1	2.68007E1	1.69875E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.15749E-1	-7.97868E-1	-9.13129E0	-9.14183E0	5.48363E-3	9.31025E-2	2.7298E1	-3.26684E1	-3.26106E1	2.68098E1	1.69725E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16035E-1	-7.98154E-1	-9.13134E0	-9.14183E0	5.14984E-3	9.33886E-2	2.73153E1	-3.2638E1	-3.26338E1	2.68202E1	1.69716E-7	2.51523E-3	2.51523E-3	6.31744E-3	1.9844E-1