[Scan]
initial_time=2016-02-17T23:40:49
final_time=2016-02-17T23:41:09
ip_count=19
run=1032
dataset=11
scan=619
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36431E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.91048E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=3.34585E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.01199E-10
mult1=-1.00534E-8
mult2=-2.79646E-9
rf_tmon=-4.98708E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=1.59609E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64601E0
bslens_imon=2.72933E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19828E1
lens5a_imon=1.99122E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05211E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53435E1
cs_ef1b_imon=3.05446E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04779E1
cs_ea1_imon=2.17581E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42065E0
lens1_imon=2.7189E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64857E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.55704E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.72298E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.27601E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15201E1
os_ea1_imon=2.19527E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28628E0
cs_ionrep_imon=1.2414E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91828E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=3.27444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.6986E-8
tplens_vset=1.4E-1
tplens_vmon=1.59219E0
tplens_imon=-3.36683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.52576E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.57825E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.07116E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25326E0
ionrepsh_imon=1.99261E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33542E1
lens5b_imon=2.20049E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86507E0
os_ea2_imon=-6.98208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.86429E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.53509E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31458E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.29581E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.09471E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08757E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.83568E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-1.90733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=1.31384E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.85956E1
mask2_imon=-7.98728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.6273E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.59139E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=6.94597E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40651E0
defgridb_imon=6.00391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33372E1
os_fil1_imon=9.58846E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0715E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63543E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=1.00605E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6265E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65616E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77246E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.13876E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37767E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08409E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22507E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.42141E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.18082E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16298E-1	-7.98082E-1	-9.13105E0	-9.14195E0	5.65052E-3	9.29594E-2	2.73092E1	-3.2672E1	-3.26183E1	2.67962E1	1.69725E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00363E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16226E-1	-7.97892E-1	-9.13143E0	-9.14192E0	5.53131E-3	9.32693E-2	2.73257E1	-3.26653E1	-3.26541E1	2.68113E1	1.69581E-7	2.52061E-3	2.52061E-3	6.35059E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16727E-1	-7.97844E-1	-9.1315E0	-9.1419E0	5.84126E-3	9.34362E-2	2.73068E1	-3.26567E1	-3.26191E1	2.67845E1	1.69731E-7	2.51915E-3	2.51915E-3	6.27954E-3	2.01174E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16512E-1	-7.97606E-1	-9.13169E0	-9.14166E0	5.81741E-3	9.31978E-2	2.72985E1	-3.26609E1	-3.26398E1	2.68088E1	1.6987E-7	2.52276E-3	2.52276E-3	6.36144E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.1625E-1	-7.98035E-1	-9.13157E0	-9.14197E0	5.84126E-3	9.35316E-2	2.72762E1	-3.26762E1	-3.2613E1	2.67914E1	1.69581E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16321E-1	-7.97987E-1	-9.13165E0	-9.14235E0	5.65052E-3	9.31263E-2	2.72648E1	-3.26585E1	-3.26639E1	2.67866E1	1.69728E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16298E-1	-7.97749E-1	-9.13155E0	-9.14185E0	5.57899E-3	9.32217E-2	2.73249E1	-3.26999E1	-3.2638E1	2.68328E1	1.69581E-7	2.51755E-3	2.51755E-3	6.31283E-3	1.99827E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16298E-1	-7.97963E-1	-9.13112E0	-9.14226E0	5.55515E-3	9.29594E-2	2.72985E1	-3.26717E1	-3.26302E1	2.67848E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16369E-1	-7.97963E-1	-9.1311E0	-9.14204E0	5.55515E-3	9.28879E-2	2.72745E1	-3.26392E1	-3.26591E1	2.67998E1	1.69802E-7	2.51935E-3	2.51935E-3	6.31288E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16369E-1	-7.98106E-1	-9.13115E0	-9.14226E0	5.26905E-3	9.30071E-2	2.73222E1	-3.26313E1	-3.26661E1	2.67992E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16083E-1	-7.97653E-1	-9.13131E0	-9.14214E0	5.62668E-3	9.31025E-2	2.73039E1	-3.27005E1	-3.2593E1	2.67962E1	1.69654E-7	2.52428E-3	2.52428E-3	6.36244E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16321E-1	-7.98178E-1	-9.13141E0	-9.14214E0	5.29289E-3	9.31025E-2	2.73265E1	-3.26167E1	-3.26978E1	2.67978E1	1.69728E-7	2.52318E-3	2.52318E-3	6.26916E-3	1.98075E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.1656E-1	-7.9782E-1	-9.13148E0	-9.14202E0	5.31673E-3	9.32932E-2	2.73263E1	-3.27152E1	-3.26185E1	2.67957E1	1.6972E-7	2.51783E-3	2.51783E-3	6.34907E-3	1.98628E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16488E-1	-7.9782E-1	-9.13131E0	-9.14199E0	5.53131E-3	9.30071E-2	2.73249E1	-3.26639E1	-3.26074E1	2.68112E1	1.6981E-7	2.51611E-3	2.51611E-3	6.33021E-3	1.98088E-1
1.8E1	8.4E1	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16226E-1	-7.98035E-1	-9.13131E0	-9.14197E0	5.81741E-3	9.30071E-2	2.73234E1	-3.26408E1	-3.26343E1	2.68267E1	1.69731E-7	2.51915E-3	2.51915E-3	6.27399E-3	1.98696E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16488E-1	-7.97963E-1	-9.13107E0	-9.14173E0	6.00815E-3	9.31263E-2	2.73189E1	-3.26212E1	-3.26392E1	2.68082E1	1.69653E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00534E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16321E-1	-7.97915E-1	-9.13115E0	-9.14154E0	5.60284E-3	9.32217E-2	2.73207E1	-3.26579E1	-3.2617E1	2.68088E1	1.69581E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.1656E-1	-7.97868E-1	-9.131E0	-9.14168E0	5.60284E-3	9.30786E-2	2.73097E1	-3.26996E1	-3.26179E1	2.67995E1	1.69728E-7	2.5188E-3	2.5188E-3	6.3957E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.16178E-1	-7.97653E-1	-9.13098E0	-9.14164E0	5.84126E-3	9.32932E-2	2.73333E1	-3.26506E1	-3.26104E1	2.68154E1	1.69652E-7	2.52025E-3	2.52025E-3	6.37114E-3	1.99227E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.16321E-1	-7.97963E-1	-9.13095E0	-9.14176E0	5.72205E-3	9.32455E-2	2.73478E1	-3.26861E1	-3.26152E1	2.67926E1	1.69725E-7	2.51847E-3	2.51847E-3	6.42141E-3	2.00534E-1