[Scan]
initial_time=2016-02-17T23:41:44
final_time=2016-02-17T23:42:05
ip_count=19
run=1032
dataset=11
scan=621
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.35981E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.91617E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=3.45969E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.04465E-10
mult1=-9.19856E-9
mult2=-2.64076E-9
rf_tmon=-6.60931E-3
rf_agc=3.14049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=1.58249E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70098E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=2.0166E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53447E1
cs_ef1b_imon=3.04507E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=2.17522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.41518E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.54651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=3.00163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.71494E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.28644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=2.17558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08921E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.26965E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0167E1
cs_anode1_imon=3.26332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.68077E-8
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26621E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.56345E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.0881E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=2.01696E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34066E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.11666E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86434E0
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.17366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08526E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64419E-1
os_ef2bup_imon=-5.41386E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.53404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.26697E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.0739E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.09442E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.08597E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=9.78253E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13825E0
cs_ionaccel_imon=-1.90386E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.60923E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.78799E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.56666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.47076E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33392E1
os_fil1_imon=9.59652E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63514E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30889E1
cs_fil1_imon=1.00603E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61474E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65167E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.48042E-2
os_fil2_imon=-2.73869E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.41327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22425E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.69943E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69256E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16298E-1	-7.98011E-1	-9.13196E0	-9.14211E0	5.57899E-3	9.29832E-2	2.73153E1	-3.26741E1	-3.26482E1	2.6792E1	1.69798E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.98491E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16584E-1	-7.98082E-1	-9.13107E0	-9.14195E0	5.22137E-3	9.31263E-2	2.73189E1	-3.26987E1	-3.2638E1	2.6795E1	1.69875E-7	2.52647E-3	2.52647E-3	6.33486E-3	1.97903E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16464E-1	-7.98106E-1	-9.13131E0	-9.14171E0	5.34058E-3	9.3317E-2	2.73345E1	-3.27077E1	-3.26086E1	2.67836E1	1.69731E-7	2.51581E-3	2.51581E-3	6.29067E-3	1.97643E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16321E-1	-7.97963E-1	-9.13148E0	-9.14185E0	5.38826E-3	9.31263E-2	2.72945E1	-3.26938E1	-3.2606E1	2.67914E1	1.69725E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16154E-1	-7.9782E-1	-9.13174E0	-9.14187E0	5.67436E-3	9.31501E-2	2.72998E1	-3.2675E1	-3.26349E1	2.68124E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16274E-1	-7.97915E-1	-9.13124E0	-9.14166E0	5.36442E-3	9.30071E-2	2.72922E1	-3.26744E1	-3.26438E1	2.68094E1	1.69653E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.9934E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16369E-1	-7.97987E-1	-9.13119E0	-9.14195E0	5.05447E-3	9.32455E-2	2.72955E1	-3.265E1	-3.26398E1	2.68364E1	1.69654E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16226E-1	-7.98082E-1	-9.13117E0	-9.14218E0	5.45979E-3	9.34839E-2	2.73321E1	-3.26711E1	-3.26356E1	2.67698E1	1.69728E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.1625E-1	-7.98011E-1	-9.13122E0	-9.14166E0	5.67436E-3	9.31263E-2	2.72962E1	-3.26708E1	-3.26166E1	2.67776E1	1.69802E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16512E-1	-7.98059E-1	-9.13115E0	-9.14192E0	5.19753E-3	9.33647E-2	2.73173E1	-3.26395E1	-3.26731E1	2.67902E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00151E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16393E-1	-7.98178E-1	-9.13091E0	-9.14183E0	5.31673E-3	9.29832E-2	2.73104E1	-3.26602E1	-3.26343E1	2.68076E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16464E-1	-7.98035E-1	-9.1315E0	-9.1419E0	5.31673E-3	9.32932E-2	2.73234E1	-3.26756E1	-3.26431E1	2.68123E1	1.69875E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00325E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16441E-1	-7.97987E-1	-9.13155E0	-9.14171E0	5.14984E-3	9.35316E-2	2.73057E1	-3.26855E1	-3.26651E1	2.6804E1	1.69723E-7	2.52025E-3	2.52025E-3	6.29684E-3	2.00567E-1
1.7E1	1.2E1	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16226E-1	-7.98106E-1	-9.13146E0	-9.14183E0	5.45979E-3	9.31978E-2	2.73327E1	-3.26771E1	-3.26452E1	2.67836E1	1.69581E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.0064E-1
1.8E1	8.8E1	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16226E-1	-7.98202E-1	-9.13153E0	-9.14197E0	5.4121E-3	9.32932E-2	2.73424E1	-3.26434E1	-3.265E1	2.68106E1	1.69725E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9968E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16631E-1	-7.98392E-1	-9.13112E0	-9.14197E0	5.14984E-3	9.30786E-2	2.73099E1	-3.26549E1	-3.26717E1	2.67896E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16393E-1	-7.97892E-1	-9.13093E0	-9.14204E0	5.96046E-3	9.33886E-2	2.73099E1	-3.26879E1	-3.26314E1	2.68418E1	1.69654E-7	2.52209E-3	2.52209E-3	6.34037E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.1656E-1	-7.98202E-1	-9.13098E0	-9.14185E0	5.6982E-3	9.32455E-2	2.73161E1	-3.26579E1	-3.26503E1	2.67711E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16417E-1	-7.98059E-1	-9.13122E0	-9.14168E0	5.74589E-3	9.34362E-2	2.73159E1	-3.26759E1	-3.26212E1	2.67974E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16059E-1	-7.98321E-1	-9.13115E0	-9.14183E0	5.76973E-3	9.33647E-2	2.73315E1	-3.26554E1	-3.26621E1	2.67914E1	1.69943E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9883E-1