[Scan]
initial_time=2016-02-17T23:42:40
final_time=2016-02-17T23:43:00
ip_count=19
run=1032
dataset=11
scan=623
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36221E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.89306E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=3.31616E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.04561E-10
mult1=-8.52429E-9
mult2=-2.78648E-9
rf_tmon=-4.57852E-3
rf_agc=3.17113E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.5484E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69137E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.06235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.18927E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.57175E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.71442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.25346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=2.19757E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63978E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.27578E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93189E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.24579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.68433E-8
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.59121E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.06849E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=2.02885E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.20405E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87455E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70783E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0954E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.86922E-1
os_ef2bup_imon=-5.51709E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=3.51176E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23108E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.29434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.07552E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.78357E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-2.10414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47107E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55955E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.5127E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-9.83303E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.87308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.63377E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06602E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63676E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=1.01104E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62047E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65438E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68678E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.04849E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-1.8791E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22459E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.69949E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.32282E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.15988E-1	-7.97892E-1	-9.13138E0	-9.14171E0	5.57899E-3	9.28879E-2	2.73163E1	-3.26549E1	-3.26301E1	2.681E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.15868E-1	-7.97725E-1	-9.1315E0	-9.1418E0	5.38826E-3	9.29356E-2	2.73112E1	-3.26487E1	-3.26474E1	2.67704E1	1.69725E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.98322E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.15701E-1	-7.9813E-1	-9.13117E0	-9.14171E0	5.26905E-3	9.28879E-2	2.72895E1	-3.2648E1	-3.26052E1	2.68001E1	1.69581E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.97388E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.15988E-1	-7.98154E-1	-9.13126E0	-9.14152E0	4.98295E-3	9.31501E-2	2.73045E1	-3.26867E1	-3.25707E1	2.67992E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.98322E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15916E-1	-7.98273E-1	-9.13131E0	-9.14152E0	5.17368E-3	9.30309E-2	2.72859E1	-3.26518E1	-3.26554E1	2.6792E1	1.69875E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16083E-1	-7.9813E-1	-9.1311E0	-9.14192E0	5.50747E-3	9.32932E-2	2.72949E1	-3.26645E1	-3.26182E1	2.68064E1	1.69798E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16178E-1	-7.98345E-1	-9.13138E0	-9.14185E0	5.53131E-3	9.34362E-2	2.72895E1	-3.26561E1	-3.26038E1	2.6807E1	1.69656E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.99224E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16178E-1	-7.9813E-1	-9.13126E0	-9.14161E0	5.03063E-3	9.32455E-2	2.72935E1	-3.26664E1	-3.25715E1	2.68149E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00325E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16274E-1	-7.97701E-1	-9.13107E0	-9.14164E0	5.29289E-3	9.32932E-2	2.72927E1	-3.26549E1	-3.25942E1	2.67952E1	1.69875E-7	2.51443E-3	2.51443E-3	6.26916E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16417E-1	-7.98202E-1	-9.13122E0	-9.14171E0	5.19753E-3	9.31263E-2	2.73363E1	-3.26651E1	-3.26398E1	2.68316E1	1.69949E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9963E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16298E-1	-7.98249E-1	-9.13138E0	-9.14168E0	5.50747E-3	9.31501E-2	2.73315E1	-3.26609E1	-3.2611E1	2.67878E1	1.69581E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16369E-1	-7.98035E-1	-9.13167E0	-9.14149E0	5.36442E-3	9.34601E-2	2.73015E1	-3.26663E1	-3.25906E1	2.6807E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9951E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16512E-1	-7.98059E-1	-9.13177E0	-9.1418E0	5.74589E-3	9.33409E-2	2.73628E1	-3.26711E1	-3.25719E1	2.68124E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98764E-1
1.7E1	1.3E1	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16298E-1	-7.9813E-1	-9.13162E0	-9.14168E0	5.65052E-3	9.32932E-2	2.72829E1	-3.27041E1	-3.25888E1	2.6795E1	1.69728E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98592E-1
1.8E1	1.02E2	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16202E-1	-7.97725E-1	-9.13143E0	-9.14183E0	5.43594E-3	9.34601E-2	2.7301E1	-3.26767E1	-3.26278E1	2.67734E1	1.69654E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99977E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16178E-1	-7.97772E-1	-9.13184E0	-9.14214E0	5.6982E-3	9.32455E-2	2.72862E1	-3.26909E1	-3.26378E1	2.67665E1	1.69581E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00363E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.1625E-1	-7.98059E-1	-9.13186E0	-9.14173E0	5.60284E-3	9.33409E-2	2.72991E1	-3.26675E1	-3.26494E1	2.68064E1	1.69653E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.00192E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16298E-1	-7.97868E-1	-9.13165E0	-9.14183E0	5.6982E-3	9.32693E-2	2.73157E1	-3.2652E1	-3.26065E1	2.68106E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16202E-1	-7.97963E-1	-9.13146E0	-9.14185E0	5.48363E-3	9.33647E-2	2.73141E1	-3.26597E1	-3.2644E1	2.68082E1	1.69581E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.98937E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16321E-1	-7.97963E-1	-9.13119E0	-9.14202E0	5.67436E-3	9.34362E-2	2.73045E1	-3.26326E1	-3.2644E1	2.6792E1	1.69949E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.9911E-1