[Scan]
initial_time=2016-02-17T23:43:07
final_time=2016-02-17T23:43:27
ip_count=19
run=1032
dataset=11
scan=624
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16083E-1
ql1_imon=1.36242E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.9074E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.27408E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.18389E-10
mult1=-8.96979E-9
mult2=-2.71861E-9
rf_tmon=-4.35621E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.587E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=2.01912E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53689E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=2.19108E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40741E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64322E1
os_ef1alow_imon=2.98102E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04123E1
cs_ea2_imon=1.55841E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=3.01357E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.71452E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11247E1
os_restr1_imon=4.2775E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.18387E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63721E1
os_ef1bup_imon=3.09177E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26472E0
cs_ionrep_imon=1.24802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.25843E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.68337E-8
tplens_vset=1.4E-1
tplens_vmon=1.59217E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.58941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.07856E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=2.00867E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.17594E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74714E1
cs_ef2b_imon=3.13458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8337E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71039E1
cs_ef2a_imon=3.18483E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10439E0
os_ef2alow_imon=-2.58425E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.87261E-1
os_ef2bup_imon=-5.34069E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10722E1
os_restr2_imon=3.52912E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.32019E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01603E1
cs_anode2_imon=2.2659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72678E1
iondef1_imon=1.12149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08399E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=9.77879E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1443E0
cs_ionaccel_imon=-1.98272E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56529E1
einzel_imon=7.5003E-6
window_vset=0.0E0
window_vmon=1.41146E-1
window_imon=-1.05211E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.8586E1
mask2_imon=-7.86723E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.84785E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.03456E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.41525E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.55276E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07683E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=1.00399E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64168E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.60273E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92647E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.53572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35309E-1
cs_fil2_imon=-2.63222E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22171E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.33005E-1
res40_imon=-2.59133E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16274E-1	-7.9813E-1	-9.13131E0	-9.14173E0	5.81741E-3	9.3174E-2	2.72933E1	-3.26791E1	-3.2672E1	2.67775E1	1.70088E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00192E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16441E-1	-7.98035E-1	-9.13136E0	-9.14185E0	5.98431E-3	9.3317E-2	2.73069E1	-3.26493E1	-3.2637E1	2.68138E1	1.6987E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00534E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16202E-1	-7.97963E-1	-9.13117E0	-9.14199E0	5.72205E-3	9.31263E-2	2.73103E1	-3.26984E1	-3.26104E1	2.67845E1	1.70031E-7	2.51581E-3	2.51581E-3	6.29624E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16059E-1	-7.97868E-1	-9.13146E0	-9.14185E0	5.67436E-3	9.31978E-2	2.73159E1	-3.26476E1	-3.26314E1	2.68178E1	1.69723E-7	2.51603E-3	2.51603E-3	6.30212E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16083E-1	-7.97701E-1	-9.13138E0	-9.14199E0	5.67436E-3	9.30548E-2	2.72868E1	-3.2685E1	-3.26006E1	2.67781E1	1.69581E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.15845E-1	-7.97963E-1	-9.1315E0	-9.1419E0	5.74589E-3	9.31025E-2	2.73448E1	-3.26518E1	-3.26242E1	2.67986E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.97903E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.15964E-1	-7.98059E-1	-9.1315E0	-9.14187E0	5.74589E-3	9.32217E-2	2.73002E1	-3.26762E1	-3.26321E1	2.67889E1	1.69728E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16059E-1	-7.97963E-1	-9.13157E0	-9.1419E0	5.4121E-3	9.28879E-2	2.73357E1	-3.26951E1	-3.26326E1	2.6813E1	1.69949E-7	2.52538E-3	2.52538E-3	6.29645E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16178E-1	-7.98202E-1	-9.13157E0	-9.14176E0	5.65052E-3	9.30786E-2	2.72979E1	-3.26633E1	-3.26597E1	2.68136E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.01547E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16083E-1	-7.98178E-1	-9.13153E0	-9.1413E0	5.60284E-3	9.29832E-2	2.73171E1	-3.26693E1	-3.25912E1	2.67926E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00325E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16083E-1	-7.98154E-1	-9.13146E0	-9.14159E0	5.74589E-3	9.3174E-2	2.73351E1	-3.26765E1	-3.26086E1	2.68238E1	1.69806E-7	2.51581E-3	2.51581E-3	6.29067E-3	1.98872E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16226E-1	-7.98225E-1	-9.13119E0	-9.14176E0	5.91278E-3	9.31978E-2	2.73063E1	-3.26609E1	-3.26278E1	2.68046E1	1.69725E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16274E-1	-7.97987E-1	-9.13146E0	-9.1418E0	5.62668E-3	9.29594E-2	2.73375E1	-3.27027E1	-3.26319E1	2.68041E1	1.69581E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
1.7E1	9.0E0	0.0E0	6.87E2	4.7E2	-2.09727E0	-8.16321E-1	-7.98297E-1	-9.13162E0	-9.14192E0	5.65052E-3	9.2864E-2	2.73435E1	-3.26296E1	-3.26356E1	2.68064E1	1.69653E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00192E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.16083E-1	-7.97892E-1	-9.13148E0	-9.14168E0	5.57899E-3	9.32932E-2	2.73189E1	-3.26747E1	-3.26182E1	2.68172E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00847E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.15916E-1	-7.98178E-1	-9.13148E0	-9.14159E0	5.62668E-3	9.30548E-2	2.72945E1	-3.26815E1	-3.26378E1	2.67884E1	1.69581E-7	2.51771E-3	2.51771E-3	6.3514E-3	2.00847E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16154E-1	-7.98011E-1	-9.13136E0	-9.14199E0	5.43594E-3	9.3174E-2	2.73171E1	-3.26723E1	-3.26116E1	2.68208E1	1.69798E-7	2.52276E-3	2.52276E-3	6.33436E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16321E-1	-7.98035E-1	-9.1316E0	-9.14214E0	5.4121E-3	9.31263E-2	2.73175E1	-3.26691E1	-3.26065E1	2.68209E1	1.69654E-7	2.52099E-3	2.52099E-3	6.28552E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.16369E-1	-7.98345E-1	-9.13167E0	-9.14209E0	5.48363E-3	9.33647E-2	2.73405E1	-3.26826E1	-3.26319E1	2.67854E1	1.69653E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16083E-1	-7.98082E-1	-9.13124E0	-9.1419E0	5.57899E-3	9.33886E-2	2.72678E1	-3.26813E1	-3.26573E1	2.68004E1	1.69802E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99456E-1