[Scan]
initial_time=2016-02-17T23:43:35
final_time=2016-02-17T23:43:55
ip_count=19
run=1032
dataset=11
scan=625
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08852E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=1.36021E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.90078E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=3.12209E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.10461E-10
mult1=-9.17448E-9
mult2=-2.83438E-9
rf_tmon=-3.81547E-3
rf_agc=3.2949E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.53058E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67152E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20113E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=3.06315E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05195E1
cs_ea1_imon=2.19958E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38849E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04209E1
cs_ea2_imon=1.577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=3.00302E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.71089E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=4.27983E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.19463E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21729E0
cs_ionrep_imon=1.2666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=3.26263E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.6785E-8
tplens_vset=1.4E-1
tplens_vmon=1.59424E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03001E2
lens6_imon=2.98608E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.04732E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29516E0
ionrepsh_imon=2.03005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84377E0
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.1148E0
os_ef2alow_imon=-2.61629E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.60944E-1
os_ef2bup_imon=-5.39301E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.52744E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.32016E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.27531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.0826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.08129E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=9.77138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-2.15408E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=1.45864E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.41702E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61521E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.52104E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07289E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63074E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30832E1
cs_fil1_imon=1.00285E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62071E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6101E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.3697E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.27532E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.75572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16548E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.1E1	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16441E-1	-7.97939E-1	-9.13148E0	-9.14192E0	5.72205E-3	9.32217E-2	2.73213E1	-3.26556E1	-3.26335E1	2.68279E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9951E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16488E-1	-7.98035E-1	-9.13155E0	-9.14199E0	5.88894E-3	9.31501E-2	2.73276E1	-3.26653E1	-3.25886E1	2.68094E1	1.69936E-7	2.51814E-3	2.51814E-3	6.31269E-3	1.99061E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.16441E-1	-7.98154E-1	-9.13172E0	-9.14173E0	5.74589E-3	9.32455E-2	2.7321E1	-3.26927E1	-3.26478E1	2.68082E1	1.69659E-7	2.52338E-3	2.52338E-3	6.31902E-3	1.97822E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16345E-1	-7.98082E-1	-9.1316E0	-9.14195E0	5.91278E-3	9.35555E-2	2.73201E1	-3.2653E1	-3.26224E1	2.67926E1	1.69865E-7	2.51287E-3	2.51287E-3	6.30212E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16345E-1	-7.98059E-1	-9.13162E0	-9.14192E0	5.96046E-3	9.35316E-2	2.72945E1	-3.26614E1	-3.26095E1	2.68157E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16226E-1	-7.98082E-1	-9.1315E0	-9.14185E0	5.74589E-3	9.35316E-2	2.72819E1	-3.26312E1	-3.26196E1	2.67781E1	1.69653E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16107E-1	-7.9813E-1	-9.13165E0	-9.14192E0	5.67436E-3	9.32693E-2	2.73269E1	-3.26691E1	-3.26229E1	2.67695E1	1.69581E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.99729E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16274E-1	-7.98225E-1	-9.13143E0	-9.14237E0	5.67436E-3	9.31978E-2	2.72955E1	-3.26597E1	-3.26254E1	2.6834E1	1.69657E-7	2.52179E-3	2.52179E-3	6.31879E-3	1.99523E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16512E-1	-7.97868E-1	-9.13141E0	-9.14197E0	5.91278E-3	9.30786E-2	2.73177E1	-3.26446E1	-3.26609E1	2.6792E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3514E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16298E-1	-7.98059E-1	-9.13148E0	-9.14183E0	5.93662E-3	9.32217E-2	2.73315E1	-3.26915E1	-3.26056E1	2.6798E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16202E-1	-7.98321E-1	-9.13146E0	-9.14164E0	6.07967E-3	9.35555E-2	2.72774E1	-3.2652E1	-3.26006E1	2.67872E1	1.69728E-7	2.52154E-3	2.52154E-3	6.33486E-3	2.00586E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16226E-1	-7.98178E-1	-9.13134E0	-9.14183E0	5.84126E-3	9.31263E-2	2.73069E1	-3.26346E1	-3.26456E1	2.67992E1					
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16274E-1	-7.98392E-1	-9.13157E0	-9.14209E0	5.8651E-3	9.34839E-2	2.73234E1	-3.26455E1	-3.26154E1	2.67992E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16154E-1	-7.97963E-1	-9.1315E0	-9.14197E0	5.98431E-3	9.32217E-2	2.73225E1	-3.26891E1	-3.26236E1	2.67812E1	1.69802E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99456E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.16298E-1	-7.98011E-1	-9.13167E0	-9.14214E0	5.84126E-3	9.3317E-2	2.73051E1	-3.26554E1	-3.26488E1	2.68406E1	1.69798E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00534E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16488E-1	-7.98249E-1	-9.13146E0	-9.14211E0	5.8651E-3	9.34362E-2	2.73538E1	-3.26933E1	-3.26038E1	2.67848E1	1.69581E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.00847E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16369E-1	-7.98082E-1	-9.1315E0	-9.14223E0	5.65052E-3	9.34839E-2	2.72973E1	-3.26573E1	-3.26422E1	2.67926E1	1.69656E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.00108E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16274E-1	-7.97987E-1	-9.1315E0	-9.14195E0	5.53131E-3	9.32455E-2	2.7312E1	-3.26596E1	-3.26225E1	2.68117E1	1.69653E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.9934E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16083E-1	-7.98154E-1	-9.13162E0	-9.14185E0	5.55515E-3	9.33409E-2	2.72925E1	-3.26765E1	-3.26657E1	2.6789E1	1.69723E-7	2.51603E-3	2.51603E-3	6.30212E-3	1.99562E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.15964E-1	-7.98249E-1	-9.13169E0	-9.14207E0	5.48363E-3	9.31978E-2	2.72991E1	-3.26927E1	-3.26224E1	2.67848E1	1.69654E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98764E-1