[Scan]
initial_time=2016-02-17T23:44:58
final_time=2016-02-17T23:45:18
ip_count=19
run=1032
dataset=11
scan=628
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.36052E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.92617E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=2.92945E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=4.11177E-10
mult1=-9.95712E-9
mult2=-2.80844E-9
rf_tmon=-4.29012E-3
rf_agc=3.33997E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=1.59739E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60245E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.04793E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.01865E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.19036E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.79731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.55949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.70927E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.22713E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28454E0
cs_ionrep_imon=1.25163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.25696E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.66747E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.08176E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=2.03174E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33399E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81026E0
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00277E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65899E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.52762E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.2738E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72763E1
iondef1_imon=1.12473E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67653E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.0806E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=9.75887E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.99962E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.85924E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=8.34894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.76636E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61811E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.63539E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06807E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63291E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=1.00993E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62474E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64819E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.36042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22402E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16679E-1	-7.97892E-1	-9.13162E0	-9.14171E0	5.57899E-3	9.33409E-2	2.7337E1	-3.26419E1	-3.26372E1	2.68041E1	1.69654E-7	2.5188E-3	2.5188E-3	6.35692E-3	1.99977E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.16488E-1	-7.98035E-1	-9.13146E0	-9.14149E0	5.55515E-3	9.31025E-2	2.72751E1	-3.26897E1	-3.26401E1	2.68001E1	1.69725E-7	2.51203E-3	2.51203E-3	6.36144E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16512E-1	-7.98321E-1	-9.13177E0	-9.1419E0	5.45979E-3	9.34601E-2	2.73045E1	-3.26602E1	-3.26463E1	2.68163E1	1.69656E-7	2.51581E-3	2.51581E-3	6.38041E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16417E-1	-7.98106E-1	-9.1316E0	-9.14176E0	5.57899E-3	9.34601E-2	2.73135E1	-3.26921E1	-3.26344E1	2.67938E1	1.69652E-7	2.51498E-3	2.51498E-3	6.39252E-3	1.98229E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1656E-1	-7.98225E-1	-9.13143E0	-9.1418E0	5.50747E-3	9.33886E-2	2.7299E1	-3.26364E1	-3.26236E1	2.67998E1	1.69728E-7	2.51552E-3	2.51552E-3	6.38459E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16607E-1	-7.98249E-1	-9.13141E0	-9.1419E0	5.65052E-3	9.33886E-2	2.73532E1	-3.26627E1	-3.26242E1	2.67908E1	1.69731E-7	2.5225E-3	2.5225E-3	6.35223E-3	1.99577E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16536E-1	-7.98106E-1	-9.13141E0	-9.14192E0	5.45979E-3	9.36985E-2	2.73281E1	-3.26331E1	-3.26472E1	2.67788E1	1.69802E-7	2.5199E-3	2.5199E-3	6.38459E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16345E-1	-7.98297E-1	-9.13138E0	-9.14176E0	5.53131E-3	9.3317E-2	2.72522E1	-3.26963E1	-3.26104E1	2.6831E1	1.69798E-7	2.51739E-3	2.51739E-3	6.37774E-3	1.97478E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.1656E-1	-7.98202E-1	-9.13117E0	-9.14159E0	5.48363E-3	9.34601E-2	2.72919E1	-3.26362E1	-3.2608E1	2.67752E1	1.69728E-7	2.51662E-3	2.51662E-3	6.38459E-3	1.97559E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16393E-1	-7.98202E-1	-9.13117E0	-9.14161E0	5.4121E-3	9.34839E-2	2.73159E1	-3.26573E1	-3.26266E1	2.68275E1	1.69653E-7	2.51632E-3	2.51632E-3	6.37774E-3	1.98491E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16298E-1	-7.98225E-1	-9.13138E0	-9.14176E0	5.45979E-3	9.3317E-2	2.72889E1	-3.26422E1	-3.26302E1	2.67758E1	1.69656E-7	2.52697E-3	2.52697E-3	6.38606E-3	1.99754E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16512E-1	-7.98106E-1	-9.1316E0	-9.14173E0	5.29289E-3	9.31501E-2	2.73177E1	-3.26681E1	-3.2632E1	2.67938E1	1.69654E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.00151E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16607E-1	-7.98035E-1	-9.13148E0	-9.14218E0	5.43594E-3	9.34362E-2	2.72998E1	-3.26431E1	-3.26762E1	2.67908E1	1.69875E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99803E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16417E-1	-7.98416E-1	-9.13119E0	-9.14235E0	5.45979E-3	9.31501E-2	2.73346E1	-3.26805E1	-3.26086E1	2.67908E1	1.69798E-7	2.52384E-3	2.52384E-3	6.25916E-3	2.00021E-1
1.8E1	9.1E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16345E-1	-7.9844E-1	-9.1311E0	-9.14199E0	5.91278E-3	9.30309E-2	2.734E1	-3.26578E1	-3.26441E1	2.6802E1	1.69581E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.99394E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16202E-1	-7.98702E-1	-9.13143E0	-9.14192E0	5.53131E-3	9.34362E-2	2.73243E1	-3.26518E1	-3.26104E1	2.67944E1	1.69581E-7	2.52066E-3	2.52066E-3	6.37607E-3	1.98984E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16083E-1	-7.98559E-1	-9.13141E0	-9.14192E0	5.62668E-3	9.30071E-2	2.72997E1	-3.26747E1	-3.26116E1	2.68004E1	1.69949E-7	2.52209E-3	2.52209E-3	6.28006E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16202E-1	-7.98202E-1	-9.13143E0	-9.14207E0	5.62668E-3	9.28879E-2	2.73165E1	-3.26771E1	-3.26428E1	2.67896E1	1.69654E-7	2.52318E-3	2.52318E-3	6.36244E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16178E-1	-7.98011E-1	-9.13126E0	-9.1419E0	5.79357E-3	9.31263E-2	2.72821E1	-3.27027E1	-3.26354E1	2.68292E1	1.69728E-7	2.52099E-3	2.52099E-3	6.27461E-3	1.98419E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16393E-1	-7.97963E-1	-9.13146E0	-9.14173E0	5.72205E-3	9.31978E-2	2.72763E1	-3.26813E1	-3.26284E1	2.67653E1	1.6987E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.99E-1