[Scan]
initial_time=2016-02-17T23:45:53
final_time=2016-02-17T23:46:12
ip_count=19
run=1032
dataset=11
scan=630
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36663E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.86672E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=3.15976E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=3.95095E-10
mult1=-9.87283E-9
mult2=-2.6747E-9
rf_tmon=-5.28148E-3
rf_agc=3.34117E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.61562E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.05118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.16313E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40323E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.5632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.7171E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.28049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15724E1
os_ea1_imon=2.18437E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.25138E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.26777E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.67901E-8
tplens_vset=1.4E-1
tplens_vmon=1.6373E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.47861E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.04238E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=2.02297E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84495E0
os_ea2_imon=-4.22766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.52654E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.32406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08867E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.80225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-2.01764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92691E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.8578E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.5409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22248E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.58572E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07083E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=1.00676E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62366E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65056E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6101E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.21151E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22372E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77022E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16059E-1	-7.98178E-1	-9.13124E0	-9.1419E0	5.55515E-3	9.36508E-2	2.73157E1	-3.26697E1	-3.26101E1	2.6792E1	1.69653E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9883E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16035E-1	-7.98368E-1	-9.13174E0	-9.14187E0	5.79357E-3	9.34362E-2	2.73192E1	-3.2656E1	-3.26425E1	2.6792E1	1.69802E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.98419E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16059E-1	-7.98273E-1	-9.13169E0	-9.14185E0	5.67436E-3	9.35555E-2	2.72927E1	-3.26579E1	-3.2659E1	2.67884E1	1.69956E-7	2.5147E-3	2.5147E-3	6.30182E-3	1.98344E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16154E-1	-7.98225E-1	-9.13143E0	-9.14166E0	6.00815E-3	9.35555E-2	2.73111E1	-3.26482E1	-3.26627E1	2.68005E1	1.69798E-7	2.52061E-3	2.52061E-3	6.34518E-3	1.97984E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16011E-1	-7.98297E-1	-9.13141E0	-9.14199E0	5.81741E-3	9.35555E-2	2.73088E1	-3.26634E1	-3.26101E1	2.68002E1	1.69798E-7	2.52815E-3	2.52815E-3	6.32896E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.15892E-1	-7.98512E-1	-9.13153E0	-9.14211E0	5.76973E-3	9.33647E-2	2.73351E1	-3.26891E1	-3.26386E1	2.67824E1	1.69581E-7	2.52139E-3	2.52139E-3	6.35223E-3	1.99224E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16035E-1	-7.98059E-1	-9.13148E0	-9.14214E0	5.72205E-3	9.34601E-2	2.73009E1	-3.26885E1	-3.26308E1	2.67962E1	1.69881E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.00285E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16488E-1	-7.9813E-1	-9.13162E0	-9.14166E0	5.38826E-3	9.32455E-2	2.72907E1	-3.26422E1	-3.26254E1	2.68208E1	1.69728E-7	2.51225E-3	2.51225E-3	6.28006E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16178E-1	-7.98178E-1	-9.13167E0	-9.14187E0	5.50747E-3	9.37462E-2	2.73326E1	-3.26768E1	-3.26021E1	2.67801E1	1.69654E-7	2.52977E-3	2.52977E-3	6.31837E-3	2.00499E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16226E-1	-7.98321E-1	-9.13184E0	-9.1418E0	5.53131E-3	9.35793E-2	2.73045E1	-3.26681E1	-3.26232E1	2.68048E1	1.70023E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00673E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16464E-1	-7.98082E-1	-9.13172E0	-9.1419E0	5.76973E-3	9.33647E-2	2.72808E1	-3.2651E1	-3.26273E1	2.67901E1	1.69723E-7	2.51393E-3	2.51393E-3	6.31269E-3	1.98894E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16488E-1	-7.98368E-1	-9.13165E0	-9.14187E0	5.57899E-3	9.35555E-2	2.73193E1	-3.26703E1	-3.26242E1	2.68022E1	1.69956E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.96945E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16369E-1	-7.98559E-1	-9.1316E0	-9.14192E0	5.50747E-3	9.36508E-2	2.73161E1	-3.26725E1	-3.26389E1	2.68172E1	1.69581E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98075E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16154E-1	-7.98178E-1	-9.13141E0	-9.1419E0	5.60284E-3	9.33409E-2	2.73187E1	-3.26773E1	-3.26508E1	2.68016E1	1.69581E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.97994E-1
1.8E1	8.1E1	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16131E-1	-7.98202E-1	-9.13162E0	-9.14216E0	5.88894E-3	9.33647E-2	2.72979E1	-3.265E1	-3.26777E1	2.67914E1	1.69653E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16321E-1	-7.9813E-1	-9.13141E0	-9.14173E0	5.72205E-3	9.32932E-2	2.73165E1	-3.26536E1	-3.26272E1	2.68118E1	1.70023E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99977E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.16417E-1	-7.98345E-1	-9.13146E0	-9.14207E0	5.67436E-3	9.32932E-2	2.73075E1	-3.26536E1	-3.26645E1	2.68094E1	1.69949E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16417E-1	-7.98297E-1	-9.13153E0	-9.1418E0	5.67436E-3	9.34124E-2	2.73139E1	-3.26962E1	-3.26236E1	2.68053E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.15892E-1	-7.9844E-1	-9.1316E0	-9.14185E0	5.26905E-3	9.32932E-2	2.73141E1	-3.26885E1	-3.26206E1	2.67938E1	1.6987E-7	2.51954E-3	2.51954E-3	6.32087E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.16321E-1	-7.98535E-1	-9.13181E0	-9.14178E0	5.29289E-3	9.31978E-2	2.73147E1	-3.26807E1	-3.26476E1	2.68076E1