[Scan]
initial_time=2016-02-17T23:46:46
final_time=2016-02-17T23:47:06
ip_count=19
run=1032
dataset=11
scan=632
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.3628E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.91927E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=2.88737E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=4.13954E-10
mult1=-1.00414E-8
mult2=-2.76652E-9
rf_tmon=-4.0558E-3
rf_agc=3.28589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.61816E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52897E1
cs_ef1b_imon=3.04368E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02376E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=2.17906E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.56095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.9992E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.54444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84093E1
cs_ef1a_imon=3.00615E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.71789E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11639E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=2.18118E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63826E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=1.25952E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02452E1
cs_anode1_imon=3.25533E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.68803E-8
tplens_vset=1.4E-1
tplens_vmon=1.58421E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.59435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.08669E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=2.012E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.2102E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74252E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.80366E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71067E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10437E0
os_ef2alow_imon=-2.33827E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22137E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10394E1
os_restr2_imon=3.53717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.31075E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.07724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.09094E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08503E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.80791E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-2.11932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55756E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=1.78879E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82572E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.8624E1
mask2_imon=-9.55115E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.42953E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.4595E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.60121E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06935E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63266E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=1.0074E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61323E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65367E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.52146E-2
os_fil2_imon=-2.54176E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69805E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.34692E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.91245E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22526E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12493E-1
res40_imon=-2.4599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16059E-1	-7.98011E-1	-9.13148E0	-9.14185E0	5.62668E-3	9.34362E-2	2.73267E1	-3.26585E1	-3.26579E1	2.68064E1	1.6987E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9917E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09696E0	-8.15868E-1	-7.98082E-1	-9.13146E0	-9.14199E0	5.55515E-3	9.32217E-2	2.73584E1	-3.2648E1	-3.26266E1	2.67962E1	1.69653E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.15916E-1	-7.98202E-1	-9.13146E0	-9.14145E0	5.57899E-3	9.3174E-2	2.7337E1	-3.2621E1	-3.26137E1	2.67718E1	1.69806E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16154E-1	-7.98154E-1	-9.13138E0	-9.14147E0	5.67436E-3	9.30071E-2	2.73176E1	-3.26778E1	-3.26129E1	2.67885E1	1.69718E-7	2.5216E-3	2.5216E-3	6.32784E-3	2.00469E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.15988E-1	-7.97963E-1	-9.13153E0	-9.14156E0	5.48363E-3	9.3174E-2	2.73123E1	-3.26597E1	-3.26392E1	2.67699E1	1.69581E-7	2.51498E-3	2.51498E-3	6.31879E-3	2.00425E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.15964E-1	-7.98154E-1	-9.13146E0	-9.14152E0	5.88894E-3	9.34124E-2	2.73281E1	-3.26803E1	-3.26284E1	2.67962E1	1.69581E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09688E0	-8.16417E-1	-7.98368E-1	-9.13134E0	-9.14168E0	5.4121E-3	9.3627E-2	2.73056E1	-3.2655E1	-3.26226E1	2.67831E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09734E0	-8.16178E-1	-7.98416E-1	-9.1316E0	-9.14185E0	5.76973E-3	9.36985E-2	2.72949E1	-3.26482E1	-3.26236E1	2.68376E1	1.69762E-7	2.52169E-3	2.52169E-3	6.31638E-3	1.98859E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16226E-1	-7.98273E-1	-9.13143E0	-9.1419E0	5.53131E-3	9.35316E-2	2.73157E1	-3.26638E1	-3.26319E1	2.68076E1	1.69581E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16274E-1	-7.98297E-1	-9.13148E0	-9.14161E0	5.84126E-3	9.32217E-2	2.73099E1	-3.26639E1	-3.26609E1	2.68046E1	1.69802E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16178E-1	-7.98631E-1	-9.13157E0	-9.14164E0	5.76973E-3	9.30786E-2	2.72817E1	-3.26458E1	-3.26386E1	2.6785E1	1.69875E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16274E-1	-7.98297E-1	-9.13126E0	-9.1418E0	5.43594E-3	9.30548E-2	2.72951E1	-3.27039E1	-3.26213E1	2.68016E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.99E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16369E-1	-7.98082E-1	-9.13131E0	-9.14176E0	5.45979E-3	9.35316E-2	2.73532E1	-3.26735E1	-3.26506E1	2.67848E1	1.69654E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99456E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16321E-1	-7.98225E-1	-9.13153E0	-9.14154E0	5.50747E-3	9.34362E-2	2.72979E1	-3.2644E1	-3.26158E1	2.68064E1	1.69581E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.8E1	8.6E1	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16536E-1	-7.98273E-1	-9.1315E0	-9.14173E0	5.6982E-3	9.34124E-2	2.73153E1	-3.26543E1	-3.26464E1	2.68118E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99977E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16441E-1	-7.9813E-1	-9.13122E0	-9.14185E0	5.84126E-3	9.34124E-2	2.72925E1	-3.26879E1	-3.26038E1	2.68094E1	1.69875E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16369E-1	-7.98249E-1	-9.13138E0	-9.14197E0	6.07967E-3	9.33886E-2	2.72973E1	-3.26795E1	-3.2605E1	2.68052E1	1.69798E-7	2.51632E-3	2.51632E-3	6.34518E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16178E-1	-7.98368E-1	-9.13162E0	-9.14164E0	5.55515E-3	9.36031E-2	2.73334E1	-3.26685E1	-3.2626E1	2.67671E1	1.69581E-7	2.52585E-3	2.52585E-3	6.32978E-3	2.00108E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16298E-1	-7.9844E-1	-9.13155E0	-9.14168E0	5.74589E-3	9.31263E-2	2.72626E1	-3.26549E1	-3.26107E1	2.68016E1	1.69581E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.00735E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.1594E-1	-7.98249E-1	-9.13146E0	-9.14178E0	5.57899E-3	9.3174E-2	2.73117E1	-3.26765E1	-3.26482E1	2.6816E1	1.69875E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99456E-1