[Scan]
initial_time=2016-02-17T23:47:14
final_time=2016-02-17T23:47:33
ip_count=19
run=1032
dataset=11
scan=633
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36132E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.92841E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.06201E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=3.97623E-10
mult1=-9.116E-9
mult2=-2.70464E-9
rf_tmon=-5.14973E-3
rf_agc=3.23759E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.59416E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61892E0
bslens_imon=2.49531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20111E1
lens5a_imon=1.98978E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04961E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53867E1
cs_ef1b_imon=3.06074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02338E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05264E1
cs_ea1_imon=2.18813E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38174E0
lens1_imon=2.7414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.96867E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04302E1
cs_ea2_imon=1.57511E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.03043E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.71841E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.27483E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15391E1
os_ea1_imon=2.18445E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63598E1
os_ef1bup_imon=3.09143E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25332E0
cs_ionrep_imon=1.27025E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93394E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=3.25011E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.67683E-8
tplens_vset=1.4E-1
tplens_vmon=1.57471E0
tplens_imon=-5.006E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26121E1
iondef3_imon=1.50532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26805E1
iondef2_imon=1.56592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98518E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.08669E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28699E0
ionrepsh_imon=1.99493E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33633E1
lens5b_imon=2.18813E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74851E1
cs_ef2b_imon=3.12624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85997E0
os_ea2_imon=-6.04679E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00737E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70883E1
cs_ef2a_imon=3.17451E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12504E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.6687E-1
os_ef2bup_imon=-5.53844E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10924E1
os_restr2_imon=3.51509E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.31728E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01578E1
cs_anode2_imon=2.30025E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10239E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67862E1
iondef4_imon=1.09514E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.08541E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=9.77967E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09895E0
cs_ionaccel_imon=-2.06158E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47084E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56193E1
einzel_imon=7.68035E-6
window_vset=0.0E0
window_vmon=1.61458E-1
window_imon=-1.2195E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82579E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-8.1156E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=7.97538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.65311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.19671E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52306E0
defgridb_imon=6.2748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.55226E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6353E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=1.00642E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61985E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.51668E-2
os_fil2_imon=-2.50032E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82859E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.2326E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36912E-1
cs_fil2_imon=-2.12607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.81463E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22555E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.98247E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.07216E-1
res40_imon=-2.44332E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E1	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16536E-1	-7.98154E-1	-9.13134E0	-9.14156E0	6.05583E-3	9.35316E-2	2.72933E1	-3.26496E1	-3.26549E1	2.68146E1	1.69802E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.00325E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16512E-1	-7.97915E-1	-9.1311E0	-9.14149E0	6.17504E-3	9.38177E-2	2.7299E1	-3.26634E1	-3.26474E1	2.67996E1	1.69654E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.00499E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16441E-1	-7.97868E-1	-9.13141E0	-9.14161E0	5.65052E-3	9.33409E-2	2.73039E1	-3.26644E1	-3.2616E1	2.67952E1	1.69654E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.00499E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16488E-1	-7.97439E-1	-9.13107E0	-9.14202E0	5.6982E-3	9.34362E-2	2.73181E1	-3.27009E1	-3.26555E1	2.68522E1	1.69654E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.9963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16393E-1	-7.97987E-1	-9.13126E0	-9.14168E0	5.6982E-3	9.33409E-2	2.73195E1	-3.26861E1	-3.26494E1	2.6797E1	1.69652E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.00231E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16178E-1	-7.98178E-1	-9.13126E0	-9.1419E0	5.76973E-3	9.31978E-2	2.72931E1	-3.26446E1	-3.265E1	2.68112E1	1.69656E-7	2.52139E-3	2.52139E-3	6.30182E-3	1.99931E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16393E-1	-7.98225E-1	-9.13155E0	-9.14168E0	5.60284E-3	9.30309E-2	2.72903E1	-3.26803E1	-3.26372E1	2.67845E1	1.69725E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.00705E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16369E-1	-7.9813E-1	-9.13165E0	-9.14195E0	5.43594E-3	9.35555E-2	2.731E1	-3.26438E1	-3.26315E1	2.68064E1	1.69654E-7	2.53087E-3	2.53087E-3	6.32936E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16441E-1	-7.98368E-1	-9.13148E0	-9.14178E0	5.65052E-3	9.37939E-2	2.72715E1	-3.26356E1	-3.26326E1	2.68131E1	1.69654E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16298E-1	-7.97915E-1	-9.13153E0	-9.14211E0	5.60284E-3	9.33647E-2	2.72881E1	-3.26515E1	-3.262E1	2.67723E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16298E-1	-7.98106E-1	-9.13143E0	-9.1418E0	5.55515E-3	9.33886E-2	2.73322E1	-3.27375E1	-3.26337E1	2.6804E1	1.69642E-7	2.5202E-3	2.5202E-3	6.32564E-3	1.99235E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16679E-1	-7.9813E-1	-9.13153E0	-9.14197E0	5.96046E-3	9.34601E-2	2.73087E1	-3.26705E1	-3.26464E1	2.67854E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16655E-1	-7.98011E-1	-9.13155E0	-9.1418E0	5.19753E-3	9.34601E-2	2.72871E1	-3.26567E1	-3.26368E1	2.67806E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98419E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16274E-1	-7.98249E-1	-9.13169E0	-9.14204E0	5.65052E-3	9.32217E-2	2.73231E1	-3.26633E1	-3.26362E1	2.67854E1	1.69653E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.99E-1
1.8E1	9.6E1	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16393E-1	-7.98249E-1	-9.13119E0	-9.14185E0	5.57899E-3	9.34839E-2	2.73137E1	-3.2694E1	-3.26144E1	2.67974E1	1.69656E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.99577E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16464E-1	-7.98225E-1	-9.13117E0	-9.14161E0	5.55515E-3	9.33647E-2	2.73122E1	-3.26644E1	-3.26638E1	2.68196E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00151E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16298E-1	-7.98297E-1	-9.13117E0	-9.14168E0	5.29289E-3	9.30786E-2	2.72684E1	-3.26657E1	-3.2611E1	2.67914E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16441E-1	-7.97915E-1	-9.13117E0	-9.14161E0	5.65052E-3	9.32932E-2	2.73269E1	-3.26608E1	-3.26585E1	2.68012E1	1.69581E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16345E-1	-7.97725E-1	-9.13134E0	-9.14204E0	5.43594E-3	9.32932E-2	2.73139E1	-3.26703E1	-3.26467E1	2.67938E1	1.69652E-7	2.51393E-3	2.51393E-3	6.32858E-3	1.99061E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16369E-1	-7.97963E-1	-9.13167E0	-9.14211E0	5.43594E-3	9.3174E-2	2.73063E1	-3.26805E1	-3.26121E1	2.67862E1	1.69728E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.98247E-1