[Scan]
initial_time=2016-02-17T23:48:34
final_time=2016-02-17T23:48:54
ip_count=19
run=1032
dataset=11
scan=636
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.35648E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.91606E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.04496E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.08924E-10
mult1=-8.63265E-9
mult2=-2.81442E-9
rf_tmon=-3.76139E-3
rf_agc=3.47215E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.58485E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.69545E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.95607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.05478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.19109E-5
lens1_vset=-5.0E0
lens1_vmon=-5.405E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64338E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03448E1
cs_ea2_imon=1.55824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.99063E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.71883E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10853E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=2.19144E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.27863E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.27282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.68539E-8
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-1.32535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.06103E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=2.00775E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75E1
cs_ef2b_imon=3.15065E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85144E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.0092E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.88124E-1
os_ef2bup_imon=-5.55313E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10445E1
os_restr2_imon=3.54456E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.27776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.07296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09004E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=9.80521E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07308E0
cs_ionaccel_imon=-2.20505E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=1.18234E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.85833E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.38871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.62585E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21952E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.59329E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63735E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=1.00724E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61423E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65055E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.17101E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.9663E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.4935E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37979E-1
res40_imon=-2.83935E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16059E-1	-7.98106E-1	-9.13136E0	-9.14192E0	5.34058E-3	9.30071E-2	2.72974E1	-3.26732E1	-3.26266E1	2.67902E1	1.69728E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99977E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.15964E-1	-7.97963E-1	-9.13112E0	-9.14216E0	5.34058E-3	9.34839E-2	2.73357E1	-3.26774E1	-3.2667E1	2.67652E1	1.69652E-7	2.52342E-3	2.52342E-3	6.31798E-3	1.99394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16131E-1	-7.98225E-1	-9.13134E0	-9.14228E0	5.31673E-3	9.32693E-2	2.73105E1	-3.26705E1	-3.26218E1	2.6834E1	1.69734E-7	2.52293E-3	2.52293E-3	6.29603E-3	2.00968E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16321E-1	-7.97915E-1	-9.13181E0	-9.14221E0	5.48363E-3	9.35078E-2	2.72931E1	-3.26392E1	-3.26314E1	2.67986E1	1.69798E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00705E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16107E-1	-7.98249E-1	-9.13179E0	-9.14209E0	5.34058E-3	9.32455E-2	2.72925E1	-3.26663E1	-3.26248E1	2.68166E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16369E-1	-7.98106E-1	-9.13169E0	-9.14209E0	5.24521E-3	9.32217E-2	2.72998E1	-3.26419E1	-3.26443E1	2.67862E1	1.69875E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16274E-1	-7.97749E-1	-9.13165E0	-9.14221E0	5.29289E-3	9.32455E-2	2.72829E1	-3.26657E1	-3.26098E1	2.68082E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16369E-1	-7.97987E-1	-9.13162E0	-9.14226E0	5.17368E-3	9.3174E-2	2.72618E1	-3.26446E1	-3.26476E1	2.67974E1	1.69654E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16584E-1	-7.97939E-1	-9.13162E0	-9.14233E0	5.45979E-3	9.29594E-2	2.72945E1	-3.26437E1	-3.26425E1	2.68058E1	1.69798E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16178E-1	-7.98297E-1	-9.13167E0	-9.14199E0	5.45979E-3	9.30071E-2	2.73069E1	-3.26663E1	-3.26308E1	2.67782E1	1.69802E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16321E-1	-7.98464E-1	-9.13191E0	-9.14204E0	5.55515E-3	9.2864E-2	2.73604E1	-3.26777E1	-3.26278E1	2.6822E1	1.69617E-7	2.52189E-3	2.52189E-3	6.31012E-3	1.99827E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16154E-1	-7.98059E-1	-9.13165E0	-9.14168E0	5.53131E-3	9.3174E-2	2.73129E1	-3.26729E1	-3.26074E1	2.68178E1					
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16393E-1	-7.97796E-1	-9.13165E0	-9.14197E0	5.34058E-3	9.33409E-2	2.73285E1	-3.26789E1	-3.26699E1	2.67998E1	1.69731E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.99401E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16512E-1	-7.9782E-1	-9.13141E0	-9.14192E0	5.55515E-3	9.3174E-2	2.73027E1	-3.26296E1	-3.2636E1	2.6792E1	1.69798E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9917E-1
1.8E1	9.7E1	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16131E-1	-7.97868E-1	-9.13177E0	-9.14176E0	5.14984E-3	9.30071E-2	2.73151E1	-3.26626E1	-3.26266E1	2.68172E1	1.69725E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.98661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16178E-1	-7.97749E-1	-9.1316E0	-9.14159E0	5.60284E-3	9.31263E-2	2.73118E1	-3.26731E1	-3.26707E1	2.68142E1	1.69798E-7	2.51954E-3	2.51954E-3	6.35059E-3	1.9968E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16178E-1	-7.97939E-1	-9.13146E0	-9.14216E0	5.4121E-3	9.30309E-2	2.73193E1	-3.26744E1	-3.26437E1	2.6789E1	1.69656E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16369E-1	-7.97725E-1	-9.13129E0	-9.14156E0	5.45979E-3	9.33886E-2	2.73057E1	-3.26434E1	-3.26388E1	2.67989E1	1.69725E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99595E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16345E-1	-7.97701E-1	-9.13138E0	-9.1418E0	5.53131E-3	9.35555E-2	2.73147E1	-3.26579E1	-3.26458E1	2.68142E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16131E-1	-7.97939E-1	-9.13134E0	-9.14183E0	5.36442E-3	9.3317E-2	2.73189E1	-3.26476E1	-3.2602E1	2.6789E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00534E-1