[Scan]
initial_time=2016-02-17T23:49:28
final_time=2016-02-17T23:49:48
ip_count=19
run=1032
dataset=11
scan=638
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.36207E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.89732E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=2.94924E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=3.99172E-10
mult1=-9.43847E-9
mult2=-2.83582E-9
rf_tmon=-6.0214E-3
rf_agc=3.20245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.59938E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67801E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52799E1
cs_ef1b_imon=3.04505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05206E1
cs_ea1_imon=2.1557E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3466E0
lens1_imon=2.89366E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0428E1
cs_ea2_imon=1.56709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=3.02162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.72168E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15394E1
os_ea1_imon=2.20419E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.25244E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=3.26489E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.68855E-8
tplens_vset=1.4E-1
tplens_vmon=1.60663E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26395E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26321E1
iondef2_imon=1.56957E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.04079E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=2.00315E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.19711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.89804E0
os_ea2_imon=-8.65193E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10682E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.76711E-1
os_ef2bup_imon=-5.47745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.53843E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73271E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.08943E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.82322E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10311E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.56568E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.42764E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16637E0
defgridb_imon=6.33043E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.58512E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63758E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=1.00488E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65236E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72407E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.17987E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72817E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16321E-1	-7.97939E-1	-9.13169E0	-9.14185E0	5.6982E-3	9.31978E-2	2.72544E1	-3.26402E1	-3.2626E1	2.68314E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00534E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16298E-1	-7.97987E-1	-9.13141E0	-9.14211E0	5.53131E-3	9.29594E-2	2.72965E1	-3.26738E1	-3.26064E1	2.67889E1	1.69943E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1656E-1	-7.97939E-1	-9.13141E0	-9.14211E0	5.88894E-3	9.37223E-2	2.73086E1	-3.26703E1	-3.26384E1	2.67989E1	1.69881E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16774E-1	-7.97868E-1	-9.13155E0	-9.1418E0	5.79357E-3	9.38177E-2	2.7308E1	-3.26679E1	-3.26331E1	2.6774E1	1.69798E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.1625E-1	-7.98178E-1	-9.1316E0	-9.14156E0	5.36442E-3	9.3174E-2	2.73455E1	-3.26964E1	-3.26358E1	2.6792E1	1.69725E-7	2.52707E-3	2.52707E-3	6.33977E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16369E-1	-7.98202E-1	-9.13129E0	-9.14173E0	5.48363E-3	9.32455E-2	2.73434E1	-3.26826E1	-3.26561E1	2.68076E1	1.69881E-7	2.51915E-3	2.51915E-3	6.34661E-3	1.99401E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16321E-1	-7.98297E-1	-9.13138E0	-9.14173E0	5.19753E-3	9.31501E-2	2.72901E1	-3.26585E1	-3.26074E1	2.67561E1	1.69798E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16321E-1	-7.98368E-1	-9.1316E0	-9.14207E0	5.84126E-3	9.32455E-2	2.73231E1	-3.26657E1	-3.26248E1	2.68331E1	1.69728E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16202E-1	-7.98392E-1	-9.13126E0	-9.14216E0	5.96046E-3	9.32217E-2	2.73508E1	-3.27149E1	-3.26506E1	2.6801E1	1.69949E-7	2.51225E-3	2.51225E-3	6.28552E-3	1.97216E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16059E-1	-7.98559E-1	-9.13143E0	-9.14211E0	6.07967E-3	9.3317E-2	2.73051E1	-3.26789E1	-3.26494E1	2.68106E1	1.69875E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.1625E-1	-7.97868E-1	-9.13141E0	-9.14168E0	5.93662E-3	9.33886E-2	2.72727E1	-3.26627E1	-3.26482E1	2.67571E1	1.69728E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16369E-1	-7.97987E-1	-9.13136E0	-9.14154E0	6.00815E-3	9.3317E-2	2.73153E1	-3.26639E1	-3.2623E1	2.68268E1	1.69731E-7	2.52139E-3	2.52139E-3	6.32978E-3	1.98344E-1
1.6E1	5.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1625E-1	-7.98035E-1	-9.13134E0	-9.14185E0	5.67436E-3	9.34839E-2	2.73357E1	-3.26578E1	-3.26058E1	2.6798E1	1.69943E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00876E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16369E-1	-7.97963E-1	-9.13148E0	-9.14199E0	5.48363E-3	9.3317E-2	2.73222E1	-3.2682E1	-3.2629E1	2.68106E1	1.69731E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.00463E-1
1.8E1	1.01E2	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16035E-1	-7.98154E-1	-9.13179E0	-9.14171E0	5.62668E-3	9.34124E-2	2.73118E1	-3.26517E1	-3.26144E1	2.68034E1	1.69653E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00021E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16202E-1	-7.9813E-1	-9.13148E0	-9.14159E0	6.00815E-3	9.34601E-2	2.72805E1	-3.26615E1	-3.26314E1	2.68112E1	1.69806E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.00818E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09696E0	-8.15988E-1	-7.98202E-1	-9.13143E0	-9.14185E0	5.55515E-3	9.32932E-2	2.73428E1	-3.26307E1	-3.26296E1	2.67559E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99456E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.15964E-1	-7.98225E-1	-9.132E0	-9.14195E0	5.53131E-3	9.35316E-2	2.73027E1	-3.26685E1	-3.26602E1	2.68094E1	1.69802E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16083E-1	-7.98011E-1	-9.13136E0	-9.14214E0	5.6982E-3	9.34839E-2	2.72992E1	-3.26537E1	-3.26632E1	2.68304E1	1.69794E-7	2.52236E-3	2.52236E-3	6.32328E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15988E-1	-7.97987E-1	-9.13136E0	-9.14209E0	5.60284E-3	9.33409E-2	2.73271E1	-3.26321E1	-3.26395E1	2.67944E1	1.69725E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.99E-1