[Scan]
initial_time=2016-02-17T23:49:55
final_time=2016-02-17T23:50:15
ip_count=19
run=1032
dataset=11
scan=639
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.35945E-8
ql2_vset=
ql2_vmon=-7.9751E-1
ql2_imon=1.86888E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=2.7231E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=3.86608E-10
mult1=-9.523E-9
mult2=-2.69778E-9
rf_tmon=-4.9578E-3
rf_agc=3.2613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.57741E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66397E0
bslens_imon=2.60071E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20042E1
lens5a_imon=2.00269E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05124E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55468E1
cs_ef1b_imon=3.08261E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04901E1
cs_ea1_imon=2.16399E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39979E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03963E1
cs_ea2_imon=1.56817E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=3.01623E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.72132E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=4.28365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15421E1
os_ea1_imon=2.17685E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25094E0
cs_ionrep_imon=1.27512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=3.27826E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.68841E-8
tplens_vset=1.4E-1
tplens_vmon=1.65476E0
tplens_imon=-1.69825E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2603E1
iondef3_imon=1.5129E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.58242E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98471E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.08456E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26774E0
ionrepsh_imon=1.99887E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.17824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.10798E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8529E0
os_ea2_imon=-6.70399E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00508E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.19555E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11248E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62681E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.53752E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.3257E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.26975E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73128E1
iondef1_imon=1.10027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08508E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=9.85671E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-2.03244E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.72259E-6
window_vset=0.0E0
window_vmon=1.45864E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86107E1
mask2_imon=-6.18015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.05721E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.48363E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.31444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47031E0
defgridb_imon=6.1673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.58632E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06767E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=1.00653E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62656E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65525E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73515E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.69943E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01488E-1
res40_imon=-2.67189E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	1.0E0	1.47E2	4.1E1	-2.09518E0	-8.15749E-1	-7.9813E-1	-9.13115E0	-9.1419E0	5.67436E-3	9.34362E-2	2.73249E1	-3.26909E1	-3.26218E1	2.67577E1	1.69936E-7	2.51814E-3	2.51814E-3	6.32328E-3	1.99562E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16131E-1	-7.97868E-1	-9.13157E0	-9.14214E0	5.65052E-3	9.36508E-2	2.73198E1	-3.26664E1	-3.26217E1	2.67986E1	1.69953E-7	2.52229E-3	2.52229E-3	6.31017E-3	1.99254E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16298E-1	-7.9813E-1	-9.13157E0	-9.14223E0	5.60284E-3	9.32455E-2	2.73109E1	-3.26637E1	-3.26196E1	2.67764E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16178E-1	-7.97963E-1	-9.13143E0	-9.14214E0	5.48363E-3	9.36508E-2	2.72763E1	-3.26494E1	-3.26242E1	2.67902E1	1.69723E-7	2.52236E-3	2.52236E-3	6.31798E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16441E-1	-7.9782E-1	-9.13148E0	-9.14207E0	5.81741E-3	9.3317E-2	2.73216E1	-3.26573E1	-3.26232E1	2.67489E1	1.69654E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16202E-1	-7.98082E-1	-9.1315E0	-9.14218E0	5.8651E-3	9.35078E-2	2.73051E1	-3.2689E1	-3.26387E1	2.68388E1	1.69581E-7	2.52197E-3	2.52197E-3	6.31779E-3	1.99776E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.15988E-1	-7.98035E-1	-9.13153E0	-9.1418E0	5.53131E-3	9.33647E-2	2.73063E1	-3.26514E1	-3.26089E1	2.68244E1	1.70049E-7	2.52106E-3	2.52106E-3	6.3074E-3	1.99466E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.15797E-1	-7.9782E-1	-9.13126E0	-9.1419E0	5.6982E-3	9.32455E-2	2.72925E1	-3.26494E1	-3.26128E1	2.68466E1	1.69653E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9985E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.15773E-1	-7.9782E-1	-9.13162E0	-9.14164E0	5.72205E-3	9.3317E-2	2.73122E1	-3.26809E1	-3.26602E1	2.68124E1	1.69654E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.15964E-1	-7.97987E-1	-9.13165E0	-9.14176E0	5.72205E-3	9.3317E-2	2.73284E1	-3.26927E1	-3.26095E1	2.68106E1	1.69949E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.15845E-1	-7.98011E-1	-9.13177E0	-9.14152E0	5.93662E-3	9.32217E-2	2.73387E1	-3.26903E1	-3.2616E1	2.68016E1	1.69949E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16035E-1	-7.97939E-1	-9.13165E0	-9.14147E0	5.8651E-3	9.32455E-2	2.73201E1	-3.26681E1	-3.26182E1	2.67932E1	1.69727E-7	2.51593E-3	2.51593E-3	6.30197E-3	1.98969E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16107E-1	-7.98059E-1	-9.13155E0	-9.1419E0	5.76973E-3	9.3317E-2	2.73622E1	-3.26891E1	-3.2644E1	2.68298E1					
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.16441E-1	-7.97963E-1	-9.1316E0	-9.1418E0	5.65052E-3	9.33409E-2	2.73255E1	-3.2653E1	-3.26422E1	2.68052E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9963E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16178E-1	-7.98154E-1	-9.13196E0	-9.14156E0	5.81741E-3	9.29594E-2	2.72853E1	-3.26645E1	-3.26104E1	2.68157E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98075E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16154E-1	-7.98035E-1	-9.13138E0	-9.14178E0	5.79357E-3	9.33409E-2	2.7269E1	-3.26921E1	-3.26404E1	2.67944E1	1.69654E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99456E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.15892E-1	-7.97629E-1	-9.13146E0	-9.14178E0	6.10352E-3	9.31263E-2	2.73261E1	-3.27083E1	-3.26482E1	2.68069E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16131E-1	-7.97796E-1	-9.13169E0	-9.14171E0	5.72205E-3	9.33647E-2	2.73117E1	-3.26693E1	-3.26494E1	2.68111E1	1.69654E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.16035E-1	-7.97629E-1	-9.13148E0	-9.14202E0	5.96046E-3	9.31978E-2	2.73092E1	-3.26921E1	-3.26449E1	2.68035E1	1.69728E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.9963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15988E-1	-7.9751E-1	-9.13167E0	-9.14202E0	5.67436E-3	9.3317E-2	2.73128E1	-3.2662E1	-3.2603E1	2.67926E1	1.69943E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9934E-1