[Scan]
initial_time=2016-02-17T23:50:22
final_time=2016-02-17T23:50:42
ip_count=19
run=1032
dataset=11
scan=640
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.36434E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.92566E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=2.48945E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.08459E-10
mult1=-9.92494E-9
mult2=-2.71542E-9
rf_tmon=-4.22632E-3
rf_agc=3.31675E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.60824E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55322E1
cs_ef1b_imon=3.08253E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.18118E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39144E0
lens1_imon=2.49725E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.56249E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.72282E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.1787E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.2758E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.26525E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.68936E-8
tplens_vset=1.4E-1
tplens_vmon=1.59129E0
tplens_imon=-2.49335E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98643E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.08506E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=2.00633E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87857E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.72507E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10445E1
os_restr2_imon=3.51969E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.27632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.08856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67649E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.0914E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=9.80853E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.86108E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93759E3
defgrida_imon=6.4897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.37809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.59118E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63908E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00666E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6248E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65688E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78738E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.14317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.23542E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.00847E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2116E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.15892E-1	-7.9782E-1	-9.13134E0	-9.14154E0	5.65052E-3	9.3174E-2	2.72831E1	-3.26544E1	-3.26399E1	2.68094E1	1.6987E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9985E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16035E-1	-7.97844E-1	-9.13126E0	-9.14152E0	6.17504E-3	9.33409E-2	2.72939E1	-3.26609E1	-3.26291E1	2.68176E1	1.69794E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99562E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16321E-1	-7.98154E-1	-9.13143E0	-9.14142E0	6.1512E-3	9.33647E-2	2.72912E1	-3.26446E1	-3.26214E1	2.6781E1	1.69734E-7	2.51952E-3	2.51952E-3	6.33021E-3	1.98984E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16274E-1	-7.97963E-1	-9.13107E0	-9.14173E0	6.00815E-3	9.31025E-2	2.72793E1	-3.26603E1	-3.26236E1	2.67962E1	1.69581E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.98727E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16059E-1	-7.97796E-1	-9.13136E0	-9.14168E0	5.76973E-3	9.33886E-2	2.73069E1	-3.26909E1	-3.26107E1	2.67938E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16131E-1	-7.98154E-1	-9.13098E0	-9.14202E0	5.8651E-3	9.32693E-2	2.72992E1	-3.26968E1	-3.26142E1	2.67734E1	1.69798E-7	2.51954E-3	2.51954E-3	6.35601E-3	1.9917E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16274E-1	-7.9813E-1	-9.13136E0	-9.14142E0	5.98431E-3	9.36031E-2	2.73492E1	-3.26658E1	-3.26113E1	2.67677E1	1.69798E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16345E-1	-7.98011E-1	-9.13155E0	-9.1418E0	5.8651E-3	9.3174E-2	2.72856E1	-3.26136E1	-3.2636E1	2.68186E1	1.69656E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99931E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09704E0	-8.16178E-1	-7.97939E-1	-9.13169E0	-9.14176E0	5.84126E-3	9.34601E-2	2.72985E1	-3.26543E1	-3.26681E1	2.68112E1	1.69581E-7	2.5131E-3	2.5131E-3	6.29128E-3	2.00534E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.16011E-1	-7.9782E-1	-9.13148E0	-9.14137E0	5.93662E-3	9.32455E-2	2.73448E1	-3.26765E1	-3.2617E1	2.67926E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.01372E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.15988E-1	-7.97868E-1	-9.13134E0	-9.14171E0	5.57899E-3	9.3317E-2	2.73291E1	-3.26885E1	-3.26074E1	2.68124E1	1.69802E-7	2.52867E-3	2.52867E-3	6.29645E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16417E-1	-7.97772E-1	-9.13115E0	-9.14145E0	6.29425E-3	9.3317E-2	2.73228E1	-3.26725E1	-3.26327E1	2.68022E1	1.69728E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.99456E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16154E-1	-7.97772E-1	-9.13129E0	-9.14178E0	5.50747E-3	9.32455E-2	2.73257E1	-3.26714E1	-3.26496E1	2.67571E1	1.69731E-7	2.52362E-3	2.52362E-3	6.32978E-3	1.99224E-1
1.7E1	9.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16107E-1	-7.97772E-1	-9.13153E0	-9.14197E0	5.72205E-3	9.3317E-2	2.72775E1	-3.27025E1	-3.25991E1	2.67988E1	1.69653E-7	2.52815E-3	2.52815E-3	6.30202E-3	1.9917E-1
1.8E1	1.01E2	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16131E-1	-7.97725E-1	-9.13136E0	-9.14187E0	5.62668E-3	9.30071E-2	2.73087E1	-3.26927E1	-3.26536E1	2.67842E1	1.69731E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99048E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16274E-1	-7.97725E-1	-9.13177E0	-9.14166E0	5.60284E-3	9.31978E-2	2.72949E1	-3.26699E1	-3.26164E1	2.68377E1	1.69802E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98592E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16131E-1	-7.98059E-1	-9.13177E0	-9.1418E0	5.72205E-3	9.29356E-2	2.72955E1	-3.26579E1	-3.26711E1	2.68119E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16154E-1	-7.97606E-1	-9.13181E0	-9.14197E0	5.72205E-3	9.29594E-2	2.73163E1	-3.26602E1	-3.26449E1	2.68204E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16059E-1	-7.97725E-1	-9.13157E0	-9.14192E0	5.65052E-3	9.31263E-2	2.73351E1	-3.26699E1	-3.26266E1	2.68094E1	1.6987E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16035E-1	-7.98059E-1	-9.13165E0	-9.14199E0	5.74589E-3	9.31978E-2	2.73122E1	-3.26726E1	-3.26496E1	2.67649E1	1.69802E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.00847E-1