[Scan]
initial_time=2016-02-17T23:50:49
final_time=2016-02-17T23:51:09
ip_count=19
run=1032
dataset=11
scan=641
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.36202E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.98398E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=2.74146E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=4.42982E-10
mult1=-9.33385E-9
mult2=-2.82125E-9
rf_tmon=-4.52127E-3
rf_agc=3.30849E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=1.54231E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.73242E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.96433E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55286E1
cs_ef1b_imon=3.08685E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.20261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37016E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.00396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.7227E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=2.19E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63407E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.26965E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.27282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.68921E-8
tplens_vset=1.4E-1
tplens_vmon=1.58135E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2682E1
iondef2_imon=1.58941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.08924E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=2.00506E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88116E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10655E1
os_restr2_imon=3.546E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.2875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.11752E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.08226E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.83291E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-2.08251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=1.62082E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.40083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33396E1
os_fil1_imon=9.59581E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07299E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63776E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00696E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.08329E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99224E-1
chamber_ion_pmon=1.69656E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99536E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.1E1	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15558E-1	-7.98249E-1	-9.13157E0	-9.14207E0	5.55515E-3	9.34362E-2	2.72968E1	-3.26679E1	-3.26178E1	2.67914E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99803E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.1594E-1	-7.98392E-1	-9.13143E0	-9.14211E0	5.62668E-3	9.34839E-2	2.73327E1	-3.26524E1	-3.2602E1	2.67788E1	1.69836E-7	2.52406E-3	2.52406E-3	6.31555E-3	1.99913E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.15606E-1	-7.97963E-1	-9.13141E0	-9.14199E0	5.79357E-3	9.32932E-2	2.73027E1	-3.26744E1	-3.26296E1	2.67974E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09696E0	-8.15892E-1	-7.97844E-1	-9.13143E0	-9.14211E0	5.72205E-3	9.3174E-2	2.73093E1	-3.26561E1	-3.26464E1	2.68388E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.15892E-1	-7.97796E-1	-9.13143E0	-9.14214E0	5.48363E-3	9.34124E-2	2.73207E1	-3.26799E1	-3.26405E1	2.67875E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16059E-1	-7.97939E-1	-9.13148E0	-9.14185E0	5.72205E-3	9.34839E-2	2.7302E1	-3.26541E1	-3.26123E1	2.67926E1	1.6979E-7	2.51679E-3	2.51679E-3	6.31779E-3	1.99776E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16154E-1	-7.97725E-1	-9.1316E0	-9.14202E0	5.76973E-3	9.34362E-2	2.73117E1	-3.26645E1	-3.26062E1	2.68358E1	1.69659E-7	2.5257E-3	2.5257E-3	6.31902E-3	2.00755E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16226E-1	-7.97629E-1	-9.13141E0	-9.14185E0	5.81741E-3	9.32932E-2	2.72974E1	-3.26484E1	-3.26337E1	2.67968E1	1.69802E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.1594E-1	-7.98011E-1	-9.13138E0	-9.14178E0	5.65052E-3	9.34362E-2	2.73087E1	-3.26903E1	-3.25761E1	2.68064E1	1.69725E-7	2.51739E-3	2.51739E-3	6.34518E-3	1.9951E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15964E-1	-7.98154E-1	-9.13134E0	-9.14195E0	5.74589E-3	9.36031E-2	2.72984E1	-3.26615E1	-3.26266E1	2.6795E1	1.69875E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16321E-1	-7.97606E-1	-9.13129E0	-9.14226E0	5.6982E-3	9.33886E-2	2.73045E1	-3.26703E1	-3.26343E1	2.68148E1	1.69731E-7	2.5225E-3	2.5225E-3	6.32978E-3	1.99401E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16083E-1	-7.97844E-1	-9.13169E0	-9.14211E0	5.79357E-3	9.35078E-2	2.73309E1	-3.26987E1	-3.26254E1	2.68136E1	1.69725E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9934E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16059E-1	-7.97701E-1	-9.13146E0	-9.14195E0	5.65052E-3	9.33886E-2	2.72997E1	-3.26512E1	-3.26284E1	2.67914E1	1.69875E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.16107E-1	-7.97725E-1	-9.13136E0	-9.14195E0	5.6982E-3	9.34362E-2	2.73273E1	-3.26801E1	-3.2629E1	2.68232E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9911E-1
1.8E1	1.11E2	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16107E-1	-7.97987E-1	-9.13153E0	-9.14199E0	5.96046E-3	9.33409E-2	2.73069E1	-3.26843E1	-3.2644E1	2.68316E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98764E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15916E-1	-7.97749E-1	-9.13131E0	-9.14216E0	5.8651E-3	9.33409E-2	2.73381E1	-3.26771E1	-3.2599E1	2.68136E1	1.69728E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.9963E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.15821E-1	-7.97844E-1	-9.13157E0	-9.14228E0	6.1512E-3	9.3174E-2	2.72973E1	-3.27444E1	-3.26164E1	2.68262E1	1.69949E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.1594E-1	-7.9782E-1	-9.13126E0	-9.14207E0	5.98431E-3	9.32693E-2	2.7298E1	-3.26555E1	-3.26484E1	2.67926E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16154E-1	-7.97462E-1	-9.13179E0	-9.14211E0	5.48363E-3	9.31501E-2	2.72961E1	-3.26909E1	-3.26056E1	2.68082E1	1.69652E-7	2.50972E-3	2.50972E-3	6.33388E-3	1.99061E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16178E-1	-7.97987E-1	-9.13169E0	-9.14178E0	5.96046E-3	9.31025E-2	2.73293E1	-3.2682E1	-3.26354E1	2.68172E1	1.69656E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99224E-1