[Scan]
initial_time=2016-02-17T23:51:53
final_time=2016-02-17T23:52:13
ip_count=19
run=1032
dataset=12
scan=643
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.80284E-6
ql1_vset=
ql1_vmon=-8.79978E1
ql1_imon=-3.21053E-9
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.43303E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-8.32735E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.61062E-8
mult1=-8.81326E-9
mult2=-2.58687E-9
rf_tmon=-6.40503E-3
rf_agc=3.22701E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=6.95348E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68309E0
bslens_imon=2.53814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19979E1
lens5a_imon=1.97419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53709E1
cs_ef1b_imon=3.05953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05133E1
cs_ea1_imon=2.1911E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01164E0
lens1_imon=1.46399E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64362E1
os_ef1alow_imon=2.9696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03963E1
cs_ea2_imon=1.56747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84612E1
cs_ef1a_imon=3.01826E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.72526E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10749E1
os_restr1_imon=4.28727E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=2.19423E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64105E1
os_ef1bup_imon=3.06825E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22139E0
cs_ionrep_imon=1.27929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01603E1
cs_anode1_imon=3.29306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.23451E-8
tplens_vset=1.4E-1
tplens_vmon=1.60319E0
tplens_imon=-3.54064E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.50942E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.59041E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=9.85038E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27933E0
ionrepsh_imon=2.03676E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33582E1
lens5b_imon=2.17094E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.09778E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86797E0
os_ea2_imon=-6.49541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71207E1
cs_ef2a_imon=3.19878E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07972E0
os_ef2alow_imon=-2.72737E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.97714E-1
os_ef2bup_imon=-5.29762E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11258E1
os_restr2_imon=3.53801E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01563E1
cs_anode2_imon=2.25456E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.10931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6777E1
iondef4_imon=1.07346E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10131E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83095E-1
olens1_imon=9.85701E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14804E0
cs_ionaccel_imon=-1.84154E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47119E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56836E1
einzel_imon=7.59724E-6
window_vset=0.0E0
window_vmon=1.81096E-1
window_imon=-8.68473E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.38873E-4
mask2_vset=0.0E0
mask2_vmon=-1.85807E1
mask2_imon=-4.55757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.21016E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.30982E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.38744E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48481E0
defgridb_imon=6.09082E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.5842E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06871E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=1.00648E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62562E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65542E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.52372E-2
os_fil2_imon=-2.68337E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.08407E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34474E-1
cs_fil2_imon=-2.19124E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25925E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22485E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68633E-1
res40_imon=-2.86159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4432E4	1.1E1	1.47E2	4.1E1	-7.31692E-2	-8.79975E1	9.53674E-5	-8.80013E1	4.05312E-4	5.43594E-3	9.31025E-2	2.73163E1	-3.26602E1	-3.26048E1	2.67806E1	1.6972E-7	2.51783E-3	2.51783E-3	6.323E-3	2.00105E-1
2.0E0	5.28E3	5.0E0	3.16E2	1.6E2	-7.286E-2	-8.79975E1	1.19209E-4	-8.80013E1	4.29153E-4	5.48363E-3	9.30309E-2	2.73437E1	-3.26585E1	-3.2634E1	2.68262E1	1.69728E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.9963E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79975E1	-2.14577E-4	-8.80012E1	3.57628E-4	5.65052E-3	9.35078E-2	2.7275E1	-3.26443E1	-3.26095E1	2.67806E1	1.69654E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.99803E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.79974E1	-9.53674E-5	-8.80014E1	3.8147E-4	5.74589E-3	9.32455E-2	2.73311E1	-3.26667E1	-3.26366E1	2.68226E1	1.69728E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.79974E1	2.14577E-4	-8.80015E1	5.72205E-4	5.84126E-3	9.32932E-2	2.73327E1	-3.26675E1	-3.26266E1	2.6792E1	1.69725E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.79977E1	2.14577E-4	-8.80017E1	2.86102E-4	5.6982E-3	9.32693E-2	2.72962E1	-3.26691E1	-3.26272E1	2.68105E1	1.69728E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79979E1	1.19209E-4	-8.80012E1	1.90735E-4	5.93662E-3	9.32217E-2	2.73145E1	-3.26608E1	-3.26189E1	2.68154E1	1.69943E-7	2.52492E-3	2.52492E-3	6.32896E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.79977E1	2.6226E-4	-8.8001E1	9.53674E-5	5.55515E-3	9.29356E-2	2.73267E1	-3.26615E1	-3.26134E1	2.68058E1	1.69581E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9934E-1
1.2E1	3.66E2	1.0E0	4.85E2	3.23E2	-7.39421E-2	-8.79976E1	2.38419E-5	-8.80011E1	0.0E0	5.60284E-3	9.33647E-2	2.73111E1	-3.26717E1	-3.25936E1	2.68208E1	1.69581E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00325E-1
1.3E1	2.3E1	1.0E0	5.25E2	3.53E2	-7.34782E-2	-8.79976E1	-1.43051E-4	-8.80011E1	-1.43051E-4	5.43594E-3	9.31263E-2	2.734E1	-3.26652E1	-3.26248E1	2.67601E1	1.69875E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.00499E-1
1.4E1	6.9E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79977E1	7.15256E-5	-8.80011E1	-1.19209E-4	5.38826E-3	9.32217E-2	2.73676E1	-3.26767E1	-3.25871E1	2.68094E1	1.69581E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99803E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.79977E1	2.6226E-4	-8.80013E1	3.09944E-4	5.55515E-3	9.29832E-2	2.73165E1	-3.26639E1	-3.26549E1	2.6816E1	1.69728E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.9963E-1
1.6E1	3.139E3	4.0E0	6.47E2	4.41E2	-7.30918E-2	-8.79977E1	2.38419E-4	-8.80011E1	2.14577E-4	5.34058E-3	9.3174E-2	2.73267E1	-3.26585E1	-3.26158E1	2.67887E1	1.69728E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.00325E-1
1.7E1	3.6479E4	2.0E1	6.87E2	4.7E2	-7.30918E-2	-8.79979E1	-1.43051E-4	-8.80012E1	9.53674E-5	5.72205E-3	9.34124E-2	2.73339E1	-3.26621E1	-3.26422E1	2.67669E1	1.69875E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
1.8E1	1.56403E5	9.3E1	7.27E2	5.0E2	-7.30146E-2	-8.79977E1	2.38419E-5	-8.80014E1	2.38419E-4	5.43594E-3	9.32693E-2	2.73139E1	-3.26968E1	-3.26526E1	2.6804E1	1.69725E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00021E-1
1.9E1	3.501E3	1.0E0	7.68E2	5.29E2	-7.37103E-2	-8.79978E1	1.43051E-4	-8.80011E1	3.09944E-4	5.6982E-3	9.33886E-2	2.73399E1	-3.26626E1	-3.2652E1	2.68346E1	1.6969E-7	2.52026E-3	2.52026E-3	6.32099E-3	2.00258E-1
2.0E1	3.51E2	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.79976E1	2.38419E-5	-8.80012E1	-4.76837E-5	5.55515E-3	9.33886E-2	2.72979E1	-3.26554E1	-3.26086E1	2.68221E1					
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.79979E1	-2.38419E-5	-8.80012E1	-4.76837E-5	5.31673E-3	9.34839E-2	2.73157E1	-3.27062E1	-3.26531E1	2.67938E1	1.70015E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00534E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79976E1	-1.90735E-4	-8.8001E1	2.6226E-4	5.34058E-3	9.37462E-2	2.73352E1	-3.26785E1	-3.26337E1	2.68214E1	1.69581E-7	2.51771E-3	2.51771E-3	6.28006E-3	1.99977E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.79978E1	0.0E0	-8.80012E1	4.05312E-4	5.43594E-3	9.33886E-2	2.72973E1	-3.26609E1	-3.26056E1	2.6777E1	1.6987E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.00705E-1