[Scan]
initial_time=2016-02-17T23:52:20
final_time=2016-02-17T23:52:39
ip_count=19
run=1032
dataset=12
scan=644
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.84032E-6
ql1_vset=
ql1_vmon=-8.79982E1
ql1_imon=-1.64407E-9
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=1.36052E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-4.80284E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.58671E-8
mult1=-9.86079E-9
mult2=-2.76652E-9
rf_tmon=-4.90296E-3
rf_agc=3.25705E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.24883E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.06379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=2.18315E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0702E0
lens1_imon=1.54279E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.56454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.72325E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11099E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.18279E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.26677E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.28471E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.21385E-8
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26585E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=9.04453E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=2.00686E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88537E0
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10561E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73708E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.53014E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.3256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.1018E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=9.85203E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-2.1582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=1.61481E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.0836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.58944E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07101E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64025E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=1.00629E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65881E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96342E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.76207E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.13641E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7582E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4884E4	9.0E0	1.47E2	4.1E1	-7.41738E-2	-8.79977E1	-1.43051E-4	-8.80012E1	1.43051E-4	5.48363E-3	9.34362E-2	2.72967E1	-3.26645E1	-3.26681E1	2.67827E1	1.69802E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.98592E-1
2.0E0	5.418E3	4.0E0	3.16E2	1.6E2	-7.47923E-2	-8.79977E1	-4.29153E-4	-8.80013E1	3.33786E-4	5.60284E-3	9.30786E-2	2.73243E1	-3.26603E1	-3.26657E1	2.6802E1	1.69725E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
3.0E0	5.0E0	1.0E0	4.85E2	2.79E2	-7.42513E-2	-8.79977E1	-1.43051E-4	-8.80011E1	2.14577E-4	5.93662E-3	9.30548E-2	2.72915E1	-3.26679E1	-3.26378E1	2.68059E1	1.69802E-7	2.52154E-3	2.52154E-3	6.32112E-3	1.99283E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.79977E1	-3.57628E-4	-8.80012E1	3.57628E-4	5.76973E-3	9.31263E-2	2.73345E1	-3.26885E1	-3.26663E1	2.6789E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.79978E1	-2.86102E-4	-8.80012E1	3.33786E-4	5.81741E-3	9.35793E-2	2.72991E1	-3.26801E1	-3.2605E1	2.67794E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00021E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.79981E1	-3.8147E-4	-8.80012E1	4.76837E-4	5.98431E-3	9.35555E-2	2.73039E1	-3.26765E1	-3.262E1	2.68052E1	1.69806E-7	2.52585E-3	2.52585E-3	6.32978E-3	1.99401E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.79981E1	-6.67572E-4	-8.80012E1	3.57628E-4	5.79357E-3	9.33886E-2	2.72817E1	-3.26729E1	-3.26326E1	2.68448E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.7998E1	-6.19888E-4	-8.80011E1	5.00679E-4	6.05583E-3	9.33886E-2	2.73243E1	-3.26783E1	-3.26068E1	2.68082E1	1.69802E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99456E-1
1.2E1	3.34E2	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.79981E1	-2.14577E-4	-8.80007E1	3.57628E-4	6.17504E-3	9.40323E-2	2.73033E1	-3.26554E1	-3.26356E1	2.68208E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98322E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.79982E1	-4.76837E-5	-8.80007E1	7.15256E-5	6.1512E-3	9.35316E-2	2.72993E1	-3.26753E1	-3.26451E1	2.68088E1	1.69581E-7	2.52139E-3	2.52139E-3	6.29067E-3	1.97469E-1
1.4E1	6.42E2	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79977E1	-1.19209E-4	-8.80009E1	1.90735E-4	5.43594E-3	9.377E-2	2.72485E1	-3.26088E1	-3.26642E1	2.68082E1	1.69723E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.98063E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.79981E1	-2.86102E-4	-8.80009E1	2.38419E-4	5.84126E-3	9.34839E-2	2.72951E1	-3.26549E1	-3.26036E1	2.67848E1	1.69734E-7	2.52521E-3	2.52521E-3	6.3245E-3	1.98984E-1
1.6E1	3.119E3	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.7998E1	7.15256E-5	-8.80009E1	9.53674E-5	5.84126E-3	9.32932E-2	2.73339E1	-3.27005E1	-3.26506E1	2.6813E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
1.7E1	3.6092E4	2.0E1	6.87E2	4.7E2	-7.286E-2	-8.79982E1	1.19209E-4	-8.80006E1	2.14577E-4	5.53131E-3	9.35555E-2	2.73478E1	-3.26651E1	-3.26446E1	2.6819E1	1.69875E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.99456E-1
1.8E1	1.57128E5	8.5E1	7.27E2	5.0E2	-7.36328E-2	-8.79981E1	-2.14577E-4	-8.80009E1	2.6226E-4	5.6982E-3	9.35078E-2	2.72913E1	-3.26855E1	-3.26464E1	2.67968E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99456E-1
1.9E1	3.48E3	2.0E0	7.68E2	5.29E2	-7.37874E-2	-8.7998E1	2.14577E-4	-8.80009E1	2.38419E-4	5.29289E-3	9.3627E-2	2.73358E1	-3.26516E1	-3.2638E1	2.68142E1	1.69798E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00192E-1
2.0E1	2.88E2	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.79984E1	1.43051E-4	-8.80009E1	2.86102E-4	5.14984E-3	9.37223E-2	2.73243E1	-3.26699E1	-3.265E1	2.68082E1	1.69846E-7	2.5199E-3	2.5199E-3	6.31925E-3	1.99034E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.79983E1	-2.38419E-5	-8.80008E1	2.86102E-4	5.48363E-3	9.377E-2	2.73254E1	-3.26961E1	-3.26556E1	2.67816E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1
2.2E1	3.0E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.7998E1	-4.76837E-5	-8.80008E1	4.29153E-4	5.45979E-3	9.35793E-2	2.72877E1	-3.26741E1	-3.26218E1	2.68142E1	1.69794E-7	2.52342E-3	2.52342E-3	6.29684E-3	1.99729E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.79982E1	2.38419E-4	-8.80009E1	4.05312E-4	5.24521E-3	9.35793E-2	2.72997E1	-3.26771E1	-3.26585E1	2.67836E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00021E-1