[Scan]
initial_time=2016-02-17T23:53:13
final_time=2016-02-17T23:53:33
ip_count=19
run=1032
dataset=12
scan=646
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.81253E-6
ql1_vset=
ql1_vmon=-8.79988E1
ql1_imon=-1.20233E-9
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=1.35212E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-3.40555E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.56332E-8
mult1=-9.18017E-9
mult2=-2.76833E-9
rf_tmon=-4.77493E-3
rf_agc=3.31144E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=5.55217E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69158E0
bslens_imon=2.84057E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05327E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53184E1
cs_ef1b_imon=3.06091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04574E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.21056E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03419E0
lens1_imon=1.30446E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.60461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=3.01946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.72678E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.26283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=2.15039E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=1.27651E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=3.27967E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=4.20504E-8
tplens_vset=1.4E-1
tplens_vmon=1.57595E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26596E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26413E1
iondef2_imon=1.61346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0302E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.09328E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=2.00846E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34277E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84908E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.82718E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.53699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.32335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01521E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73428E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09634E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.87377E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47021E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92722E3
multa_neg_imon=7.78512E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.64001E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.58614E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05966E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64064E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=1.00706E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62648E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65744E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58478E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88627E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.23542E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22687E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.05543E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4749E4	2.0E1	1.47E2	4.1E1	-7.24736E-2	-8.79983E1	-4.29153E-4	-8.80008E1	-1.43051E-4	5.6982E-3	9.36031E-2	2.72991E1	-3.26819E1	-3.26404E1	2.68208E1	1.69725E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.9883E-1
2.0E0	5.332E3	4.0E0	3.16E2	1.6E2	-7.33239E-2	-8.79984E1	-1.90735E-4	-8.80006E1	1.66893E-4	5.50747E-3	9.35078E-2	2.73261E1	-3.26807E1	-3.2626E1	2.68052E1	1.69875E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98764E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.79985E1	3.8147E-4	-8.80007E1	3.57628E-4	5.48363E-3	9.33409E-2	2.7254E1	-3.26957E1	-3.2629E1	2.68331E1	1.69581E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.79986E1	2.38419E-5	-8.80011E1	2.86102E-4	5.22137E-3	9.31978E-2	2.73122E1	-3.26549E1	-3.26366E1	2.67902E1	1.69798E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.79985E1	-2.6226E-4	-8.80009E1	2.14577E-4	5.43594E-3	9.35316E-2	2.73075E1	-3.27015E1	-3.26101E1	2.67668E1	1.69654E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99283E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.79984E1	-7.15256E-5	-8.80011E1	5.00679E-4	5.45979E-3	9.35793E-2	2.73039E1	-3.2637E1	-3.26474E1	2.67891E1	1.6987E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79987E1	-1.43051E-4	-8.8001E1	4.05312E-4	5.48363E-3	9.31978E-2	2.72677E1	-3.26672E1	-3.26185E1	2.68157E1	1.69794E-7	2.51814E-3	2.51814E-3	6.2863E-3	1.99227E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.79985E1	4.76837E-5	-8.8001E1	2.38419E-4	5.38826E-3	9.31263E-2	2.72979E1	-3.26609E1	-3.26134E1	2.68435E1	1.69887E-7	2.51271E-3	2.51271E-3	6.29603E-3	1.99163E-1
1.2E1	3.62E2	2.0E0	4.85E2	3.23E2	-7.286E-2	-8.79984E1	1.43051E-4	-8.80011E1	3.09944E-4	5.62668E-3	9.3317E-2	2.73434E1	-3.26738E1	-3.25688E1	2.67872E1	1.69653E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9883E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.79984E1	2.38419E-5	-8.80013E1	2.86102E-4	5.57899E-3	9.33886E-2	2.73255E1	-3.26711E1	-3.26717E1	2.68214E1	1.69728E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9911E-1
1.4E1	6.58E2	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.79985E1	-9.53674E-5	-8.80011E1	3.8147E-4	5.96046E-3	9.35078E-2	2.73291E1	-3.26687E1	-3.25719E1	2.67878E1	1.69581E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00363E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.79985E1	0.0E0	-8.80011E1	2.86102E-4	5.36442E-3	9.32693E-2	2.73021E1	-3.26573E1	-3.2653E1	2.68046E1	1.69875E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.00151E-1
1.6E1	3.093E3	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.79987E1	-2.14577E-4	-8.80009E1	2.14577E-4	5.65052E-3	9.3317E-2	2.73652E1	-3.26843E1	-3.26639E1	2.67806E1	1.69656E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99931E-1
1.7E1	3.6552E4	1.1E1	6.87E2	4.7E2	-7.36328E-2	-8.79986E1	9.53674E-5	-8.80012E1	3.33786E-4	5.60284E-3	9.35078E-2	2.73363E1	-3.26795E1	-3.26651E1	2.6783E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9985E-1
1.8E1	1.5745E5	8.1E1	7.27E2	5.0E2	-7.37103E-2	-8.79984E1	3.33786E-4	-8.8001E1	1.90735E-4	5.6982E-3	9.3627E-2	2.73111E1	-3.26741E1	-3.26398E1	2.67956E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99803E-1
1.9E1	3.47E3	2.0E0	7.68E2	5.29E2	-7.36328E-2	-8.79988E1	1.90735E-4	-8.80011E1	7.15256E-5	5.6982E-3	9.34839E-2	2.73351E1	-3.265E1	-3.26194E1	2.6837E1	1.69728E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.9963E-1
2.0E1	3.29E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.79986E1	4.76837E-5	-8.80014E1	1.66893E-4	5.72205E-3	9.33647E-2	2.73502E1	-3.26422E1	-3.26422E1	2.67752E1	1.69728E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.79987E1	0.0E0	-8.80009E1	3.09944E-4	5.34058E-3	9.33647E-2	2.73346E1	-3.26767E1	-3.26307E1	2.67824E1	1.69881E-7	2.52139E-3	2.52139E-3	6.28511E-3	1.98344E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.7999E1	1.90735E-4	-8.8001E1	4.76837E-5	5.62668E-3	9.35555E-2	2.73369E1	-3.26675E1	-3.26308E1	2.68041E1	1.69653E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.00021E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.79988E1	1.43051E-4	-8.8001E1	2.38419E-4	5.57899E-3	9.32217E-2	2.73428E1	-3.26413E1	-3.26596E1	2.68076E1	1.69725E-7	2.52707E-3	2.52707E-3	6.28592E-3	2.00021E-1