[Scan]
initial_time=2016-02-17T23:53:40
final_time=2016-02-17T23:54:00
ip_count=19
run=1032
dataset=12
scan=647
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.87501E-6
ql1_vset=
ql1_vmon=-8.7999E1
ql1_imon=-9.90439E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.28845E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-3.0214E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.56617E-8
mult1=-9.86079E-9
mult2=-2.75055E-9
rf_tmon=-4.7828E-3
rf_agc=3.34658E-2
counter1=10
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=5.49066E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=3.06141E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=2.17233E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05425E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.55931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84591E1
cs_ef1a_imon=3.00824E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.7261E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.25829E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.17304E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.27155E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93307E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=3.27131E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=4.20211E-8
tplens_vset=1.4E-1
tplens_vmon=1.5618E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.60992E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=9.1368E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74426E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.90335E0
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09279E0
os_ef2alow_imon=-2.50855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.7079E-1
os_ef2bup_imon=-5.45557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=3.54204E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.31698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.29338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72745E1
iondef1_imon=1.06839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10541E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=9.87454E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-2.14018E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56144E1
einzel_imon=7.47932E-6
window_vset=0.0E0
window_vmon=1.5629E-1
window_imon=-9.37738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.85817E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=7.37809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.58526E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=6.91797E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33376E1
os_fil1_imon=9.58076E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07225E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63855E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=1.00611E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61654E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66291E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.06977E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-2.70394E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.88691E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22596E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.97388E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.61147E-1
res40_imon=-2.72749E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5036E4	8.0E0	1.47E2	4.1E1	-7.37874E-2	-8.79991E1	-2.6226E-4	-8.80011E1	3.57628E-4	5.65052E-3	9.33647E-2	2.72821E1	-3.26555E1	-3.26449E1	2.68106E1	1.69652E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.00399E-1
2.0E0	5.535E3	1.3E1	3.16E2	1.6E2	-7.35556E-2	-8.79994E1	-7.15256E-5	-8.80008E1	4.05312E-4	5.74589E-3	9.31263E-2	2.73375E1	-3.2695E1	-3.26449E1	2.67873E1	1.69949E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.99977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.79992E1	-2.6226E-4	-8.80011E1	3.33786E-4	5.65052E-3	9.3174E-2	2.73228E1	-3.26829E1	-3.26052E1	2.68022E1	1.69936E-7	2.51603E-3	2.51603E-3	6.30212E-3	1.99896E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.79991E1	0.0E0	-8.8001E1	2.38419E-4	5.57899E-3	9.2864E-2	2.72937E1	-3.26621E1	-3.26729E1	2.68057E1	1.69806E-7	2.52362E-3	2.52362E-3	6.30182E-3	2.0064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.79987E1	-1.90735E-4	-8.80011E1	1.43051E-4	5.55515E-3	9.30309E-2	2.72871E1	-3.26272E1	-3.26579E1	2.68007E1	1.69656E-7	2.5225E-3	2.5225E-3	6.34099E-3	2.00285E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.79992E1	-1.43051E-4	-8.80007E1	3.09944E-4	5.60284E-3	9.29832E-2	2.72865E1	-3.26657E1	-3.26032E1	2.67872E1	1.69798E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00192E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.7999E1	3.57628E-4	-8.80008E1	3.33786E-4	5.81741E-3	9.31978E-2	2.72702E1	-3.26735E1	-3.26386E1	2.6828E1	1.69654E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.7999E1	1.19209E-4	-8.80007E1	2.14577E-4	5.53131E-3	9.3174E-2	2.72973E1	-3.26404E1	-3.25942E1	2.68172E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
1.2E1	3.24E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.7999E1	-1.90735E-4	-8.80006E1	2.86102E-4	5.91278E-3	9.32932E-2	2.73027E1	-3.26627E1	-3.26146E1	2.67889E1	1.69654E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00673E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.79989E1	-1.66893E-4	-8.80007E1	3.33786E-4	5.62668E-3	9.30786E-2	2.73399E1	-3.26723E1	-3.2638E1	2.68204E1	1.69656E-7	2.52027E-3	2.52027E-3	6.28511E-3	2.00108E-1
1.4E1	6.28E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.79992E1	1.43051E-4	-8.80011E1	9.53674E-5	5.57899E-3	9.30786E-2	2.72349E1	-3.26372E1	-3.27033E1	2.67559E1	1.69798E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1
1.5E1	1.1E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.7999E1	4.76837E-5	-8.80007E1	3.33786E-4	5.34058E-3	9.32932E-2	2.73057E1	-3.26524E1	-3.26368E1	2.68142E1	1.69949E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98592E-1
1.6E1	3.046E3	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.79993E1	-3.57628E-4	-8.80007E1	5.00679E-4	4.88758E-3	9.32455E-2	2.73117E1	-3.26747E1	-3.265E1	2.68268E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99456E-1
1.7E1	3.6677E4	2.4E1	6.87E2	4.7E2	-7.29374E-2	-8.79991E1	-9.53674E-5	-8.80009E1	2.38419E-4	5.34058E-3	9.32455E-2	2.72805E1	-3.26693E1	-3.26122E1	2.68268E1	1.69802E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00325E-1
1.8E1	1.57418E5	9.0E1	7.27E2	5.0E2	-7.27053E-2	-8.79986E1	-4.76837E-5	-8.80009E1	3.09944E-4	5.34058E-3	9.32455E-2	2.73143E1	-3.26603E1	-3.26021E1	2.67968E1	1.69802E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00325E-1
1.9E1	3.486E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.79989E1	-2.38419E-5	-8.80009E1	4.29153E-4	5.6982E-3	9.30786E-2	2.7288E1	-3.26402E1	-3.26396E1	2.68136E1	1.69654E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99803E-1
2.0E1	2.93E2	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.79988E1	2.38419E-5	-8.80011E1	1.66893E-4	5.67436E-3	9.34124E-2	2.73273E1	-3.26362E1	-3.26428E1	2.67932E1	1.69654E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.79991E1	-7.15256E-5	-8.8001E1	1.90735E-4	5.60284E-3	9.32932E-2	2.73399E1	-3.26484E1	-3.26301E1	2.67698E1	1.69654E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.96703E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.79991E1	0.0E0	-8.80007E1	3.33786E-4	5.38826E-3	9.32455E-2	2.73511E1	-3.26349E1	-3.26248E1	2.67711E1	1.69723E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.96575E-1
2.3E1	1.0E1	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.7999E1	-7.15256E-5	-8.80008E1	1.90735E-4	5.24521E-3	9.35555E-2	2.72745E1	-3.26837E1	-3.26356E1	2.68196E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.97388E-1