[Scan]
initial_time=2016-02-17T23:55:00
final_time=2016-02-17T23:55:20
ip_count=19
run=1032
dataset=12
scan=650
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.8397E-6
ql1_vset=
ql1_vmon=-8.79999E1
ql1_imon=-8.8799E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.27877E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.52799E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.56245E-8
mult1=-9.43937E-9
mult2=-2.61681E-9
rf_tmon=-3.6232E-3
rf_agc=3.28409E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.65565E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.06559E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.1918E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03054E0
lens1_imon=1.25439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.57535E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.72905E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.18531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26832E0
cs_ionrep_imon=1.27254E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=3.26417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=4.20619E-8
tplens_vset=1.4E-1
tplens_vmon=1.61019E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57427E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.50999E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=2.01479E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85473E0
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06159E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71906E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=3.53122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23122E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.11248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67862E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09965E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.88858E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-2.10053E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.49468E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=8.3922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.48518E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5018E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.59064E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06218E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64157E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=1.00652E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62156E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65925E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57071E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8371E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.55687E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.81516E-1
res40_imon=-2.75285E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5054E4	1.3E1	1.47E2	4.1E1	-7.47923E-2	-8.79996E1	1.90735E-4	-8.80009E1	2.38419E-4	5.48363E-3	9.35555E-2	2.73177E1	-3.26518E1	-3.26452E1	2.67878E1	1.69881E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99048E-1
2.0E0	5.457E3	5.0E0	3.16E2	1.6E2	-7.42513E-2	-8.79997E1	1.90735E-4	-8.80008E1	1.90735E-4	5.76973E-3	9.34124E-2	2.72811E1	-3.26717E1	-3.26362E1	2.67956E1	1.69725E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9934E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.50241E-2	-8.79998E1	2.38419E-4	-8.80008E1	2.38419E-4	5.98431E-3	9.30309E-2	2.73104E1	-3.26567E1	-3.2636E1	2.67397E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00499E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.44059E-2	-8.79997E1	2.6226E-4	-8.80005E1	2.38419E-4	5.55515E-3	9.3317E-2	2.73535E1	-3.2672E1	-3.26301E1	2.68354E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.56423E-2	-8.79998E1	4.76837E-5	-8.80007E1	1.19209E-4	5.45979E-3	9.35555E-2	2.73009E1	-3.2647E1	-3.26524E1	2.68142E1	1.69943E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00021E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.51013E-2	-8.79997E1	2.38419E-4	-8.80007E1	9.53674E-5	5.126E-3	9.36508E-2	2.73139E1	-3.26526E1	-3.26272E1	2.678E1	1.69654E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.57198E-2	-8.79999E1	1.43051E-4	-8.80005E1	2.38419E-4	5.31673E-3	9.35316E-2	2.72991E1	-3.26723E1	-3.26332E1	2.6759E1	1.69875E-7	2.52757E-3	2.52757E-3	6.32386E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.79997E1	-1.66893E-4	-8.80007E1	9.53674E-5	5.48363E-3	9.34601E-2	2.7275E1	-3.2659E1	-3.26266E1	2.67944E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.99E-1
1.2E1	3.67E2	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.79997E1	4.76837E-5	-8.80007E1	7.15256E-5	5.72205E-3	9.34362E-2	2.72709E1	-3.26639E1	-3.2608E1	2.68286E1	1.69725E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.79998E1	5.00679E-4	-8.80007E1	1.19209E-4	5.55515E-3	9.35316E-2	2.73417E1	-3.26849E1	-3.25888E1	2.67932E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98937E-1
1.4E1	6.01E2	1.0E0	5.66E2	3.82E2	-7.44059E-2	-8.79998E1	0.0E0	-8.80004E1	7.15256E-5	5.76973E-3	9.35078E-2	2.73305E1	-3.26514E1	-3.25765E1	2.67565E1	1.69728E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99456E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79994E1	0.0E0	-8.80006E1	2.86102E-4	5.62668E-3	9.32932E-2	2.73081E1	-3.26494E1	-3.26681E1	2.68142E1	1.70015E-7	2.5131E-3	2.5131E-3	6.34518E-3	1.9951E-1
1.6E1	3.082E3	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.79994E1	0.0E0	-8.80007E1	5.00679E-4	5.65052E-3	9.35078E-2	2.73363E1	-3.26639E1	-3.25864E1	2.68157E1	1.69654E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.9911E-1
1.7E1	3.6095E4	2.1E1	6.87E2	4.7E2	-7.39421E-2	-8.79996E1	-7.15256E-5	-8.80007E1	0.0E0	5.50747E-3	9.36508E-2	2.72919E1	-3.26458E1	-3.26759E1	2.6792E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
1.8E1	1.57749E5	8.8E1	7.27E2	5.0E2	-7.49466E-2	-8.79997E1	-1.90735E-4	-8.80006E1	4.76837E-5	5.43594E-3	9.36508E-2	2.73008E1	-3.27105E1	-3.26364E1	2.68238E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9911E-1
1.9E1	3.564E3	7.0E0	7.68E2	5.29E2	-7.40192E-2	-8.79996E1	1.19209E-4	-8.80007E1	1.66893E-4	5.38826E-3	9.36747E-2	2.73069E1	-3.2685E1	-3.26231E1	2.67884E1	1.69581E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.99401E-1
2.0E1	3.06E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.79997E1	0.0E0	-8.80003E1	-7.15256E-5	5.6982E-3	9.36747E-2	2.73213E1	-3.26969E1	-3.26512E1	2.68105E1	1.70015E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.79995E1	-1.43051E-4	-8.80004E1	-1.43051E-4	5.24521E-3	9.36508E-2	2.73488E1	-3.26874E1	-3.26124E1	2.67974E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00151E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.79998E1	-2.38419E-4	-8.80003E1	9.53674E-5	5.45979E-3	9.36031E-2	2.73269E1	-3.26207E1	-3.25599E1	2.67944E1	1.69798E-7	2.52492E-3	2.52492E-3	6.30202E-3	1.9968E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.79999E1	1.19209E-4	-8.80004E1	4.52995E-4	5.60284E-3	9.35555E-2	2.73303E1	-3.26597E1	-3.2626E1	2.67862E1	1.69581E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9951E-1