[Scan]
initial_time=2016-02-17T23:56:21
final_time=2016-02-17T23:56:40
ip_count=19
run=1032
dataset=12
scan=653
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.78418E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.89046E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.32704E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.33505E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.55837E-8
mult1=-9.42733E-9
mult2=-2.8284E-9
rf_tmon=-4.27209E-3
rf_agc=3.35138E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.54967E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66455E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19909E1
lens5a_imon=1.97905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53141E1
cs_ef1b_imon=3.05638E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05127E1
cs_ea1_imon=2.17789E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64641E1
os_ef1alow_imon=2.97394E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.038E1
cs_ea2_imon=1.55009E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84368E1
cs_ef1a_imon=3.0118E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.72835E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11082E1
os_restr1_imon=4.26795E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15358E1
os_ea1_imon=2.15947E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63662E1
os_ef1bup_imon=3.08788E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23877E0
cs_ionrep_imon=1.27478E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=3.28815E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=4.19538E-8
tplens_vset=1.4E-1
tplens_vmon=1.5974E0
tplens_imon=-2.98445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.50455E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57651E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.98603E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.66854E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30424E0
ionrepsh_imon=2.01104E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33883E1
lens5b_imon=2.20396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74413E1
cs_ef2b_imon=3.12892E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88071E0
os_ea2_imon=-5.76541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00689E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71093E1
cs_ef2a_imon=3.1682E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07785E0
os_ef2alow_imon=-2.61963E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58953E-1
os_ef2bup_imon=-5.46808E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10876E1
os_restr2_imon=3.54434E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31041E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.27722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.10722E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.07061E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10232E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.86768E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1266E0
cs_ionaccel_imon=-1.82349E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5634E1
einzel_imon=7.65953E-6
window_vset=0.0E0
window_vmon=1.59428E-1
window_imon=-8.68107E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39123E-4
mask2_vset=0.0E0
mask2_vmon=-1.86043E1
mask2_imon=-8.78722E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.98535E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.73044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.18582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54281E0
defgridb_imon=6.31677E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.58697E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06946E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64222E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=1.00657E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61965E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67297E-2
os_fil2_imon=-2.66171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8852E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.31376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00058E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22737E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68055E-1
res40_imon=-2.58425E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4924E4	9.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79999E1	-4.76837E-5	-8.80005E1	7.15256E-5	5.14984E-3	9.33886E-2	2.73363E1	-3.26741E1	-3.26404E1	2.67917E1	1.69798E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9917E-1
2.0E0	5.354E3	8.0E0	3.16E2	1.6E2	-7.30146E-2	-8.79997E1	-1.90735E-4	-8.80005E1	3.09944E-4	5.17368E-3	9.34601E-2	2.73092E1	-3.26561E1	-3.26405E1	2.68024E1	1.6987E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00021E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.79999E1	-2.86102E-4	-8.80004E1	-9.53674E-5	5.67436E-3	9.34362E-2	2.73015E1	-3.26452E1	-3.262E1	2.683E1	1.69794E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.01072E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80001E1	-1.90735E-4	-8.80006E1	4.05312E-4	5.6982E-3	9.34362E-2	2.73645E1	-3.26162E1	-3.26376E1	2.68007E1	1.69581E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00705E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.79998E1	-1.66893E-4	-8.80007E1	1.90735E-4	5.67436E-3	9.34839E-2	2.73033E1	-3.26805E1	-3.26181E1	2.67956E1	1.69963E-7	2.52179E-3	2.52179E-3	6.29035E-3	1.99883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.79998E1	-6.67572E-4	-8.80005E1	4.29153E-4	5.60284E-3	9.32932E-2	2.73267E1	-3.27035E1	-3.25828E1	2.68016E1	1.69731E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.0064E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80001E1	-1.43051E-4	-8.80004E1	6.19888E-4	5.60284E-3	9.35316E-2	2.7263E1	-3.2653E1	-3.26056E1	2.68028E1	1.69875E-7	2.52867E-3	2.52867E-3	6.32386E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.79999E1	-9.53674E-5	-8.80004E1	5.00679E-4	5.84126E-3	9.36031E-2	2.7298E1	-3.26502E1	-3.25953E1	2.67938E1	1.69581E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9951E-1
1.2E1	3.57E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.8E1	2.14577E-4	-8.80007E1	4.76837E-4	5.4121E-3	9.33886E-2	2.72775E1	-3.26765E1	-3.26236E1	2.67577E1	1.69654E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.8E1	2.14577E-4	-8.80003E1	2.6226E-4	5.67436E-3	9.33409E-2	2.72943E1	-3.26945E1	-3.26212E1	2.68064E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98419E-1
1.4E1	6.53E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.8E1	-7.15256E-5	-8.80005E1	7.15256E-5	5.38826E-3	9.33886E-2	2.73279E1	-3.26807E1	-3.259E1	2.67884E1	1.69654E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00673E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.79998E1	-2.14577E-4	-8.80003E1	2.38419E-5	5.4121E-3	9.36031E-2	2.73305E1	-3.26797E1	-3.26201E1	2.6783E1	1.69949E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.00151E-1
1.6E1	3.014E3	5.0E0	6.47E2	4.41E2	-7.40967E-2	-8.8E1	-2.14577E-4	-8.80004E1	-2.38419E-5	5.65052E-3	9.35555E-2	2.73135E1	-3.26633E1	-3.2632E1	2.6785E1	1.69798E-7	2.51632E-3	2.51632E-3	6.34518E-3	1.9985E-1
1.7E1	3.6334E4	1.7E1	6.87E2	4.7E2	-7.43285E-2	-8.80004E1	-2.14577E-4	-8.80004E1	2.14577E-4	5.48363E-3	9.37223E-2	2.73357E1	-3.26723E1	-3.26284E1	2.68136E1	1.69798E-7	2.52384E-3	2.52384E-3	6.29128E-3	1.9985E-1
1.8E1	1.58321E5	9.7E1	7.27E2	5.0E2	-7.44059E-2	-8.8E1	-3.33786E-4	-8.80007E1	0.0E0	5.8651E-3	9.36031E-2	2.72892E1	-3.26938E1	-3.26307E1	2.67932E1	1.69654E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.98592E-1
1.9E1	3.538E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.79997E1	-4.05312E-4	-8.80004E1	0.0E0	5.8651E-3	9.35078E-2	2.72991E1	-3.26765E1	-3.26506E1	2.67896E1	1.69581E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00499E-1
2.0E1	3.4E2	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.79998E1	-4.05312E-4	-8.80006E1	2.38419E-4	6.00815E-3	9.36508E-2	2.73195E1	-3.2638E1	-3.26404E1	2.67872E1	1.69728E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.79997E1	-1.90735E-4	-8.80005E1	-2.14577E-4	5.67436E-3	9.3627E-2	2.73364E1	-3.26921E1	-3.26119E1	2.67911E1	1.69802E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99283E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80003E1	-4.29153E-4	-8.80004E1	3.57628E-4	5.55515E-3	9.35555E-2	2.74573E1	-3.27705E1	-3.25187E1	2.68123E1	1.69725E-7	2.53139E-3	2.53139E-3	6.3074E-3	2.00021E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80005E1	-3.09944E-4	-8.80006E1	-4.76837E-5	5.55515E-3	9.35555E-2	2.73297E1	-3.26554E1	-3.26591E1	2.68112E1	1.69653E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00363E-1