[Scan]
initial_time=2016-02-17T23:56:47
final_time=2016-02-17T23:57:07
ip_count=19
run=1032
dataset=12
scan=654
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.75779E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-7.88915E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.33194E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.25213E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.55817E-8
mult1=-1.17257E-8
mult2=-2.75853E-9
rf_tmon=-5.29234E-3
rf_agc=3.25992E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=5.66947E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62787E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20444E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04803E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53106E1
cs_ef1b_imon=3.07388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02432E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.15428E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.4602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.95063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.56143E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.0191E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.73039E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15577E1
os_ea1_imon=2.15711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=1.25633E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=3.26958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=4.19943E-8
tplens_vset=1.4E-1
tplens_vmon=1.59483E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26379E1
iondef3_imon=1.52214E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.89456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24502E0
ionrepsh_imon=2.01235E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34112E1
lens5b_imon=2.20631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74363E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8125E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00842E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.093E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.89325E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.53483E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01545E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73107E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68263E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10282E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82976E-1
olens1_imon=9.87948E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-2.14018E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.85593E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=8.54256E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.741E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60045E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.59143E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64161E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=1.00478E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6084E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66598E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61671E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22726E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31779E-3
inlet_lpb_pmon=1.99119E-1
chamber_ion_pmon=1.6986E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.24474E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4992E4	1.5E1	1.47E2	4.1E1	-7.26282E-2	-8.80001E1	3.57628E-4	-8.80005E1	4.05312E-4	5.84126E-3	9.32455E-2	2.72957E1	-3.27263E1	-3.26703E1	2.68052E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
2.0E0	5.339E3	6.0E0	3.16E2	1.6E2	-7.27053E-2	-8.79998E1	2.6226E-4	-8.80005E1	1.90735E-4	5.6982E-3	9.35316E-2	2.72916E1	-3.26297E1	-3.26487E1	2.67944E1	1.69581E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.79999E1	2.38419E-4	-8.80006E1	2.14577E-4	5.98431E-3	9.377E-2	2.7297E1	-3.26689E1	-3.26341E1	2.6781E1	1.69881E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.97294E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80001E1	1.43051E-4	-8.80005E1	1.66893E-4	5.74589E-3	9.3627E-2	2.73063E1	-3.26663E1	-3.26428E1	2.68382E1	1.69723E-7	2.52025E-3	2.52025E-3	6.3074E-3	1.98229E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80002E1	-4.76837E-5	-8.80004E1	3.57628E-4	5.79357E-3	9.37223E-2	2.73039E1	-3.26478E1	-3.2606E1	2.68232E1	1.69654E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
6.0E0	3.0E0	0.0E0	9.93E2	6.35E2	-7.10051E-2	-8.80001E1	-1.43051E-4	-8.80007E1	-2.38419E-5	5.65052E-3	9.37462E-2	2.72933E1	-3.26697E1	-3.26307E1	2.67943E1	1.69725E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98491E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.13143E-2	-8.80001E1	-4.76837E-5	-8.80003E1	1.43051E-4	6.05583E-3	9.34839E-2	2.73135E1	-3.26681E1	-3.26506E1	2.67956E1	1.69653E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.79999E1	1.19209E-4	-8.80004E1	1.43051E-4	5.65052E-3	9.34124E-2	2.73014E1	-3.26774E1	-3.26327E1	2.67907E1	1.69949E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
1.2E1	3.8E2	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80003E1	1.66893E-4	-8.80005E1	4.52995E-4	5.98431E-3	9.35793E-2	2.73087E1	-3.2638E1	-3.26158E1	2.681E1	1.69656E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.00463E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80001E1	9.53674E-5	-8.80007E1	2.14577E-4	5.67436E-3	9.35555E-2	2.72985E1	-3.2641E1	-3.26302E1	2.68227E1	1.69802E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99977E-1
1.4E1	6.79E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80002E1	9.53674E-5	-8.80002E1	1.43051E-4	5.65052E-3	9.37462E-2	2.7269E1	-3.26254E1	-3.26242E1	2.67848E1	1.69802E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
1.5E1	7.6E1	1.0E0	6.06E2	4.11E2	-7.286E-2	-8.79999E1	0.0E0	-8.80001E1	3.09944E-4	5.84126E-3	9.33886E-2	2.72985E1	-3.26699E1	-3.26116E1	2.68154E1	1.69875E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98937E-1
1.6E1	3.101E3	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.79999E1	-7.15256E-5	-8.80003E1	7.15256E-5	5.84126E-3	9.34839E-2	2.72774E1	-3.26596E1	-3.2629E1	2.68142E1	1.69798E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.99E-1
1.7E1	3.6381E4	1.8E1	6.87E2	4.7E2	-7.27053E-2	-8.79997E1	-1.43051E-4	-8.80005E1	3.33786E-4	5.88894E-3	9.36985E-2	2.73381E1	-3.26741E1	-3.26134E1	2.68076E1	1.69798E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.98153E-1
1.8E1	1.56158E5	9.5E1	7.27E2	5.0E2	-7.37103E-2	-8.8E1	1.43051E-4	-8.80006E1	2.86102E-4	5.76973E-3	9.3627E-2	2.73345E1	-3.26669E1	-3.26296E1	2.68034E1	1.69692E-7	2.51787E-3	2.51787E-3	6.31847E-3	1.98818E-1
1.9E1	3.554E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79999E1	2.38419E-4	-8.80005E1	3.09944E-4	5.98431E-3	9.34839E-2	2.72967E1	-3.26615E1	-3.26332E1	2.67716E1					
2.0E1	3.24E2	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.79999E1	-4.76837E-5	-8.80005E1	5.48363E-4	5.60284E-3	9.35078E-2	2.73177E1	-3.27053E1	-3.25972E1	2.68178E1	1.69654E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.9911E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.79999E1	2.38419E-5	-8.80002E1	4.52995E-4	5.84126E-3	9.35316E-2	2.73381E1	-3.26903E1	-3.26278E1	2.6798E1	1.69581E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00021E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.79998E1	-9.53674E-5	-8.80003E1	2.86102E-4	5.57899E-3	9.36508E-2	2.74332E1	-3.27398E1	-3.24917E1	2.67978E1	1.70031E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.97643E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.8E1	-4.76837E-5	-8.80002E1	5.72205E-4	5.38826E-3	9.37223E-2	2.73107E1	-3.26915E1	-3.26379E1	2.68263E1	1.6986E-7	2.5199E-3	2.5199E-3	6.31779E-3	1.99119E-1