[Scan]
initial_time=2016-02-17T23:57:14
final_time=2016-02-17T23:57:33
ip_count=19
run=1032
dataset=12
scan=655
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.78766E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.48062E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.21967E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.12576E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.55317E-8
mult1=-1.00775E-8
mult2=-2.69466E-9
rf_tmon=-4.22403E-3
rf_agc=3.32675E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.34737E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54959E1
cs_ef1b_imon=3.08435E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=2.17774E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02934E0
lens1_imon=1.48871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.5804E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84539E1
cs_ef1a_imon=3.01727E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.73322E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11013E1
os_restr1_imon=4.26419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=2.17522E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27012E0
cs_ionrep_imon=1.25307E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=3.26471E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=4.19116E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03008E2
lens6_imon=2.98573E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.74591E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=2.00614E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85713E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09916E0
os_ef2alow_imon=-2.76225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.69632E-1
os_ef2bup_imon=-5.2123E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=3.53856E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.26662E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.10527E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.06905E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.10079E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.89685E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47105E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=1.95097E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39035E-4
mask2_vset=0.0E0
mask2_vmon=-1.85991E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5339E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.57914E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0664E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64381E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=1.00628E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61706E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66355E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77707E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73785E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.44909E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.94483E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22555E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=1.99401E-1
chamber_ion_pmon=1.69881E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.9532E-1
res40_imon=-2.67189E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4793E4	1.3E1	1.47E2	4.1E1	-7.17779E-2	-8.80002E1	1.66893E-4	-8.80007E1	1.19209E-4	5.74589E-3	9.34124E-2	2.73228E1	-3.2649E1	-3.26195E1	2.67788E1	1.69725E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9934E-1
2.0E0	5.421E3	2.0E0	3.16E2	1.6E2	-7.15461E-2	-8.80002E1	-2.14577E-4	-8.80004E1	2.38419E-5	6.12736E-3	9.36031E-2	2.73062E1	-3.26649E1	-3.26264E1	2.68142E1	1.69654E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99977E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.07733E-2	-8.8E1	-2.38419E-4	-8.80005E1	1.43051E-4	5.65052E-3	9.36747E-2	2.72845E1	-3.26933E1	-3.26396E1	2.67884E1	1.69766E-7	2.51944E-3	2.51944E-3	6.33154E-3	2.00227E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80003E1	-4.05312E-4	-8.80006E1	2.38419E-5	5.74589E-3	9.35555E-2	2.72835E1	-3.26903E1	-3.26176E1	2.68226E1	1.70015E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80004E1	-3.57628E-4	-8.80007E1	-2.38419E-5	5.45979E-3	9.33647E-2	2.72498E1	-3.26777E1	-3.25972E1	2.68124E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80001E1	-1.66893E-4	-8.80005E1	2.14577E-4	5.50747E-3	9.32932E-2	2.73279E1	-3.26639E1	-3.26332E1	2.67856E1	1.69654E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80003E1	-9.53674E-5	-8.80005E1	-3.57628E-4	5.62668E-3	9.34124E-2	2.72528E1	-3.2629E1	-3.26236E1	2.68148E1	1.69875E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80002E1	-2.14577E-4	-8.80004E1	4.76837E-5	5.67436E-3	9.3627E-2	2.72919E1	-3.26446E1	-3.26284E1	2.67564E1	1.69654E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00499E-1
1.2E1	3.26E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80004E1	2.86102E-4	-8.80003E1	2.38419E-5	5.88894E-3	9.36031E-2	2.72835E1	-3.26554E1	-3.26026E1	2.68053E1	1.69802E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9963E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80009E1	1.43051E-4	-8.80003E1	4.76837E-5	5.79357E-3	9.32217E-2	2.73339E1	-3.26783E1	-3.26146E1	2.67845E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
1.4E1	6.24E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80005E1	1.43051E-4	-8.80003E1	-9.53674E-5	5.45979E-3	9.3317E-2	2.73163E1	-3.27062E1	-3.26207E1	2.68094E1	1.69802E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.9911E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80006E1	-9.53674E-5	-8.80002E1	3.09944E-4	5.65052E-3	9.33886E-2	2.73363E1	-3.26645E1	-3.2635E1	2.67998E1	1.69798E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00192E-1
1.6E1	3.117E3	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80004E1	-2.38419E-5	-8.80005E1	2.6226E-4	5.57899E-3	9.34362E-2	2.73129E1	-3.26386E1	-3.26332E1	2.67938E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1
1.7E1	3.6752E4	2.1E1	6.87E2	4.7E2	-7.29374E-2	-8.80003E1	1.66893E-4	-8.80004E1	3.33786E-4	5.6982E-3	9.32217E-2	2.73309E1	-3.26603E1	-3.26296E1	2.68052E1	1.69802E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00847E-1
1.8E1	1.56404E5	8.5E1	7.27E2	5.0E2	-7.27053E-2	-8.80005E1	7.15256E-5	-8.80001E1	2.86102E-4	5.74589E-3	9.3174E-2	2.72955E1	-3.26981E1	-3.25749E1	2.68118E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99977E-1
1.9E1	3.652E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80002E1	4.76837E-5	-8.8E1	3.8147E-4	5.72205E-3	9.3174E-2	2.73163E1	-3.26514E1	-3.26201E1	2.68106E1	1.69875E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.97903E-1
2.0E1	3.16E2	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80002E1	-1.66893E-4	-8.80002E1	1.90735E-4	5.24521E-3	9.3317E-2	2.73442E1	-3.26549E1	-3.26338E1	2.67926E1	1.69798E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.00534E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80002E1	-3.33786E-4	-8.80003E1	1.19209E-4	5.34058E-3	9.32932E-2	2.7311E1	-3.26608E1	-3.26077E1	2.68111E1	1.69654E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99977E-1
2.2E1	3.6E1	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.79999E1	0.0E0	-8.80002E1	-2.38419E-4	5.36442E-3	9.35316E-2	2.74163E1	-3.27149E1	-3.25407E1	2.6795E1	1.69652E-7	2.51182E-3	2.51182E-3	6.32328E-3	1.99394E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80005E1	1.19209E-4	-8.80001E1	2.86102E-4	5.45979E-3	9.3317E-2	2.72937E1	-3.26873E1	-3.2641E1	2.6786E1	1.69881E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.99401E-1