[Scan]
initial_time=2016-02-17T23:57:41
final_time=2016-02-17T23:58:00
ip_count=19
run=1032
dataset=12
scan=656
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.76948E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-7.32267E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.30628E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.16383E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.55833E-8
mult1=-9.0902E-9
mult2=-2.85834E-9
rf_tmon=-4.06781E-3
rf_agc=3.47515E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.54013E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62846E0
bslens_imon=2.91136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.05838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05507E1
cs_ea1_imon=2.16278E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.50621E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.98775E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.56638E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.73052E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.17835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.25315E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=3.27678E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=4.20444E-8
tplens_vset=1.4E-1
tplens_vmon=1.59896E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27209E1
iondef3_imon=1.51613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.55339E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24974E0
ionrepsh_imon=2.04031E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34188E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74357E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.89155E0
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70705E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10475E1
os_restr2_imon=3.53627E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.27885E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67931E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.09936E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=9.88066E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17039E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.85827E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.38163E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.85426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.57929E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6437E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00626E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66373E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58478E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.11529E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22608E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.43385E-1
res40_imon=-2.69158E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.47E4	1.2E1	1.47E2	4.1E1	-7.25507E-2	-8.80005E1	3.8147E-4	-8.80002E1	1.90735E-4	5.98431E-3	9.34601E-2	2.72819E1	-3.26417E1	-3.26706E1	2.68186E1					
2.0E0	5.403E3	2.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80005E1	1.66893E-4	-8.80001E1	4.76837E-5	5.8651E-3	9.33409E-2	2.73063E1	-3.26389E1	-3.26376E1	2.6828E1	1.69798E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98661E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80006E1	0.0E0	-8.79999E1	9.53674E-5	5.91278E-3	9.32455E-2	2.7311E1	-3.26638E1	-3.26284E1	2.6801E1	1.69731E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80004E1	-2.14577E-4	-8.80003E1	7.15256E-5	5.60284E-3	9.36031E-2	2.73139E1	-3.26673E1	-3.26425E1	2.68111E1	1.69652E-7	2.52025E-3	2.52025E-3	6.30212E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80004E1	2.6226E-4	-8.80005E1	1.66893E-4	5.45979E-3	9.35078E-2	2.73045E1	-3.26735E1	-3.26188E1	2.68106E1	1.69802E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80005E1	2.38419E-5	-8.80004E1	2.38419E-4	5.91278E-3	9.34124E-2	2.73279E1	-3.26777E1	-3.26218E1	2.68013E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80006E1	-1.19209E-4	-8.80002E1	7.15256E-5	6.24657E-3	9.33409E-2	2.73183E1	-3.26597E1	-3.25972E1	2.68094E1	1.69728E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80004E1	1.90735E-4	-8.80007E1	-2.14577E-4	5.65052E-3	9.35793E-2	2.73333E1	-3.2641E1	-3.26152E1	2.67998E1	1.69654E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00151E-1
1.2E1	3.53E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80002E1	3.09944E-4	-8.80007E1	1.19209E-4	5.62668E-3	9.32455E-2	2.73057E1	-3.26567E1	-3.26146E1	2.67938E1	1.69728E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.99283E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80003E1	2.86102E-4	-8.80004E1	2.38419E-5	5.62668E-3	9.32932E-2	2.73003E1	-3.26543E1	-3.26621E1	2.6807E1	1.69581E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.98937E-1
1.4E1	6.48E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80005E1	7.15256E-5	-8.80004E1	1.43051E-4	5.65052E-3	9.33647E-2	2.72738E1	-3.26067E1	-3.26505E1	2.68227E1	1.69798E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9985E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80005E1	1.90735E-4	-8.80004E1	3.57628E-4	5.74589E-3	9.34362E-2	2.73157E1	-3.26697E1	-3.26198E1	2.68001E1	1.69581E-7	2.52025E-3	2.52025E-3	6.29684E-3	1.98727E-1
1.6E1	3.088E3	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.80008E1	0.0E0	-8.80006E1	2.14577E-4	5.67436E-3	9.36031E-2	2.72933E1	-3.26537E1	-3.26307E1	2.67776E1	1.69731E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.98696E-1
1.7E1	3.6401E4	1.3E1	6.87E2	4.7E2	-7.12368E-2	-8.80006E1	1.43051E-4	-8.80008E1	7.15256E-5	5.62668E-3	9.35078E-2	2.73169E1	-3.26638E1	-3.2649E1	2.67984E1	1.69728E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.98937E-1
1.8E1	1.56104E5	7.8E1	7.27E2	5.0E2	-7.14689E-2	-8.80004E1	-2.38419E-4	-8.80007E1	1.90735E-4	5.8651E-3	9.33647E-2	2.73163E1	-3.26628E1	-3.25792E1	2.67963E1	1.69725E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00192E-1
1.9E1	3.527E3	6.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80004E1	-4.76837E-5	-8.8001E1	2.38419E-4	5.74589E-3	9.33647E-2	2.72871E1	-3.26777E1	-3.26446E1	2.67529E1	1.6981E-7	2.51838E-3	2.51838E-3	6.3131E-3	1.99883E-1
2.0E1	3.24E2	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80003E1	-2.38419E-5	-8.80007E1	2.6226E-4	5.84126E-3	9.3627E-2	2.73033E1	-3.2626E1	-3.26537E1	2.68184E1	1.69836E-7	2.51918E-3	2.51918E-3	6.31283E-3	1.9914E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.10825E-2	-8.80003E1	1.19209E-4	-8.80004E1	1.90735E-4	5.53131E-3	9.35316E-2	2.73086E1	-3.26974E1	-3.25971E1	2.68088E1					
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80004E1	-1.66893E-4	-8.80004E1	3.57628E-4	5.93662E-3	9.35316E-2	2.74237E1	-3.27841E1	-3.25122E1	2.67908E1	1.69723E-7	2.52025E-3	2.52025E-3	6.30212E-3	1.98561E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80007E1	4.76837E-5	-8.80004E1	5.00679E-4	5.6982E-3	9.37462E-2	2.73135E1	-3.26615E1	-3.27209E1	2.67931E1	1.69728E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9911E-1