[Scan]
initial_time=2016-02-17T23:58:07
final_time=2016-02-17T23:58:27
ip_count=19
run=1032
dataset=12
scan=657
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.70093E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-7.44605E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.29946E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.11424E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.55984E-8
mult1=-1.08825E-8
mult2=-2.70758E-9
rf_tmon=-3.7426E-3
rf_agc=3.47131E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=5.28538E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53648E1
cs_ef1b_imon=3.07195E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.18543E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00823E0
lens1_imon=1.42127E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64411E1
os_ef1alow_imon=2.96722E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04115E1
cs_ea2_imon=1.56568E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84079E1
cs_ef1a_imon=3.01994E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.73279E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11277E1
os_restr1_imon=4.26299E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.17764E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63349E1
os_ef1bup_imon=3.0808E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25328E0
cs_ionrep_imon=1.27049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01915E1
cs_anode1_imon=3.29629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=4.19481E-8
tplens_vset=1.4E-1
tplens_vmon=1.59188E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.48498E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2685E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.66079E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=2.01943E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74578E1
cs_ef2b_imon=3.11548E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85026E0
os_ea2_imon=-5.71422E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7111E1
cs_ef2a_imon=3.18872E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09083E0
os_ef2alow_imon=-2.81425E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.82543E-1
os_ef2bup_imon=-5.58838E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.54221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.26908E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.09078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=1.1029E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83024E-1
olens1_imon=9.90253E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-2.13133E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56529E1
einzel_imon=7.67015E-6
window_vset=0.0E0
window_vmon=1.69454E-1
window_imon=-1.10872E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.85843E1
mask2_imon=-6.94723E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.3427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.3906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.09494E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.43661E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.58797E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07913E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64359E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=1.00603E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62673E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66432E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-2.6853E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82031E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69264E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36326E-1
cs_fil2_imon=-2.04838E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22593E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.97647E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.02004E-1
res40_imon=-2.6161E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4902E4	2.3E1	1.47E2	4.1E1	-7.07733E-2	-8.80003E1	0.0E0	-8.80005E1	1.90735E-4	5.60284E-3	9.34362E-2	2.73381E1	-3.26392E1	-3.26518E1	2.67972E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98764E-1
2.0E0	5.42E3	8.0E0	3.16E2	1.6E2	-6.98458E-2	-8.80007E1	-9.53674E-5	-8.80004E1	5.72205E-4	5.79357E-3	9.32932E-2	2.73069E1	-3.26669E1	-3.2647E1	2.68047E1	1.69875E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99803E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.02322E-2	-8.80007E1	1.19209E-4	-8.80003E1	4.29153E-4	5.91278E-3	9.32693E-2	2.72999E1	-3.26596E1	-3.26411E1	2.68035E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.99E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.03094E-2	-8.80005E1	-4.76837E-5	-8.80003E1	1.19209E-4	5.8651E-3	9.34124E-2	2.72985E1	-3.2644E1	-3.26615E1	2.68223E1	1.69725E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.09279E-2	-8.80006E1	-1.43051E-4	-8.80007E1	5.72205E-4	5.67436E-3	9.38177E-2	2.73364E1	-3.26484E1	-3.26231E1	2.67937E1	1.69875E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.00151E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.06187E-2	-8.80005E1	-1.90735E-4	-8.80002E1	7.15256E-5	5.96046E-3	9.408E-2	2.73098E1	-3.26927E1	-3.26071E1	2.68256E1	1.69723E-7	2.52025E-3	2.52025E-3	6.30212E-3	2.00231E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80004E1	0.0E0	-8.80005E1	1.43051E-4	5.74589E-3	9.37462E-2	2.73129E1	-3.26663E1	-3.2608E1	2.68076E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99283E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80001E1	-1.19209E-4	-8.80003E1	4.29153E-4	5.8651E-3	9.33409E-2	2.73381E1	-3.26422E1	-3.265E1	2.68117E1	1.69949E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.98764E-1
1.2E1	3.28E2	0.0E0	4.85E2	3.23E2	-7.0464E-2	-8.80001E1	2.14577E-4	-8.80005E1	4.05312E-4	5.8651E-3	9.37939E-2	2.72516E1	-3.26687E1	-3.26044E1	2.6849E1	1.69653E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.00705E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80005E1	-7.15256E-5	-8.80003E1	3.57628E-4	5.79357E-3	9.37939E-2	2.73225E1	-3.27269E1	-3.26176E1	2.6825E1	1.69806E-7	2.52585E-3	2.52585E-3	6.32418E-3	1.99931E-1
1.4E1	5.77E2	1.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80008E1	4.76837E-5	-8.80003E1	2.86102E-4	5.8651E-3	9.33886E-2	2.73267E1	-3.26831E1	-3.25755E1	2.68346E1	1.69802E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.00151E-1
1.5E1	1.07E2	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80007E1	-1.43051E-4	-8.80004E1	9.53674E-5	5.62668E-3	9.35078E-2	2.7364E1	-3.26915E1	-3.2614E1	2.67999E1	1.69728E-7	2.51826E-3	2.51826E-3	6.31014E-3	2.00064E-1
1.6E1	3.092E3	3.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80004E1	-7.15256E-5	-8.80004E1	3.57628E-4	5.57899E-3	9.377E-2	2.73429E1	-3.26621E1	-3.2605E1	2.67617E1					
1.7E1	3.6569E4	1.2E1	6.87E2	4.7E2	-7.11597E-2	-8.80006E1	0.0E0	-8.80003E1	4.05312E-4	5.31673E-3	9.34839E-2	2.73241E1	-3.26591E1	-3.26425E1	2.68184E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9963E-1
1.8E1	1.56192E5	1.0E2	7.27E2	5.0E2	-7.23964E-2	-8.80004E1	-2.6226E-4	-8.80001E1	2.14577E-4	5.43594E-3	9.33886E-2	2.7321E1	-3.26938E1	-3.26001E1	2.68034E1	1.69875E-7	2.51662E-3	2.51662E-3	6.3514E-3	1.9911E-1
1.9E1	3.58E3	2.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80007E1	-4.76837E-5	-8.80004E1	1.19209E-4	5.29289E-3	9.33409E-2	2.72745E1	-3.26597E1	-3.26416E1	2.6803E1	1.69728E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.98419E-1
2.0E1	3.65E2	0.0E0	8.08E2	5.58E2	-7.10051E-2	-8.80008E1	1.66893E-4	-8.80004E1	5.48363E-4	5.60284E-3	9.34124E-2	2.73015E1	-3.26687E1	-3.26362E1	2.6802E1	1.69802E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.10051E-2	-8.80007E1	-1.66893E-4	-8.80004E1	3.09944E-4	5.91278E-3	9.37939E-2	2.73257E1	-3.26838E1	-3.26396E1	2.67995E1	1.69875E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98419E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80005E1	-3.33786E-4	-8.80005E1	5.48363E-4	5.57899E-3	9.34362E-2	2.72072E1	-3.26669E1	-3.27438E1	2.67722E1	1.6987E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.98322E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80009E1	-5.96046E-4	-8.80003E1	1.43051E-4	5.88894E-3	9.32217E-2	2.73151E1	-3.2685E1	-3.2626E1	2.68076E1	1.69725E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.97647E-1