[Scan]
initial_time=2016-02-17T23:59:27
final_time=2016-02-17T23:59:47
ip_count=19
run=1032
dataset=12
scan=660
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.77721E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.61922E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.33032E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.03464E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.55913E-8
mult1=-9.7949E-9
mult2=-2.7017E-9
rf_tmon=-5.11707E-3
rf_agc=3.26248E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.37634E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61086E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05374E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.51556E1
cs_ef1b_imon=3.05406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.18855E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01853E0
lens1_imon=1.48511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.57103E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.01802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.73085E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.19576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63023E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31759E0
cs_ionrep_imon=1.26244E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=3.28111E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=4.2024E-8
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.54504E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30257E0
ionrepsh_imon=2.03138E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.19468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74273E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.9118E0
os_ea2_imon=-7.71595E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.94731E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.53411E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.10126E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83143E-1
olens1_imon=9.88568E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.85791E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.14849E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.45851E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56397E0
defgridb_imon=6.44192E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.58872E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07197E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64668E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=1.00532E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61639E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66694E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25965E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.49E4	1.8E1	1.47E2	4.1E1	-7.14689E-2	-8.80009E1	-1.43051E-4	-8.80005E1	1.19209E-4	6.03199E-3	9.33647E-2	2.73063E1	-3.26596E1	-3.26054E1	2.67974E1	1.69802E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.01022E-1
2.0E0	5.653E3	5.0E0	3.16E2	1.6E2	-7.12368E-2	-8.80007E1	-1.19209E-4	-8.80005E1	3.8147E-4	5.50747E-3	9.31501E-2	2.73069E1	-3.26823E1	-3.26444E1	2.68022E1	1.70015E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00021E-1
3.0E0	1.0E0	1.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80009E1	-1.90735E-4	-8.80005E1	4.29153E-4	5.57899E-3	9.34601E-2	2.73085E1	-3.26747E1	-3.26109E1	2.67445E1	1.69731E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80007E1	-1.66893E-4	-8.80005E1	3.8147E-4	5.62668E-3	9.36747E-2	2.73332E1	-3.26585E1	-3.26073E1	2.68226E1	1.6986E-7	2.51679E-3	2.51679E-3	6.3126E-3	1.96191E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80008E1	-3.57628E-4	-8.80007E1	2.6226E-4	5.60284E-3	9.35078E-2	2.73399E1	-3.26987E1	-3.26615E1	2.6801E1	1.69656E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.95382E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80008E1	-1.66893E-4	-8.80008E1	1.66893E-4	5.57899E-3	9.36508E-2	2.73345E1	-3.26645E1	-3.26428E1	2.67974E1	1.69802E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.96361E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80006E1	1.19209E-4	-8.80004E1	1.43051E-4	5.67436E-3	9.32693E-2	2.72909E1	-3.26744E1	-3.26036E1	2.68016E1	1.69802E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.96532E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80005E1	-4.76837E-5	-8.80007E1	3.09944E-4	5.57899E-3	9.35078E-2	2.72961E1	-3.26597E1	-3.26338E1	2.68178E1	1.70023E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.97559E-1
1.2E1	3.47E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80005E1	-1.90735E-4	-8.80005E1	1.19209E-4	5.72205E-3	9.36031E-2	2.72949E1	-3.26765E1	-3.265E1	2.68226E1	1.69728E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.98937E-1
1.3E1	2.9E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80005E1	-4.76837E-5	-8.80009E1	3.33786E-4	5.8651E-3	9.37462E-2	2.73069E1	-3.26506E1	-3.26302E1	2.678E1	1.69653E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00021E-1
1.4E1	6.42E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80004E1	-3.8147E-4	-8.80003E1	3.33786E-4	5.79357E-3	9.35555E-2	2.72809E1	-3.26313E1	-3.26236E1	2.68058E1	1.69581E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.01197E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80007E1	-7.15256E-5	-8.80008E1	3.57628E-4	5.48363E-3	9.37939E-2	2.73165E1	-3.26747E1	-3.262E1	2.6807E1	1.69875E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.01197E-1
1.6E1	3.109E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80008E1	-1.90735E-4	-8.80005E1	7.15256E-5	5.29289E-3	9.33647E-2	2.72696E1	-3.26681E1	-3.26506E1	2.68274E1	1.69798E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9985E-1
1.7E1	3.6002E4	1.6E1	6.87E2	4.7E2	-7.18554E-2	-8.80007E1	-1.90735E-4	-8.80008E1	3.8147E-4	5.4121E-3	9.34362E-2	2.73118E1	-3.26474E1	-3.26278E1	2.67808E1	1.69802E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.99283E-1
1.8E1	1.56533E5	8.0E1	7.27E2	5.0E2	-7.24736E-2	-8.80004E1	-3.57628E-4	-8.80003E1	1.19209E-4	5.4121E-3	9.377E-2	2.73594E1	-3.2695E1	-3.26331E1	2.68214E1	1.69881E-7	2.52027E-3	2.52027E-3	6.26289E-3	1.99224E-1
1.9E1	3.61E3	6.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80005E1	-3.8147E-4	-8.80007E1	9.53674E-5	5.45979E-3	9.3627E-2	2.72921E1	-3.26974E1	-3.25883E1	2.67752E1	1.69728E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.9963E-1
2.0E1	3.02E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80007E1	-2.14577E-4	-8.80007E1	-2.38419E-5	5.43594E-3	9.38892E-2	2.73039E1	-3.26793E1	-3.26242E1	2.67932E1	1.69725E-7	2.52169E-3	2.52169E-3	6.28592E-3	1.9934E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80008E1	-9.53674E-5	-8.80007E1	7.15256E-5	5.55515E-3	9.33409E-2	2.72837E1	-3.26805E1	-3.26417E1	2.68076E1	1.69581E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.9963E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80006E1	-4.76837E-5	-8.80007E1	3.33786E-4	5.81741E-3	9.34124E-2	2.71873E1	-3.2507E1	-3.27089E1	2.67812E1	1.69794E-7	2.52025E-3	2.52025E-3	6.30212E-3	1.99394E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80007E1	-4.76837E-5	-8.80007E1	3.09944E-4	5.67436E-3	9.36747E-2	2.73075E1	-3.26756E1	-3.26478E1	2.68094E1	1.69654E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.99283E-1