[Scan]
initial_time=2016-02-18T00:00:21
final_time=2016-02-18T00:00:40
ip_count=19
run=1032
dataset=12
scan=662
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.7939E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.97649E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.29182E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.92704E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.55838E-8
mult1=-1.021E-8
mult2=-2.76652E-9
rf_tmon=-5.69605E-3
rf_agc=3.20478E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=5.35679E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64833E0
bslens_imon=2.45819E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19874E1
lens5a_imon=1.98983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52555E1
cs_ef1b_imon=3.06141E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02111E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04901E1
cs_ea1_imon=2.17546E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03018E0
lens1_imon=1.27628E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64498E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03603E1
cs_ea2_imon=1.56608E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.03048E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=1.73333E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.26558E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15265E1
os_ea1_imon=2.17998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.09303E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28338E0
cs_ionrep_imon=1.26956E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=3.28174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=4.20282E-8
tplens_vset=1.4E-1
tplens_vmon=1.63854E0
tplens_imon=-2.94969E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26819E1
iondef3_imon=1.50455E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.57095E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98554E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.3946E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29613E0
ionrepsh_imon=2.02737E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.18346E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7442E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86565E0
os_ea2_imon=-7.92066E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00581E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.16601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09047E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.16548E-1
os_ef2bup_imon=-5.43472E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.5469E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.30276E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.26905E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10241E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.87991E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12898E0
cs_ionaccel_imon=-2.05329E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=1.76562E-1
window_imon=-1.09065E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86089E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.4083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.61573E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.4813E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58631E0
defgridb_imon=6.1673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.60277E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07132E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64626E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=1.00686E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66383E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83464E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75097E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.72131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22553E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98592E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5095E4	9.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80005E1	-3.09944E-4	-8.80007E1	2.38419E-5	5.72205E-3	9.34362E-2	2.72817E1	-3.26344E1	-3.26458E1	2.6822E1	1.69794E-7	2.52131E-3	2.52131E-3	6.30212E-3	1.99394E-1
2.0E0	5.476E3	5.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80004E1	-2.6226E-4	-8.80006E1	0.0E0	5.84126E-3	9.36508E-2	2.73153E1	-3.26819E1	-3.26338E1	2.68148E1	1.69654E-7	2.52428E-3	2.52428E-3	6.34588E-3	1.98764E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80005E1	-5.96046E-4	-8.80005E1	4.76837E-5	5.34058E-3	9.33886E-2	2.73137E1	-3.26866E1	-3.26334E1	2.68226E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.45602E-2	-8.80007E1	-4.05312E-4	-8.80005E1	9.53674E-5	5.45979E-3	9.33409E-2	2.73312E1	-3.26758E1	-3.26069E1	2.68198E1	1.69731E-7	2.52473E-3	2.52473E-3	6.30182E-3	1.97994E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80008E1	-3.09944E-4	-8.80004E1	1.19209E-4	5.38826E-3	9.36031E-2	2.73466E1	-3.26549E1	-3.26068E1	2.68119E1	1.69723E-7	2.52448E-3	2.52448E-3	6.33388E-3	1.99896E-1
6.0E0	1.0E0	1.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80009E1	1.43051E-4	-8.80005E1	4.76837E-5	5.48363E-3	9.34839E-2	2.72949E1	-3.2653E1	-3.26182E1	2.68022E1	1.69881E-7	2.52697E-3	2.52697E-3	6.31299E-3	2.00463E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.51013E-2	-8.80008E1	-2.86102E-4	-8.80005E1	-1.43051E-4	5.74589E-3	9.36031E-2	2.72847E1	-3.26627E1	-3.26062E1	2.68238E1	1.69802E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00847E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.8001E1	9.53674E-5	-8.80003E1	9.53674E-5	5.31673E-3	9.36747E-2	2.72997E1	-3.27167E1	-3.26014E1	2.68233E1	1.69728E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00847E-1
1.2E1	3.6E2	0.0E0	4.85E2	3.23E2	-7.47149E-2	-8.80009E1	-4.76837E-5	-8.80006E1	2.38419E-5	5.79357E-3	9.34362E-2	2.73586E1	-3.26639E1	-3.26146E1	2.68101E1	1.69653E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00876E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80008E1	1.66893E-4	-8.80004E1	-7.15256E-5	5.74589E-3	9.39131E-2	2.72919E1	-3.26524E1	-3.26344E1	2.67995E1	1.69731E-7	2.51581E-3	2.51581E-3	6.31858E-3	1.99754E-1
1.4E1	6.47E2	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80006E1	-1.43051E-4	-8.80005E1	1.90735E-4	5.62668E-3	9.38654E-2	2.72537E1	-3.26205E1	-3.26444E1	2.67814E1	1.6987E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00534E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.47149E-2	-8.8001E1	-2.14577E-4	-8.80007E1	-2.38419E-4	5.03063E-3	9.36508E-2	2.73139E1	-3.26602E1	-3.26419E1	2.68105E1	1.69656E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99931E-1
1.6E1	3.23E3	2.0E0	6.47E2	4.41E2	-7.45602E-2	-8.80007E1	-2.38419E-4	-8.80007E1	-2.38419E-5	5.36442E-3	9.34601E-2	2.72987E1	-3.26417E1	-3.26382E1	2.68296E1	1.69653E-7	2.50989E-3	2.50989E-3	6.32356E-3	2.00534E-1
1.7E1	3.6248E4	2.1E1	6.87E2	4.7E2	-7.44831E-2	-8.8001E1	-2.86102E-4	-8.80005E1	9.53674E-5	5.14984E-3	9.36031E-2	2.72841E1	-3.26639E1	-3.26549E1	2.67882E1	1.69723E-7	2.51814E-3	2.51814E-3	6.32328E-3	1.99729E-1
1.8E1	1.57989E5	8.2E1	7.27E2	5.0E2	-7.41738E-2	-8.80009E1	-5.24521E-4	-8.80007E1	1.19209E-4	5.48363E-3	9.3317E-2	2.73363E1	-3.26621E1	-3.26278E1	2.67902E1	1.69806E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.98872E-1
1.9E1	3.44E3	3.0E0	7.68E2	5.29E2	-7.47923E-2	-8.80009E1	-6.91414E-4	-8.80003E1	-4.76837E-5	5.26905E-3	9.35555E-2	2.7321E1	-3.26496E1	-3.26113E1	2.68337E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
2.0E1	3.15E2	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80011E1	-2.14577E-4	-8.80003E1	4.76837E-5	5.29289E-3	9.39131E-2	2.73111E1	-3.26494E1	-3.26681E1	2.67726E1	1.69725E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.98491E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80008E1	-4.76837E-5	-8.80005E1	1.43051E-4	5.38826E-3	9.37462E-2	2.7324E1	-3.26844E1	-3.26301E1	2.67648E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
2.2E1	4.4E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80008E1	-7.15256E-5	-8.80005E1	2.6226E-4	5.45979E-3	9.3317E-2	2.74296E1	-3.27192E1	-3.25074E1	2.67911E1	1.69581E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.9985E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80008E1	2.38419E-5	-8.80005E1	1.19209E-4	5.19753E-3	9.34601E-2	2.73063E1	-3.26795E1	-3.26819E1	2.68058E1	1.6987E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.98661E-1