[Scan]
initial_time=2016-02-18T00:00:47
final_time=2016-02-18T00:01:07
ip_count=19
run=1032
dataset=12
scan=663
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.82267E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.87885E-10
ql2_vset=
ql2_vmon=2.14577E-4
ql2_imon=1.32756E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.96424E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.5612E-8
mult1=-9.71631E-9
mult2=-2.68069E-9
rf_tmon=-5.40765E-3
rf_agc=3.24744E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=5.65088E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=3.06091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.01984E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0509E1
cs_ea1_imon=2.15142E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02694E0
lens1_imon=1.34091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.56237E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.02018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.73378E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.19757E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.27938E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=3.28399E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=4.2002E-8
tplens_vset=1.4E-1
tplens_vmon=1.62882E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.4827E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98598E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.33833E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=2.03102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33934E1
lens5b_imon=2.20117E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86194E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0948E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.88124E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.5478E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02151E1
cs_anode2_imon=2.28317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10492E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.88297E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-2.06089E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.49456E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93759E3
defgrida_imon=6.95742E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53089E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.5856E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06861E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64482E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=1.007E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62504E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6644E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78941E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22585E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.98322E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.54487E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4765E4	1.7E1	1.47E2	4.1E1	-7.35556E-2	-8.80009E1	-2.14577E-4	-8.80006E1	3.33786E-4	5.38826E-3	9.35078E-2	2.73004E1	-3.26738E1	-3.26248E1	2.68001E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00847E-1
2.0E0	5.472E3	4.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80008E1	-2.6226E-4	-8.80004E1	1.90735E-4	5.14984E-3	9.3317E-2	2.73309E1	-3.26957E1	-3.2614E1	2.68208E1	1.69727E-7	2.52026E-3	2.52026E-3	6.31283E-3	1.99913E-1
3.0E0	7.0E0	1.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80004E1	2.38419E-5	-8.80005E1	3.33786E-4	5.22137E-3	9.3317E-2	2.73311E1	-3.26738E1	-3.26266E1	2.67692E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80007E1	-3.8147E-4	-8.80005E1	2.14577E-4	5.34058E-3	9.34124E-2	2.72889E1	-3.26326E1	-3.26086E1	2.6801E1	1.69581E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.00705E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80008E1	-1.90735E-4	-8.80005E1	3.09944E-4	5.74589E-3	9.33886E-2	2.73123E1	-3.26675E1	-3.2608E1	2.68022E1	1.69728E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80008E1	-9.53674E-5	-8.80004E1	1.90735E-4	5.48363E-3	9.34362E-2	2.73255E1	-3.26585E1	-3.26194E1	2.6789E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80008E1	1.43051E-4	-8.80002E1	2.14577E-4	5.60284E-3	9.38416E-2	2.72853E1	-3.26777E1	-3.26416E1	2.68004E1	1.69802E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80012E1	2.38419E-5	-8.80003E1	3.33786E-4	5.74589E-3	9.37462E-2	2.72843E1	-3.26474E1	-3.26144E1	2.68148E1	1.69802E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00847E-1
1.2E1	3.54E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80007E1	-7.15256E-5	-8.80003E1	2.86102E-4	5.74589E-3	9.35316E-2	2.73322E1	-3.27092E1	-3.26083E1	2.67854E1	1.69731E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.00285E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80007E1	-2.38419E-4	-8.80006E1	3.57628E-4	5.65052E-3	9.3627E-2	2.72941E1	-3.26921E1	-3.26205E1	2.68094E1	1.69654E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.9963E-1
1.4E1	6.6E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80007E1	0.0E0	-8.80003E1	2.86102E-4	5.55515E-3	9.33886E-2	2.72697E1	-3.26408E1	-3.26797E1	2.6822E1	1.69802E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00673E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.8001E1	0.0E0	-8.80003E1	2.6226E-4	5.55515E-3	9.32455E-2	2.73045E1	-3.26753E1	-3.26494E1	2.68022E1	1.69798E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.98661E-1
1.6E1	3.126E3	3.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80011E1	4.76837E-5	-8.80007E1	2.86102E-4	5.62668E-3	9.34362E-2	2.7332E1	-3.26725E1	-3.26034E1	2.68112E1	1.69654E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9911E-1
1.7E1	3.6221E4	1.0E1	6.87E2	4.7E2	-7.31692E-2	-8.8001E1	-1.19209E-4	-8.80008E1	4.52995E-4	5.48363E-3	9.34601E-2	2.73122E1	-3.26679E1	-3.2606E1	2.68136E1	1.69581E-7	2.51581E-3	2.51581E-3	6.28511E-3	1.98872E-1
1.8E1	1.55663E5	8.8E1	7.27E2	5.0E2	-7.30146E-2	-8.8001E1	9.53674E-5	-8.80008E1	9.53674E-5	5.6982E-3	9.32932E-2	2.73093E1	-3.26987E1	-3.26008E1	2.67974E1	1.69802E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.00847E-1
1.9E1	3.471E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80011E1	2.14577E-4	-8.80007E1	1.90735E-4	5.43594E-3	9.34362E-2	2.73051E1	-3.26738E1	-3.26419E1	2.67986E1	1.69581E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9968E-1
2.0E1	2.89E2	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80008E1	1.66893E-4	-8.80005E1	1.90735E-4	5.45979E-3	9.35078E-2	2.73393E1	-3.26978E1	-3.26254E1	2.68328E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80007E1	1.43051E-4	-8.80004E1	9.53674E-5	5.60284E-3	9.33409E-2	2.73132E1	-3.26553E1	-3.26229E1	2.67608E1	1.69865E-7	2.51393E-3	2.51393E-3	6.31269E-3	1.99394E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80005E1	1.66893E-4	-8.80003E1	7.15256E-5	5.60284E-3	9.33886E-2	2.74508E1	-3.27357E1	-3.2531E1	2.6831E1	1.69734E-7	2.51838E-3	2.51838E-3	6.31879E-3	1.98088E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80007E1	2.14577E-4	-8.80001E1	3.33786E-4	5.76973E-3	9.35316E-2	2.73345E1	-3.26777E1	-3.26561E1	2.68304E1	1.69798E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.98322E-1