[Scan]
initial_time=2016-02-18T00:03:01
final_time=2016-02-18T00:03:20
ip_count=19
run=1032
dataset=12
scan=668
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.71542E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.72507E-10
ql2_vset=
ql2_vmon=2.86102E-4
ql2_imon=1.30222E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.87097E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.55485E-8
mult1=-1.18355E-8
mult2=-2.79646E-9
rf_tmon=-4.75275E-3
rf_agc=3.30031E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.30279E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60545E0
bslens_imon=2.77332E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53441E1
cs_ef1b_imon=3.03917E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.18401E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02475E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64272E1
os_ef1alow_imon=3.00163E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.56108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=2.99781E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.73233E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.2767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.17339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.27474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=3.30224E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=4.19703E-8
tplens_vset=1.4E-1
tplens_vmon=1.58716E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26777E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.63898E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23499E0
ionrepsh_imon=2.01412E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34118E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.10971E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84849E0
os_ea2_imon=-1.03154E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0618E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70841E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12233E0
os_ef2alow_imon=-2.71012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62102E-1
os_ef2bup_imon=-5.43124E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.53439E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.29129E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.08329E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10376E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.90284E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09539E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47344E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55982E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=1.44126E-1
window_imon=-1.15668E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82592E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=6.92151E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.64189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50184E3
multb_neg_imon=7.16573E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.73628E0
defgridb_imon=6.29149E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.58453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64455E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=1.00678E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62656E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66713E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63189E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-1.90463E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.88691E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35662E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5152E4	2.1E1	1.47E2	4.1E1	-7.22418E-2	-8.80012E1	-5.24521E-4	-8.80007E1	-2.38419E-5	5.48363E-3	9.36985E-2	2.72933E1	-3.26596E1	-3.26508E1	2.68142E1	1.69728E-7	2.52867E-3	2.52867E-3	6.31837E-3	1.98937E-1
2.0E0	5.552E3	7.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80013E1	-5.96046E-4	-8.80005E1	3.33786E-4	5.74589E-3	9.36031E-2	2.73242E1	-3.26469E1	-3.26463E1	2.68128E1	1.69943E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.98491E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80012E1	2.38419E-5	-8.80007E1	7.15256E-5	5.60284E-3	9.32932E-2	2.72727E1	-3.26897E1	-3.26309E1	2.68186E1	1.69723E-7	2.52448E-3	2.52448E-3	6.31798E-3	2.00231E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.8001E1	-2.86102E-4	-8.80009E1	3.09944E-4	5.48363E-3	9.36747E-2	2.73116E1	-3.2685E1	-3.26012E1	2.67769E1	1.69806E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.99754E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80009E1	9.53674E-5	-8.80008E1	1.90735E-4	5.65052E-3	9.34124E-2	2.72987E1	-3.26723E1	-3.26175E1	2.68103E1	1.69798E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00021E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80009E1	-3.33786E-4	-8.80008E1	2.86102E-4	5.45979E-3	9.36031E-2	2.72823E1	-3.26639E1	-3.26338E1	2.68304E1	1.69966E-7	2.51736E-3	2.51736E-3	6.31696E-3	2.00139E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80008E1	-4.52995E-4	-8.80011E1	2.6226E-4	5.65052E-3	9.3627E-2	2.72721E1	-3.26621E1	-3.26488E1	2.67734E1	1.69731E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99401E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80014E1	-1.90735E-4	-8.80008E1	3.33786E-4	5.34058E-3	9.377E-2	2.7269E1	-3.26873E1	-3.26218E1	2.67728E1	1.69802E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.99456E-1
1.2E1	3.17E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80012E1	-3.33786E-4	-8.80008E1	4.29153E-4	5.8651E-3	9.36985E-2	2.73257E1	-3.26467E1	-3.26178E1	2.67878E1	1.6987E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.98491E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.8001E1	-5.96046E-4	-8.80007E1	4.05312E-4	5.8651E-3	9.38177E-2	2.7269E1	-3.26793E1	-3.26278E1	2.67782E1	1.69875E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.99283E-1
1.4E1	6.75E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80011E1	-1.90735E-4	-8.80005E1	4.29153E-4	5.74589E-3	9.35793E-2	2.73546E1	-3.26756E1	-3.25989E1	2.67878E1	1.69875E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99977E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80008E1	-3.8147E-4	-8.80003E1	1.19209E-4	5.84126E-3	9.34601E-2	2.73147E1	-3.26639E1	-3.26314E1	2.6789E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99456E-1
1.6E1	3.156E3	1.0E0	6.47E2	4.41E2	-7.36328E-2	-8.8001E1	-1.90735E-4	-8.80002E1	1.19209E-4	5.81741E-3	9.37462E-2	2.73237E1	-3.26753E1	-3.26224E1	2.67499E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
1.7E1	3.6486E4	2.0E1	6.87E2	4.7E2	-7.37103E-2	-8.80009E1	-2.14577E-4	-8.80006E1	2.86102E-4	5.48363E-3	9.35555E-2	2.72937E1	-3.26807E1	-3.26278E1	2.67998E1	1.69728E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.99283E-1
1.8E1	1.55751E5	8.9E1	7.27E2	5.0E2	-7.33239E-2	-8.80007E1	-1.43051E-4	-8.80004E1	0.0E0	5.55515E-3	9.35078E-2	2.73051E1	-3.26255E1	-3.26383E1	2.67752E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9883E-1
1.9E1	3.599E3	1.0E0	7.68E2	5.29E2	-7.37103E-2	-8.8001E1	-2.14577E-4	-8.80008E1	-7.15256E-5	5.65052E-3	9.34362E-2	2.72696E1	-3.26687E1	-3.26573E1	2.68052E1	1.69786E-7	2.51447E-3	2.51447E-3	6.33297E-3	1.97891E-1
2.0E1	3.11E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80013E1	0.0E0	-8.80004E1	1.19209E-4	5.48363E-3	9.31263E-2	2.73387E1	-3.26957E1	-3.26158E1	2.67746E1	1.69656E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99048E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80014E1	1.19209E-4	-8.80004E1	5.24521E-4	5.50747E-3	9.35316E-2	2.72821E1	-3.26685E1	-3.26124E1	2.6798E1	1.69654E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.97903E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80013E1	2.6226E-4	-8.80004E1	2.14577E-4	5.62668E-3	9.35078E-2	2.7385E1	-3.26693E1	-3.25443E1	2.67978E1	1.69653E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.97984E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80014E1	2.86102E-4	-8.80004E1	2.38419E-5	5.6982E-3	9.32217E-2	2.73249E1	-3.26831E1	-3.26777E1	2.68136E1	1.69653E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.9934E-1