[Scan]
initial_time=2016-02-18T00:03:27
final_time=2016-02-18T00:03:47
ip_count=19
run=1032
dataset=12
scan=669
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.77067E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-6.44875E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.28551E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.85853E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.55782E-8
mult1=-9.5959E-9
mult2=-2.69665E-9
rf_tmon=-6.04453E-3
rf_agc=3.22221E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.98729E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70161E0
bslens_imon=2.32381E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20072E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54119E1
cs_ef1b_imon=3.07531E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05206E1
cs_ea1_imon=2.18861E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99939E0
lens1_imon=1.54868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.53913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84487E1
cs_ef1a_imon=2.99468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.73297E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10984E1
os_restr1_imon=4.28365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.17729E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.2666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.26958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=4.20471E-8
tplens_vset=1.4E-1
tplens_vmon=1.59306E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=7.98988E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=2.03359E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74438E1
cs_ef2b_imon=3.11805E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87503E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.79352E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.89904E-1
os_ef2bup_imon=-5.47294E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10689E1
os_restr2_imon=3.53926E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23125E2
cs_ionfoca_imon=6.32335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10639E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=9.90137E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1591E0
cs_ionaccel_imon=-1.87606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.52798E-6
window_vset=0.0E0
window_vmon=1.62661E-1
window_imon=-8.64758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.38935E-4
mask2_vset=0.0E0
mask2_vmon=-1.85857E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92577E3
multa_neg_imon=7.49843E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.13222E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50218E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.5887E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0708E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64382E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=1.00533E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66401E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.54176E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35028E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22617E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.04008E-1
res40_imon=-2.87693E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5069E4	1.2E1	1.47E2	4.1E1	-7.24736E-2	-8.8001E1	-1.66893E-4	-8.80007E1	4.05312E-4	5.8651E-3	9.31978E-2	2.72768E1	-3.26773E1	-3.26313E1	2.6798E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98322E-1
2.0E0	5.348E3	4.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80011E1	-2.6226E-4	-8.80006E1	2.6226E-4	5.65052E-3	9.31501E-2	2.72916E1	-3.26432E1	-3.26872E1	2.68172E1	1.69581E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.98661E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80011E1	-4.76837E-4	-8.80006E1	2.86102E-4	5.93662E-3	9.33647E-2	2.73225E1	-3.26857E1	-3.26011E1	2.6814E1	1.69802E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99283E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.8001E1	-3.33786E-4	-8.80007E1	1.66893E-4	5.79357E-3	9.33409E-2	2.73063E1	-3.26831E1	-3.26308E1	2.6813E1	1.69943E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80013E1	-2.86102E-4	-8.80005E1	2.86102E-4	5.65052E-3	9.3317E-2	2.72985E1	-3.26669E1	-3.26428E1	2.67708E1	1.69653E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.98661E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80013E1	-3.57628E-4	-8.80008E1	3.09944E-4	5.45979E-3	9.34124E-2	2.731E1	-3.26701E1	-3.2607E1	2.67926E1	1.69881E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.0064E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80011E1	-5.24521E-4	-8.80006E1	3.8147E-4	5.34058E-3	9.3317E-2	2.72744E1	-3.2652E1	-3.26372E1	2.68029E1	1.69654E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80012E1	-4.29153E-4	-8.80009E1	3.57628E-4	5.126E-3	9.33886E-2	2.73165E1	-3.27149E1	-3.2617E1	2.67988E1	1.69654E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99283E-1
1.2E1	3.35E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80011E1	-6.91414E-4	-8.80007E1	5.24521E-4	5.19753E-3	9.36508E-2	2.73003E1	-3.26482E1	-3.26182E1	2.68082E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98247E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80008E1	-2.14577E-4	-8.80003E1	3.33786E-4	5.38826E-3	9.36031E-2	2.72997E1	-3.26963E1	-3.26212E1	2.67824E1	1.69875E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99803E-1
1.4E1	6.51E2	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80007E1	-1.43051E-4	-8.80005E1	1.19209E-4	5.74589E-3	9.36031E-2	2.72606E1	-3.26711E1	-3.26458E1	2.68262E1	1.69943E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9968E-1
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80009E1	0.0E0	-8.80006E1	6.19888E-4	5.79357E-3	9.3174E-2	2.72865E1	-3.26627E1	-3.26386E1	2.67807E1	1.69656E-7	2.52473E-3	2.52473E-3	6.33538E-3	1.99931E-1
1.6E1	3.162E3	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80013E1	0.0E0	-8.80006E1	4.29153E-4	6.07967E-3	9.32693E-2	2.73173E1	-3.26634E1	-3.26193E1	2.68217E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
1.7E1	3.6093E4	1.8E1	6.87E2	4.7E2	-7.20871E-2	-8.8001E1	4.76837E-5	-8.80006E1	1.90735E-4	5.67436E-3	9.31263E-2	2.73526E1	-3.26963E1	-3.26374E1	2.67872E1	1.69875E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00499E-1
1.8E1	1.54839E5	7.2E1	7.27E2	5.0E2	-7.30918E-2	-8.80012E1	-2.6226E-4	-8.80008E1	1.43051E-4	5.50747E-3	9.34124E-2	2.73075E1	-3.26549E1	-3.26183E1	2.67931E1	1.69654E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.99977E-1
1.9E1	3.452E3	2.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80011E1	-1.19209E-4	-8.80003E1	2.38419E-5	5.38826E-3	9.34839E-2	2.72829E1	-3.26873E1	-3.26152E1	2.68052E1	1.69875E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99456E-1
2.0E1	3.26E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80013E1	-9.53674E-5	-8.80007E1	-2.14577E-4	5.29289E-3	9.35316E-2	2.7301E1	-3.26726E1	-3.26231E1	2.67848E1	1.6987E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.8001E1	9.53674E-5	-8.80004E1	-7.15256E-5	5.50747E-3	9.33647E-2	2.73122E1	-3.26472E1	-3.26189E1	2.68012E1	1.69798E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.98661E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80007E1	4.76837E-5	-8.80003E1	3.09944E-4	5.76973E-3	9.33647E-2	2.72957E1	-3.26543E1	-3.27021E1	2.68112E1	1.69798E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00192E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80006E1	1.19209E-4	-8.80007E1	9.53674E-5	5.34058E-3	9.35078E-2	2.72919E1	-3.26585E1	-3.26002E1	2.67854E1	1.69725E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.98491E-1