[Scan]
initial_time=2016-02-18T00:03:54
final_time=2016-02-18T00:04:13
ip_count=19
run=1032
dataset=12
scan=670
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.75588E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.55961E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.30541E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.85723E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.55862E-8
mult1=-9.90016E-9
mult2=-2.75853E-9
rf_tmon=-5.02405E-3
rf_agc=3.30297E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=5.28157E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.05194E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53364E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05246E1
cs_ea1_imon=2.1662E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05998E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.56345E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.01369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.73157E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15234E1
os_ea1_imon=2.1781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=1.26605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=3.30201E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=4.20562E-8
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26503E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26709E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.94701E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=2.02849E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34072E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87515E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12604E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.69503E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=3.55105E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.28966E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73157E1
iondef1_imon=1.07679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68186E1
iondef4_imon=1.06539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10605E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.8887E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=6.89975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.57027E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.57965E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07521E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64456E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=1.00636E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62108E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66742E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66437E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=1.98229E-1
chamber_ion_pmon=1.69936E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70104E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4863E4	1.3E1	1.47E2	4.1E1	-7.27828E-2	-8.80012E1	-7.15256E-5	-8.80004E1	1.43051E-4	5.76973E-3	9.35316E-2	2.7321E1	-3.26679E1	-3.26413E1	2.67821E1	1.69949E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99977E-1
2.0E0	5.472E3	8.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80013E1	1.43051E-4	-8.80005E1	-1.19209E-4	5.6982E-3	9.31978E-2	2.72979E1	-3.26669E1	-3.26224E1	2.67884E1	1.69949E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.99283E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80013E1	1.43051E-4	-8.80002E1	-1.90735E-4	6.00815E-3	9.37223E-2	2.73163E1	-3.2672E1	-3.26077E1	2.67812E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9985E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80012E1	2.38419E-5	-8.80001E1	-9.53674E-5	5.62668E-3	9.36985E-2	2.73098E1	-3.26779E1	-3.26602E1	2.67873E1	1.69581E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80011E1	0.0E0	-8.80002E1	-2.14577E-4	5.72205E-3	9.36031E-2	2.72973E1	-3.26699E1	-3.2641E1	2.68022E1	1.69875E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.01372E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80012E1	1.19209E-4	-8.8E1	-1.43051E-4	5.43594E-3	9.35793E-2	2.72991E1	-3.26398E1	-3.26446E1	2.68013E1	1.69581E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80011E1	0.0E0	-8.80004E1	0.0E0	5.53131E-3	9.35316E-2	2.72907E1	-3.26374E1	-3.26212E1	2.68178E1	1.70245E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00151E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80011E1	-1.43051E-4	-8.80005E1	9.53674E-5	5.65052E-3	9.35316E-2	2.73088E1	-3.26646E1	-3.26095E1	2.68328E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.2E1	3.58E2	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80008E1	0.0E0	-8.80003E1	-1.19209E-4	5.62668E-3	9.35316E-2	2.73189E1	-3.26651E1	-3.2617E1	2.67992E1	1.69881E-7	2.52362E-3	2.52362E-3	6.29067E-3	1.99577E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80012E1	7.15256E-5	-8.80002E1	7.15256E-5	6.07967E-3	9.34839E-2	2.73399E1	-3.26661E1	-3.2639E1	2.67989E1	1.69581E-7	2.52492E-3	2.52492E-3	6.33436E-3	1.97984E-1
1.4E1	6.29E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80011E1	-2.6226E-4	-8.80003E1	-9.53674E-5	6.00815E-3	9.36985E-2	2.7297E1	-3.26961E1	-3.2666E1	2.6781E1	1.69875E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98764E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.8001E1	-4.76837E-5	-8.80003E1	2.38419E-5	6.1512E-3	9.34362E-2	2.72854E1	-3.26642E1	-3.26088E1	2.68024E1	1.69794E-7	2.51287E-3	2.51287E-3	6.29157E-3	1.98395E-1
1.6E1	3.147E3	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80009E1	-1.43051E-4	-8.80005E1	2.38419E-5	5.6982E-3	9.33886E-2	2.73287E1	-3.26555E1	-3.26254E1	2.68001E1	1.69737E-7	2.5199E-3	2.5199E-3	6.31321E-3	1.9965E-1
1.7E1	3.6641E4	2.1E1	6.87E2	4.7E2	-7.34782E-2	-8.80011E1	-1.90735E-4	-8.80006E1	1.43051E-4	5.72205E-3	9.34839E-2	2.72915E1	-3.26797E1	-3.26537E1	2.67842E1	1.69798E-7	2.5131E-3	2.5131E-3	6.33977E-3	1.98661E-1
1.8E1	1.55532E5	1.04E2	7.27E2	5.0E2	-7.27828E-2	-8.80013E1	-3.8147E-4	-8.80007E1	1.66893E-4	5.91278E-3	9.36508E-2	2.73375E1	-3.26676E1	-3.25893E1	2.68004E1	1.6987E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.9951E-1
1.9E1	3.316E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80011E1	-2.86102E-4	-8.80004E1	4.76837E-5	6.03199E-3	9.3174E-2	2.72973E1	-3.26639E1	-3.2617E1	2.6813E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31014E-3	1.99024E-1
2.0E1	2.91E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80012E1	-1.90735E-4	-8.80004E1	9.53674E-5	5.76973E-3	9.34362E-2	2.73171E1	-3.26711E1	-3.26404E1	2.68136E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80012E1	-7.15256E-5	-8.80002E1	-1.19209E-4	5.6982E-3	9.3174E-2	2.72856E1	-3.26455E1	-3.26219E1	2.67644E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98937E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80012E1	-7.15256E-5	-8.80006E1	-9.53674E-5	5.48363E-3	9.36031E-2	2.73398E1	-3.26994E1	-3.26454E1	2.68116E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.97815E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80021E1	-1.43051E-4	-8.80005E1	-7.15256E-5	5.72205E-3	9.31978E-2	2.73157E1	-3.26709E1	-3.26503E1	2.68186E1	1.69936E-7	2.52131E-3	2.52131E-3	6.33919E-3	1.98229E-1