[Scan]
initial_time=2016-02-18T00:04:21
final_time=2016-02-18T00:04:40
ip_count=19
run=1032
dataset=12
scan=671
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.7728E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.12628E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.27699E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-1.81627E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.55808E-8
mult1=-1.02581E-8
mult2=-2.66671E-9
rf_tmon=-4.32617E-3
rf_agc=3.40726E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.63228E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54806E1
cs_ef1b_imon=3.07821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05183E1
cs_ea1_imon=2.17269E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04363E0
lens1_imon=1.58762E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.57099E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.73137E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.16207E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.26093E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93232E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.28003E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.19357E-8
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.63504E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=2.02722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8768E0
os_ea2_imon=-7.87326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11823E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.67701E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.54816E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.27164E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7352E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6774E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10592E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.90487E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-2.08612E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.59088E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64435E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=1.00647E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6659E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55945E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74073E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2272E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=1.99394E-1
chamber_ion_pmon=1.69936E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.28058E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5221E4	1.6E1	1.47E2	4.1E1	-7.36328E-2	-8.80011E1	1.66893E-4	-8.80005E1	4.29153E-4	5.50747E-3	9.31263E-2	2.7324E1	-3.26927E1	-3.26378E1	2.67972E1	1.69654E-7	2.50898E-3	2.50898E-3	6.32936E-3	1.9911E-1
2.0E0	5.383E3	2.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80012E1	2.6226E-4	-8.80002E1	3.57628E-4	5.38826E-3	9.34839E-2	2.72855E1	-3.26689E1	-3.26181E1	2.67882E1	1.69653E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.00021E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80009E1	1.19209E-4	-8.80004E1	2.6226E-4	5.72205E-3	9.33886E-2	2.72986E1	-3.26708E1	-3.26443E1	2.67833E1	1.69731E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80013E1	3.09944E-4	-8.80006E1	3.33786E-4	5.45979E-3	9.34601E-2	2.73033E1	-3.26661E1	-3.26172E1	2.67806E1	1.69581E-7	2.51182E-3	2.51182E-3	6.31798E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80012E1	7.15256E-5	-8.80008E1	4.76837E-5	5.38826E-3	9.33886E-2	2.73303E1	-3.26801E1	-3.26627E1	2.68076E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99456E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80011E1	-2.6226E-4	-8.80003E1	7.15256E-5	5.67436E-3	9.36508E-2	2.72871E1	-3.26759E1	-3.26368E1	2.68112E1	1.69725E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.97478E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.8001E1	1.19209E-4	-8.80003E1	-4.76837E-5	5.50747E-3	9.38892E-2	2.72811E1	-3.26909E1	-3.2617E1	2.68058E1	1.70031E-7	2.52473E-3	2.52473E-3	6.29067E-3	1.99224E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80013E1	-2.6226E-4	-8.80007E1	3.57628E-4	5.84126E-3	9.36985E-2	2.73273E1	-3.265E1	-3.26332E1	2.67956E1	1.69725E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.00192E-1
1.2E1	3.31E2	1.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80011E1	-1.90735E-4	-8.80005E1	4.05312E-4	5.98431E-3	9.35316E-2	2.73216E1	-3.26927E1	-3.26195E1	2.6777E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
1.3E1	3.0E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80013E1	0.0E0	-8.80006E1	-1.66893E-4	5.8651E-3	9.33647E-2	2.72837E1	-3.26444E1	-3.26364E1	2.68358E1	1.69875E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00847E-1
1.4E1	6.6E2	1.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80011E1	-9.53674E-5	-8.80005E1	2.14577E-4	6.1512E-3	9.3174E-2	2.72931E1	-3.26512E1	-3.26621E1	2.67752E1	1.69728E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.00847E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80011E1	-7.15256E-5	-8.80006E1	2.86102E-4	6.12736E-3	9.33409E-2	2.73139E1	-3.26927E1	-3.26207E1	2.68041E1	1.69654E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00673E-1
1.6E1	3.007E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.8001E1	-1.43051E-4	-8.80007E1	-2.38419E-4	5.88894E-3	9.34839E-2	2.73287E1	-3.26773E1	-3.26166E1	2.6807E1	1.69725E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9934E-1
1.7E1	3.6055E4	1.8E1	6.87E2	4.7E2	-7.286E-2	-8.80011E1	4.76837E-5	-8.8E1	4.76837E-5	6.00815E-3	9.34601E-2	2.73448E1	-3.26573E1	-3.26206E1	2.67956E1	1.69728E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.00499E-1
1.8E1	1.56038E5	6.9E1	7.27E2	5.0E2	-7.24736E-2	-8.80011E1	-3.33786E-4	-8.80006E1	-2.38419E-5	5.93662E-3	9.32932E-2	2.72937E1	-3.26765E1	-3.26494E1	2.68034E1	1.69943E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1
1.9E1	3.557E3	2.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80011E1	-1.90735E-4	-8.80006E1	7.15256E-5	6.05583E-3	9.33647E-2	2.72921E1	-3.26915E1	-3.2639E1	2.6792E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99803E-1
2.0E1	3.53E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80012E1	-4.76837E-5	-8.80007E1	3.8147E-4	5.74589E-3	9.36747E-2	2.73121E1	-3.26624E1	-3.26135E1	2.67998E1	1.69728E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80013E1	-2.38419E-5	-8.80004E1	9.53674E-5	5.57899E-3	9.36985E-2	2.73198E1	-3.26615E1	-3.27105E1	2.68016E1	1.69642E-7	2.51929E-3	2.51929E-3	6.3074E-3	1.98948E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80012E1	1.66893E-4	-8.80005E1	4.05312E-4	5.62668E-3	9.36031E-2	2.73637E1	-3.26972E1	-3.26084E1	2.67885E1	1.69802E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98075E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80008E1	1.19209E-4	-8.80009E1	2.38419E-4	5.65052E-3	9.34601E-2	2.7352E1	-3.26687E1	-3.26008E1	2.6774E1	1.69936E-7	2.52342E-3	2.52342E-3	6.29157E-3	1.99394E-1