[Scan]
initial_time=2016-02-18T00:04:47
final_time=2016-02-18T00:05:07
ip_count=19
run=1032
dataset=12
scan=672
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77979E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.4168E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.30048E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.80006E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.55471E-8
mult1=-9.22746E-9
mult2=-2.6919E-9
rf_tmon=-5.32354E-3
rf_agc=3.19818E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.48756E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61713E0
bslens_imon=2.55635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19778E1
lens5a_imon=1.96209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53256E1
cs_ef1b_imon=3.07574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02148E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05183E1
cs_ea1_imon=2.18129E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02227E0
lens1_imon=1.34163E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.98233E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04008E1
cs_ea2_imon=1.5895E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84271E1
cs_ef1a_imon=3.01269E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.73234E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1135E1
os_restr1_imon=4.27884E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15209E1
os_ea1_imon=2.18713E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63538E1
os_ef1bup_imon=3.0808E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26767E0
cs_ionrep_imon=1.27881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.27386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.20101E-8
tplens_vset=1.4E-1
tplens_vmon=1.59796E0
tplens_imon=-2.70218E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.50579E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.62646E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2787E0
ionrepsh_imon=2.01543E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.19024E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74586E1
cs_ef2b_imon=3.1135E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88023E0
os_ea2_imon=-8.50327E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71212E1
cs_ef2a_imon=3.18434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10516E0
os_ef2alow_imon=-2.70066E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65323E-1
os_ef2bup_imon=-5.39802E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.5432E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01633E1
cs_anode2_imon=2.27393E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.10322E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.09223E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.10479E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=9.89166E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-2.15574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47199E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56042E1
einzel_imon=7.55939E-6
window_vset=0.0E0
window_vmon=1.54946E-1
window_imon=-1.06591E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.38991E-4
mask2_vset=0.0E0
mask2_vmon=-1.85968E1
mask2_imon=-6.2997E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.15829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.84683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.40357E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53017E0
defgridb_imon=6.19274E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.58703E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06817E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64535E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=1.00558E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62339E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66472E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68988E-2
os_fil2_imon=-2.72363E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90819E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53305E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37203E-1
cs_fil2_imon=-2.50307E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80525E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.55494E-1
res40_imon=-2.66174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5207E4	1.0E1	1.47E2	4.1E1	-7.20871E-2	-8.80009E1	-2.38419E-5	-8.80004E1	1.19209E-4	5.91278E-3	9.34362E-2	2.72945E1	-3.26856E1	-3.26449E1	2.68238E1	1.69893E-7	2.52106E-3	2.52106E-3	6.3074E-3	1.97822E-1
2.0E0	5.344E3	6.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80011E1	2.38419E-4	-8.80002E1	2.38419E-4	6.03199E-3	9.33886E-2	2.7318E1	-3.26768E1	-3.26364E1	2.67914E1	1.69654E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.9911E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80013E1	1.19209E-4	-8.80004E1	1.90735E-4	5.55515E-3	9.35078E-2	2.73281E1	-3.26531E1	-3.26331E1	2.68007E1	1.69881E-7	2.52473E-3	2.52473E-3	6.32418E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.8001E1	1.19209E-4	-8.80007E1	2.38419E-5	5.62668E-3	9.37939E-2	2.72918E1	-3.26706E1	-3.26272E1	2.68028E1	1.69794E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.00903E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80009E1	7.15256E-5	-8.80005E1	0.0E0	5.62668E-3	9.34124E-2	2.73063E1	-3.26627E1	-3.26506E1	2.6803E1	1.69943E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.01047E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80011E1	-1.43051E-4	-8.80004E1	2.38419E-4	5.76973E-3	9.35078E-2	2.73369E1	-3.26597E1	-3.26314E1	2.68016E1	1.69581E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.80008E1	-1.90735E-4	-8.80005E1	2.38419E-4	5.79357E-3	9.36031E-2	2.72903E1	-3.26549E1	-3.26272E1	2.67992E1	1.69943E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80013E1	-3.57628E-4	-8.80004E1	4.05312E-4	5.36442E-3	9.32693E-2	2.72916E1	-3.26658E1	-3.26462E1	2.6816E1	1.69654E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00499E-1
1.2E1	3.52E2	1.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80013E1	-2.86102E-4	-8.80006E1	9.53674E-5	5.76973E-3	9.32932E-2	2.73075E1	-3.26673E1	-3.26313E1	2.68256E1	1.69949E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98764E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80012E1	-4.29153E-4	-8.80007E1	2.38419E-5	5.74589E-3	9.35316E-2	2.734E1	-3.26646E1	-3.26046E1	2.67974E1	1.69654E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00499E-1
1.4E1	6.36E2	1.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80013E1	-1.66893E-4	-8.80003E1	1.90735E-4	5.55515E-3	9.33647E-2	2.73155E1	-3.26585E1	-3.25982E1	2.68163E1	1.70023E-7	2.51771E-3	2.51771E-3	6.28552E-3	1.99456E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80016E1	-2.6226E-4	-8.80007E1	1.19209E-4	5.67436E-3	9.35078E-2	2.73138E1	-3.26822E1	-3.26385E1	2.68107E1	1.69723E-7	2.51919E-3	2.51919E-3	6.29157E-3	1.98894E-1
1.6E1	3.16E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	1.66893E-4	-8.80009E1	1.66893E-4	6.27041E-3	9.35316E-2	2.73016E1	-3.26826E1	-3.26455E1	2.68148E1	1.69657E-7	2.51838E-3	2.51838E-3	6.3074E-3	1.99883E-1
1.7E1	3.6051E4	2.1E1	6.87E2	4.7E2	-7.36328E-2	-8.80018E1	-3.8147E-4	-8.80008E1	3.33786E-4	5.53131E-3	9.34839E-2	2.73183E1	-3.26567E1	-3.26326E1	2.67962E1	1.69654E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99803E-1
1.8E1	1.54473E5	1.22E2	7.27E2	5.0E2	-7.18554E-2	-8.80017E1	4.76837E-5	-8.80008E1	2.86102E-4	5.50747E-3	9.33886E-2	2.72865E1	-3.26585E1	-3.26573E1	2.68154E1	1.69725E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00705E-1
1.9E1	3.471E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80012E1	0.0E0	-8.80007E1	1.43051E-4	5.45979E-3	9.35555E-2	2.73021E1	-3.26681E1	-3.26338E1	2.67992E1	1.69654E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00151E-1
2.0E1	3.09E2	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.8001E1	2.14577E-4	-8.80005E1	7.15256E-5	5.72205E-3	9.34124E-2	2.73177E1	-3.26843E1	-3.26188E1	2.67842E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80012E1	-4.76837E-5	-8.80004E1	1.90735E-4	5.62668E-3	9.34601E-2	2.73387E1	-3.26689E1	-3.26046E1	2.67914E1	1.69654E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9963E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80014E1	-5.00679E-4	-8.80006E1	3.33786E-4	5.57899E-3	9.35078E-2	2.73123E1	-3.26843E1	-3.26927E1	2.67752E1	1.69725E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.98491E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80012E1	-2.86102E-4	-8.80001E1	3.09944E-4	5.67436E-3	9.35793E-2	2.73216E1	-3.26933E1	-3.26178E1	2.681E1	1.69653E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9985E-1