[Scan]
initial_time=2016-02-18T00:07:00
final_time=2016-02-18T00:07:20
ip_count=19
run=1032
dataset=12
scan=677
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.78065E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.31082E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.23405E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.72731E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.55823E-8
mult1=-1.07518E-8
mult2=-2.76253E-9
rf_tmon=-3.56913E-3
rf_agc=3.39765E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.62429E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20267E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52805E1
cs_ef1b_imon=3.04613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.16738E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02416E0
lens1_imon=1.75043E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04186E1
cs_ea2_imon=1.55577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.01225E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.73285E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.17764E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=3.30165E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=4.2026E-8
tplens_vset=1.4E-1
tplens_vmon=1.58893E0
tplens_imon=-4.0153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26687E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98466E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.54301E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=2.01589E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86442E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00768E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.665E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.55105E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.28822E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73514E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.06575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10537E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.89561E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08089E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.4418E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46166E0
defgridb_imon=6.32689E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.59112E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=1.00603E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6681E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6101E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91158E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.6619E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5001E4	1.6E1	1.47E2	4.1E1	-7.24736E-2	-8.80013E1	-2.14577E-4	-8.80006E1	2.6226E-4	5.60284E-3	9.32932E-2	2.73015E1	-3.26482E1	-3.26326E1	2.67812E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.97984E-1
2.0E0	5.493E3	9.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80009E1	-3.57628E-4	-8.80009E1	2.6226E-4	5.72205E-3	9.34601E-2	2.72788E1	-3.2648E1	-3.2656E1	2.67938E1	1.69802E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98764E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80013E1	-3.57628E-4	-8.80009E1	1.19209E-4	5.57899E-3	9.37223E-2	2.73257E1	-3.26732E1	-3.26384E1	2.6853E1	1.69656E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.9852E-1
4.0E0	1.0E0	1.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80009E1	-2.14577E-4	-8.80007E1	7.15256E-5	5.57899E-3	9.36508E-2	2.73297E1	-3.26909E1	-3.26278E1	2.68663E1	1.69798E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80012E1	-7.15256E-5	-8.80005E1	3.33786E-4	5.72205E-3	9.35078E-2	2.73181E1	-3.27003E1	-3.25942E1	2.6843E1	1.69763E-7	2.51593E-3	2.51593E-3	6.31283E-3	1.99827E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80013E1	0.0E0	-8.80004E1	-2.38419E-5	5.96046E-3	9.34362E-2	2.72877E1	-3.26855E1	-3.26014E1	2.67896E1					
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80013E1	4.76837E-5	-8.80004E1	0.0E0	5.53131E-3	9.34362E-2	2.72903E1	-3.2675E1	-3.26178E1	2.6777E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80015E1	-2.14577E-4	-8.80006E1	1.90735E-4	5.43594E-3	9.31978E-2	2.73124E1	-3.26609E1	-3.26303E1	2.68244E1	1.69581E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.98491E-1
1.2E1	3.5E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.8001E1	-4.05312E-4	-8.80007E1	1.43051E-4	5.53131E-3	9.35555E-2	2.72955E1	-3.26915E1	-3.25876E1	2.68142E1	1.69656E-7	2.52139E-3	2.52139E-3	6.3074E-3	1.97994E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80012E1	-1.90735E-4	-8.80008E1	0.0E0	5.45979E-3	9.35555E-2	2.73004E1	-3.26561E1	-3.26419E1	2.6804E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98937E-1
1.4E1	6.44E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80012E1	-2.38419E-5	-8.80008E1	-1.43051E-4	5.07832E-3	9.377E-2	2.72835E1	-3.26585E1	-3.26627E1	2.68028E1	1.69798E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00363E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80016E1	-2.14577E-4	-8.80003E1	1.19209E-4	5.26905E-3	9.33409E-2	2.72781E1	-3.26777E1	-3.26248E1	2.68046E1	1.69802E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99977E-1
1.6E1	3.045E3	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80012E1	-1.43051E-4	-8.80004E1	2.38419E-5	4.93526E-3	9.33886E-2	2.73399E1	-3.26585E1	-3.2641E1	2.6819E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01022E-1
1.7E1	3.5853E4	1.4E1	6.87E2	4.7E2	-7.10825E-2	-8.80013E1	-1.43051E-4	-8.80008E1	-1.19209E-4	5.29289E-3	9.34362E-2	2.73234E1	-3.26579E1	-3.26461E1	2.67978E1	1.69581E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
1.8E1	1.54666E5	9.9E1	7.27E2	5.0E2	-7.16233E-2	-8.80014E1	-9.53674E-5	-8.80007E1	-9.53674E-5	4.93526E-3	9.34124E-2	2.72438E1	-3.26849E1	-3.26512E1	2.68214E1	1.69798E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9985E-1
1.9E1	3.542E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80014E1	-4.05312E-4	-8.80005E1	1.19209E-4	5.48363E-3	9.34124E-2	2.73357E1	-3.26729E1	-3.2629E1	2.6796E1	1.69654E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98592E-1
2.0E1	3.3E2	2.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80014E1	-3.09944E-4	-8.80004E1	-9.53674E-5	5.65052E-3	9.34839E-2	2.72931E1	-3.26723E1	-3.26062E1	2.68076E1	1.69731E-7	2.52027E-3	2.52027E-3	6.29624E-3	1.98696E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80016E1	-6.19888E-4	-8.80006E1	-1.19209E-4	5.53131E-3	9.32455E-2	2.73169E1	-3.26431E1	-3.26467E1	2.67674E1	1.69725E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9985E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80015E1	-5.48363E-4	-8.80005E1	2.86102E-4	5.17368E-3	9.31025E-2	2.74048E1	-3.26771E1	-3.25473E1	2.6789E1	1.69581E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.9985E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80016E1	-4.29153E-4	-8.80005E1	-2.38419E-5	5.126E-3	9.35078E-2	2.73514E1	-3.26621E1	-3.26687E1	2.68034E1	1.69728E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99977E-1