[Scan]
initial_time=2016-02-18T00:07:54
final_time=2016-02-18T00:08:13
ip_count=19
run=1032
dataset=12
scan=679
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.77597E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.75619E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.28114E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.80454E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.56082E-8
mult1=-9.55978E-9
mult2=-2.64675E-9
rf_tmon=-4.19399E-3
rf_agc=3.34477E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.6845E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68745E0
bslens_imon=2.6813E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.06739E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.18578E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.53807E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.56249E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.01802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.73221E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.17481E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=1.25704E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=3.27246E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=4.20508E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-4.36924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.41784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24797E0
ionrepsh_imon=2.02509E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33905E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74363E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86972E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10682E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70104E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.53807E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.32052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.27632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.12183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6794E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10875E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=9.90665E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-2.10053E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56027E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.85864E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.88965E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.37455E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30221E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.60122E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64505E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=1.00685E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61873E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67342E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.79714E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.96638E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7582E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5236E4	1.7E1	1.47E2	4.1E1	-7.44059E-2	-8.80013E1	-2.86102E-4	-8.80003E1	-2.38419E-5	5.48363E-3	9.32932E-2	2.73116E1	-3.26561E1	-3.26172E1	2.68065E1	1.69728E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.97559E-1
2.0E0	5.4E3	6.0E0	3.16E2	1.6E2	-7.286E-2	-8.80018E1	-1.90735E-4	-8.80005E1	-2.38419E-5	5.74589E-3	9.33409E-2	2.72959E1	-3.2645E1	-3.26309E1	2.67845E1	1.69725E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.98153E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80015E1	-3.33786E-4	-8.80003E1	-2.38419E-5	5.62668E-3	9.32455E-2	2.72964E1	-3.26614E1	-3.26312E1	2.68007E1	1.69731E-7	2.52362E-3	2.52362E-3	6.29624E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80012E1	-4.52995E-4	-8.80004E1	-1.43051E-4	5.72205E-3	9.35793E-2	2.72817E1	-3.26579E1	-3.26512E1	2.68172E1	1.69652E-7	2.51498E-3	2.51498E-3	6.32328E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80011E1	-3.09944E-4	-8.80003E1	-2.38419E-4	5.8651E-3	9.33886E-2	2.72998E1	-3.26573E1	-3.26431E1	2.68256E1	1.69875E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80013E1	-4.29153E-4	-8.80003E1	2.38419E-5	5.81741E-3	9.34839E-2	2.73177E1	-3.26386E1	-3.26446E1	2.67986E1	1.69798E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.00876E-1
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80013E1	-2.6226E-4	-8.80004E1	1.43051E-4	5.6982E-3	9.34362E-2	2.73267E1	-3.26579E1	-3.26374E1	2.67986E1	1.69802E-7	2.52867E-3	2.52867E-3	6.29645E-3	1.99977E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80019E1	-6.19888E-4	-8.80007E1	2.38419E-5	6.00815E-3	9.35078E-2	2.73163E1	-3.26762E1	-3.26384E1	2.6801E1	1.69654E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99283E-1
1.2E1	3.3E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80015E1	-2.14577E-4	-8.80004E1	-2.38419E-5	6.22272E-3	9.34124E-2	2.73081E1	-3.26332E1	-3.2623E1	2.68076E1	1.69581E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.98491E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80016E1	-3.8147E-4	-8.80004E1	7.15256E-5	6.29425E-3	9.33409E-2	2.73189E1	-3.26933E1	-3.26621E1	2.68088E1	1.69875E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.97731E-1
1.4E1	6.28E2	1.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80016E1	-4.29153E-4	-8.80004E1	-2.38419E-5	5.8651E-3	9.36985E-2	2.73057E1	-3.26512E1	-3.25978E1	2.67938E1	1.70023E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.97216E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80015E1	-3.8147E-4	-8.80004E1	2.38419E-4	5.84126E-3	9.33409E-2	2.73045E1	-3.26719E1	-3.26529E1	2.6795E1	1.69875E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.97388E-1
1.6E1	3.173E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80015E1	-6.4373E-4	-8.80001E1	9.53674E-5	5.62668E-3	9.34839E-2	2.73305E1	-3.26803E1	-3.26018E1	2.67902E1	1.69881E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.98696E-1
1.7E1	3.6E4	2.4E1	6.87E2	4.7E2	-7.32464E-2	-8.80013E1	-2.38419E-5	-8.80003E1	7.15256E-5	5.67436E-3	9.33409E-2	2.73081E1	-3.26518E1	-3.26488E1	2.6795E1	1.69798E-7	2.51954E-3	2.51954E-3	6.28056E-3	1.9951E-1
1.8E1	1.55033E5	9.5E1	7.27E2	5.0E2	-7.27828E-2	-8.80014E1	-3.57628E-4	-8.80001E1	-4.76837E-5	5.91278E-3	9.36985E-2	2.73387E1	-3.26855E1	-3.26002E1	2.6822E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.01197E-1
1.9E1	3.519E3	3.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80013E1	-2.6226E-4	-8.8E1	7.15256E-5	5.55515E-3	9.36031E-2	2.72805E1	-3.26771E1	-3.26086E1	2.6804E1	1.69728E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99977E-1
2.0E1	3.14E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80015E1	-3.09944E-4	-8.79999E1	-2.38419E-5	5.60284E-3	9.32455E-2	2.73016E1	-3.26602E1	-3.26208E1	2.68059E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80013E1	-1.43051E-4	-8.79998E1	9.53674E-5	5.79357E-3	9.35793E-2	2.73237E1	-3.26789E1	-3.26344E1	2.68094E1	1.69936E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99729E-1
2.2E1	3.5E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80013E1	-4.76837E-5	-8.79998E1	2.38419E-5	5.45979E-3	9.34839E-2	2.74201E1	-3.28142E1	-3.25546E1	2.68011E1	1.69728E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.96361E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80008E1	-4.29153E-4	-8.80002E1	-9.53674E-5	5.31673E-3	9.32693E-2	2.73093E1	-3.26759E1	-3.26362E1	2.6794E1	1.6987E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.96638E-1