[Scan]
initial_time=2016-02-18T00:09:14
final_time=2016-02-18T00:09:33
ip_count=19
run=1032
dataset=12
scan=682
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.73216E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.1481E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.3032E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.75811E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.55407E-8
mult1=-1.0523E-8
mult2=-2.78847E-9
rf_tmon=-5.34156E-3
rf_agc=3.41807E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=5.69487E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=1.96793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54878E1
cs_ef1b_imon=3.0919E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05264E1
cs_ea1_imon=2.18206E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01853E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.5667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.73354E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15017E1
os_ea1_imon=2.17197E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.25884E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.28147E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=4.19803E-8
tplens_vset=1.4E-1
tplens_vmon=1.59637E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.55398E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=2.0321E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33285E1
lens5b_imon=2.17594E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.10992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86434E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06171E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.56289E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.53627E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.27524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.08291E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10849E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.9054E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56093E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=1.47666E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86056E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.64237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.50681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.58404E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00668E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6212E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66531E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85445E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89381E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.07946E-1
res40_imon=-2.78529E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5076E4	2.2E1	1.47E2	4.1E1	-7.21643E-2	-8.80016E1	-3.09944E-4	-8.80007E1	3.33786E-4	5.45979E-3	9.3627E-2	2.73092E1	-3.26756E1	-3.26313E1	2.6792E1	1.69656E-7	2.51915E-3	2.51915E-3	6.35223E-3	1.97294E-1
2.0E0	5.293E3	3.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80014E1	-3.57628E-4	-8.80006E1	1.19209E-4	5.45979E-3	9.37223E-2	2.73216E1	-3.26566E1	-3.26389E1	2.68094E1	1.69802E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.98592E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80014E1	-1.19209E-4	-8.80005E1	-1.66893E-4	5.43594E-3	9.36508E-2	2.72774E1	-3.26756E1	-3.26402E1	2.68036E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80014E1	-4.29153E-4	-8.80007E1	-3.09944E-4	5.60284E-3	9.36985E-2	2.73051E1	-3.26531E1	-3.26384E1	2.68082E1	1.69652E-7	2.51709E-3	2.51709E-3	6.33919E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80013E1	-5.24521E-4	-8.80008E1	-1.66893E-4	5.6982E-3	9.36985E-2	2.73544E1	-3.26939E1	-3.2602E1	2.67734E1	1.69654E-7	2.52209E-3	2.52209E-3	6.34588E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80014E1	-6.19888E-4	-8.80009E1	-2.38419E-5	5.79357E-3	9.3627E-2	2.73305E1	-3.2636E1	-3.26307E1	2.68221E1	1.69802E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80013E1	-2.86102E-4	-8.80007E1	7.15256E-5	5.88894E-3	9.37939E-2	2.72925E1	-3.2644E1	-3.26627E1	2.67962E1	1.69943E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80015E1	-3.8147E-4	-8.80007E1	1.19209E-4	5.84126E-3	9.37223E-2	2.73267E1	-3.26741E1	-3.25924E1	2.67926E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9917E-1
1.2E1	3.81E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80016E1	-3.33786E-4	-8.80001E1	3.09944E-4	5.84126E-3	9.36985E-2	2.73195E1	-3.26308E1	-3.26272E1	2.68154E1	1.69731E-7	2.51693E-3	2.51693E-3	6.29067E-3	1.98696E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80013E1	-1.66893E-4	-8.80004E1	3.09944E-4	5.65052E-3	9.34839E-2	2.73393E1	-3.26915E1	-3.26386E1	2.68052E1	1.69875E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00151E-1
1.4E1	6.93E2	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80013E1	7.15256E-5	-8.80004E1	2.38419E-4	5.45979E-3	9.3627E-2	2.73193E1	-3.2695E1	-3.25676E1	2.67812E1	1.69653E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9934E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80016E1	-2.38419E-4	-8.80004E1	3.57628E-4	5.60284E-3	9.35316E-2	2.73345E1	-3.26707E1	-3.26334E1	2.67926E1	1.69802E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.99456E-1
1.6E1	3.176E3	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80014E1	-3.57628E-4	-8.80007E1	-1.66893E-4	5.60284E-3	9.35316E-2	2.73219E1	-3.26573E1	-3.2629E1	2.68022E1	1.69581E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98764E-1
1.7E1	3.6211E4	1.3E1	6.87E2	4.7E2	-7.22418E-2	-8.80016E1	-3.09944E-4	-8.80002E1	2.38419E-5	6.03199E-3	9.35555E-2	2.73346E1	-3.26667E1	-3.26585E1	2.6795E1	1.69875E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99283E-1
1.8E1	1.5576E5	8.5E1	7.27E2	5.0E2	-7.286E-2	-8.80015E1	-2.86102E-4	-8.80006E1	-2.38419E-5	5.67436E-3	9.38177E-2	2.73009E1	-3.26891E1	-3.25876E1	2.6789E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99283E-1
1.9E1	3.457E3	3.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80015E1	-5.00679E-4	-8.80008E1	1.43051E-4	5.72205E-3	9.36031E-2	2.73309E1	-3.26482E1	-3.26236E1	2.68028E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.97903E-1
2.0E1	3.41E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80014E1	-4.29153E-4	-8.80007E1	1.66893E-4	5.24521E-3	9.3317E-2	2.73261E1	-3.26717E1	-3.26284E1	2.68016E1	1.69875E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80014E1	-2.6226E-4	-8.80002E1	3.33786E-4	5.43594E-3	9.32455E-2	2.73334E1	-3.26366E1	-3.26296E1	2.6792E1	1.70023E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99283E-1
2.2E1	4.4E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80015E1	-2.6226E-4	-8.80001E1	1.19209E-4	5.84126E-3	9.37223E-2	2.72486E1	-3.26681E1	-3.2769E1	2.6804E1	1.69652E-7	2.52236E-3	2.52236E-3	6.32858E-3	1.99729E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80013E1	-2.14577E-4	-8.80004E1	2.86102E-4	5.74589E-3	9.37462E-2	2.73177E1	-3.26687E1	-3.262E1	2.68064E1	1.69875E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.99283E-1