[Scan]
initial_time=2016-02-18T00:11:53
final_time=2016-02-18T00:12:13
ip_count=19
run=1032
dataset=12
scan=688
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.77209E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.12164E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.29923E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.79889E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.55682E-8
mult1=-1.06579E-8
mult2=-2.58803E-9
rf_tmon=-4.32661E-3
rf_agc=3.39816E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.88715E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5319E1
cs_ef1b_imon=3.07857E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=2.1741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05543E0
lens1_imon=1.60178E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.5455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.01405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.73449E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.17658E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=1.25492E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.27714E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=4.20026E-8
tplens_vset=1.4E-1
tplens_vmon=1.58893E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26101E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.54206E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=2.02226E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33947E1
lens5b_imon=2.20206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87444E0
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71486E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10982E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.79714E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.53807E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.2774E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10809E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=9.9081E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-2.20144E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.6028E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.8593E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.41702E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.28087E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.59395E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64406E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=1.00663E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61927E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66625E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76206E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76857E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22607E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50883E-1
res40_imon=-2.71681E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5116E4	1.3E1	1.47E2	4.1E1	-7.25507E-2	-8.80013E1	-4.52995E-4	-8.80002E1	4.05312E-4	5.48363E-3	9.31263E-2	2.73009E1	-3.26524E1	-3.26687E1	2.67986E1	1.69654E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9911E-1
2.0E0	5.325E3	7.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80014E1	-3.57628E-4	-8.80003E1	4.76837E-5	5.36442E-3	9.35793E-2	2.72919E1	-3.26717E1	-3.26392E1	2.68208E1	1.6987E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.98491E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80021E1	-3.09944E-4	-8.8E1	1.43051E-4	5.65052E-3	9.35078E-2	2.73175E1	-3.26526E1	-3.26354E1	2.67966E1	1.69656E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80018E1	-1.43051E-4	-8.80003E1	1.43051E-4	5.79357E-3	9.3627E-2	2.73063E1	-3.26518E1	-3.26488E1	2.68088E1	1.69581E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80016E1	-4.05312E-4	-8.80002E1	0.0E0	5.48363E-3	9.3627E-2	2.73322E1	-3.26685E1	-3.26437E1	2.6789E1	1.69728E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80015E1	-4.05312E-4	-8.80004E1	2.6226E-4	5.48363E-3	9.34601E-2	2.73547E1	-3.26285E1	-3.26487E1	2.67812E1	1.69728E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80018E1	-1.90735E-4	-8.80006E1	1.19209E-4	5.60284E-3	9.34601E-2	2.72799E1	-3.26627E1	-3.2614E1	2.68082E1	1.69802E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00673E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80014E1	-2.6226E-4	-8.80006E1	9.53674E-5	5.48363E-3	9.34362E-2	2.72968E1	-3.26732E1	-3.2636E1	2.68112E1	1.69728E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.2E1	3.64E2	1.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80022E1	-2.38419E-4	-8.80004E1	1.43051E-4	5.96046E-3	9.35555E-2	2.73027E1	-3.26854E1	-3.26187E1	2.68034E1	1.69581E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.99E-1
1.3E1	2.5E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80015E1	-1.19209E-4	-8.80002E1	-7.15256E-5	5.60284E-3	9.36508E-2	2.73033E1	-3.26874E1	-3.26178E1	2.67806E1	1.69656E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99401E-1
1.4E1	6.04E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80016E1	-4.29153E-4	-8.80004E1	2.14577E-4	5.53131E-3	9.32217E-2	2.72582E1	-3.26074E1	-3.26879E1	2.68094E1	1.69725E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.99E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80017E1	-3.57628E-4	-8.80002E1	-1.43051E-4	5.4121E-3	9.36747E-2	2.73129E1	-3.27191E1	-3.26026E1	2.67896E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98764E-1
1.6E1	3.051E3	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80018E1	-4.05312E-4	-8.80004E1	-1.19209E-4	5.60284E-3	9.34124E-2	2.72955E1	-3.26903E1	-3.26302E1	2.6807E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
1.7E1	3.6286E4	2.5E1	6.87E2	4.7E2	-7.36328E-2	-8.8002E1	-5.96046E-4	-8.80004E1	4.76837E-5	5.43594E-3	9.34124E-2	2.73455E1	-3.26933E1	-3.26395E1	2.68136E1	1.69728E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00847E-1
1.8E1	1.56072E5	6.7E1	7.27E2	5.0E2	-7.30146E-2	-8.80018E1	-3.57628E-4	-8.80003E1	9.53674E-5	5.74589E-3	9.34362E-2	2.73653E1	-3.27074E1	-3.25995E1	2.67812E1	1.69956E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.0064E-1
1.9E1	3.439E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80016E1	-5.48363E-4	-8.80004E1	4.76837E-5	5.48363E-3	9.30309E-2	2.73193E1	-3.26461E1	-3.26561E1	2.67984E1	1.70023E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.01197E-1
2.0E1	3.14E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80019E1	-5.24521E-4	-8.80001E1	3.33786E-4	5.65052E-3	9.33886E-2	2.73186E1	-3.26823E1	-3.26401E1	2.67957E1	1.69581E-7	2.52448E-3	2.52448E-3	6.31269E-3	1.99896E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80016E1	-7.15256E-4	-8.80001E1	2.14577E-4	5.55515E-3	9.31978E-2	2.72919E1	-3.26639E1	-3.26585E1	2.6803E1	1.69881E-7	2.51248E-3	2.51248E-3	6.32418E-3	1.99401E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80018E1	-3.57628E-4	-8.8E1	7.15256E-5	5.72205E-3	9.34124E-2	2.73806E1	-3.26496E1	-3.26107E1	2.67842E1	1.69875E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00673E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80013E1	-4.52995E-4	-8.80003E1	4.76837E-5	5.60284E-3	9.35555E-2	2.73322E1	-3.26726E1	-3.26101E1	2.68028E1	1.69581E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00192E-1