[Scan]
initial_time=2016-02-18T00:13:13
final_time=2016-02-18T00:13:33
ip_count=19
run=1032
dataset=12
scan=691
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.77539E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.00612E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.28696E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.65642E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.56027E-8
mult1=-8.83734E-9
mult2=-2.8028E-9
rf_tmon=-4.58774E-3
rf_agc=3.37548E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.42164E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68503E0
bslens_imon=2.76711E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98758E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05038E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55166E1
cs_ef1b_imon=3.07388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02275E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05392E1
cs_ea1_imon=2.17233E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02125E0
lens1_imon=1.57707E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04137E1
cs_ea2_imon=1.56115E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.01153E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.73371E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14828E1
os_ea1_imon=2.18555E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24047E0
cs_ionrep_imon=1.27649E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93295E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.28615E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=4.19957E-8
tplens_vset=1.4E-1
tplens_vmon=1.61817E0
tplens_imon=-2.00652E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26191E1
iondef3_imon=1.49981E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26938E1
iondef2_imon=1.57915E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.73387E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29373E0
ionrepsh_imon=2.039E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.18739E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87528E0
os_ea2_imon=-6.81811E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.00656E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10381E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70104E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.54672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.28209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.09027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.11153E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=9.92383E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.99962E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.86887E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.48048E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.47586E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.18297E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.59875E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07083E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=1.00649E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61945E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67437E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7296E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22584E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.2988E-1
res40_imon=-2.93665E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4854E4	1.3E1	1.47E2	4.1E1	-7.27828E-2	-8.80013E1	-8.10623E-4	-8.80004E1	-1.19209E-4	5.24521E-3	9.33886E-2	2.7301E1	-3.26467E1	-3.26608E1	2.6813E1	1.69806E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99931E-1
2.0E0	5.29E3	9.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80016E1	-6.91414E-4	-8.80003E1	-2.38419E-5	5.126E-3	9.34601E-2	2.73167E1	-3.26627E1	-3.2615E1	2.67968E1	1.69581E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00192E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80015E1	-9.05991E-4	-8.79999E1	3.57628E-4	5.07832E-3	9.34362E-2	2.7308E1	-3.26527E1	-3.26388E1	2.67986E1	1.69728E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.00325E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80015E1	-5.24521E-4	-8.80004E1	1.43051E-4	5.19753E-3	9.377E-2	2.73243E1	-3.26693E1	-3.26248E1	2.6831E1	1.6987E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-6.19888E-4	-8.80001E1	2.6226E-4	5.24521E-3	9.35555E-2	2.72757E1	-3.26717E1	-3.26603E1	2.67937E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80016E1	-4.52995E-4	-8.79999E1	3.09944E-4	5.65052E-3	9.35555E-2	2.72898E1	-3.26779E1	-3.26266E1	2.6819E1	1.69802E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80015E1	-5.72205E-4	-8.8E1	2.14577E-4	5.65052E-3	9.32693E-2	2.73021E1	-3.26861E1	-3.26524E1	2.68184E1	1.69581E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80014E1	-3.33786E-4	-8.80003E1	-1.19209E-4	5.34058E-3	9.33886E-2	2.72788E1	-3.26707E1	-3.26089E1	2.67547E1	1.69767E-7	2.51787E-3	2.51787E-3	6.3074E-3	1.99254E-1
1.2E1	3.35E2	1.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80015E1	-4.05312E-4	-8.80002E1	3.57628E-4	5.45979E-3	9.3317E-2	2.73381E1	-3.27086E1	-3.26301E1	2.68202E1					
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80016E1	-5.00679E-4	-8.80004E1	1.90735E-4	5.53131E-3	9.3317E-2	2.72913E1	-3.26741E1	-3.2623E1	2.67992E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1
1.4E1	6.14E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80015E1	-3.8147E-4	-8.80005E1	2.14577E-4	5.76973E-3	9.32932E-2	2.73045E1	-3.26104E1	-3.25852E1	2.67896E1	1.69581E-7	2.51116E-3	2.51116E-3	6.34588E-3	2.00151E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80015E1	-6.91414E-4	-8.80003E1	-4.76837E-5	5.48363E-3	9.34124E-2	2.73075E1	-3.26633E1	-3.26446E1	2.6807E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
1.6E1	3.075E3	2.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80018E1	-5.72205E-4	-8.80001E1	3.57628E-4	5.60284E-3	9.35793E-2	2.736E1	-3.26472E1	-3.2636E1	2.6819E1	1.69798E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9985E-1
1.7E1	3.6495E4	1.6E1	6.87E2	4.7E2	-7.286E-2	-8.80016E1	-5.24521E-4	-8.80005E1	1.19209E-4	5.60284E-3	9.33886E-2	2.73225E1	-3.26975E1	-3.2608E1	2.68046E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98764E-1
1.8E1	1.54635E5	8.7E1	7.27E2	5.0E2	-7.32464E-2	-8.80013E1	-4.29153E-4	-8.80004E1	1.90735E-4	5.55515E-3	9.33647E-2	2.73339E1	-3.26314E1	-3.26332E1	2.6804E1	1.69728E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98764E-1
1.9E1	3.574E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80012E1	-7.39098E-4	-8.80006E1	-2.38419E-5	5.93662E-3	9.31263E-2	2.73057E1	-3.26825E1	-3.26314E1	2.6768E1	1.69728E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00151E-1
2.0E1	3.31E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80012E1	-5.72205E-4	-8.80004E1	3.8147E-4	5.45979E-3	9.35078E-2	2.73087E1	-3.26585E1	-3.26476E1	2.67992E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80015E1	-7.62939E-4	-8.80005E1	1.66893E-4	5.84126E-3	9.3317E-2	2.73169E1	-3.26638E1	-3.26337E1	2.67914E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80015E1	-4.05312E-4	-8.80007E1	3.33786E-4	5.6982E-3	9.3174E-2	2.73092E1	-3.26744E1	-3.26313E1	2.68046E1	1.69653E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00705E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80018E1	-8.10623E-4	-8.80005E1	1.90735E-4	5.45979E-3	9.33886E-2	2.73092E1	-3.26938E1	-3.26191E1	2.68175E1	1.6987E-7	2.52599E-3	2.52599E-3	6.28056E-3	2.00021E-1