[Scan]
initial_time=2016-02-18T00:13:40
final_time=2016-02-18T00:13:59
ip_count=19
run=1032
dataset=12
scan=692
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.7999E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.10876E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.2987E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.77269E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.56296E-8
mult1=-8.64106E-9
mult2=-2.67718E-9
rf_tmon=-5.45821E-3
rf_agc=3.32365E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.54788E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62492E0
bslens_imon=2.80517E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20072E1
lens5a_imon=1.972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05249E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53488E1
cs_ef1b_imon=3.08574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04667E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.19251E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06015E0
lens1_imon=1.41419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65066E1
os_ef1alow_imon=2.96271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03572E1
cs_ea2_imon=1.59187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.02492E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.73361E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.25446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15848E1
os_ea1_imon=2.15251E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63548E1
os_ef1bup_imon=3.09164E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=1.28182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93063E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.27965E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.20267E-8
tplens_vset=1.4E-1
tplens_vmon=1.55118E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26132E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26817E1
iondef2_imon=1.59824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98318E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.46863E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2167E0
ionrepsh_imon=2.02261E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34053E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.11284E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.78242E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70985E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.1119E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.69632E-1
os_ef2bup_imon=-5.66061E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10614E1
os_restr2_imon=3.55177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.30936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73541E1
iondef1_imon=1.11334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.07773E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10772E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.90013E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07048E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02169E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56098E1
einzel_imon=7.61486E-6
window_vset=0.0E0
window_vmon=1.98572E-1
window_imon=-1.28526E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.85765E1
mask2_imon=-8.57807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.73203E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=7.00999E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=6.58172E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=5.90924E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.59043E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07711E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64435E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=1.00697E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61787E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.52146E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76857E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36394E-1
cs_fil2_imon=-2.69815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22605E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=1.98344E-1
chamber_ion_pmon=1.69731E-7
chamber_cvt_pmon=2.52362E-3
foreline_cvt_pmon=2.52362E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.41078E-1
res40_imon=-2.87693E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5015E4	2.0E1	1.47E2	4.1E1	-7.21643E-2	-8.80017E1	-6.4373E-4	-8.80001E1	1.66893E-4	5.72205E-3	9.36031E-2	2.73207E1	-3.26567E1	-3.26482E1	2.6837E1	1.69653E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00192E-1
2.0E0	5.553E3	6.0E0	3.16E2	1.6E2	-7.286E-2	-8.80016E1	-4.05312E-4	-8.8E1	9.53674E-5	5.60284E-3	9.33409E-2	2.73173E1	-3.26627E1	-3.26358E1	2.67795E1	1.69654E-7	2.52538E-3	2.52538E-3	6.28552E-3	1.9963E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80019E1	-4.52995E-4	-8.8E1	2.14577E-4	5.67436E-3	9.377E-2	2.73311E1	-3.26856E1	-3.26119E1	2.68041E1	1.70031E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80019E1	-9.05991E-4	-8.80001E1	2.38419E-5	5.93662E-3	9.36985E-2	2.73246E1	-3.26815E1	-3.26378E1	2.6789E1	1.69725E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.00363E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80018E1	-8.82149E-4	-8.80004E1	-2.38419E-5	5.43594E-3	9.33409E-2	2.72943E1	-3.26633E1	-3.2626E1	2.6801E1	1.69581E-7	2.52599E-3	2.52599E-3	6.3074E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80017E1	-5.24521E-4	-8.80003E1	-4.76837E-5	5.50747E-3	9.3627E-2	2.72823E1	-3.26939E1	-3.25635E1	2.68208E1	1.69728E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.99283E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80014E1	-4.29153E-4	-8.80001E1	7.15256E-5	5.36442E-3	9.33647E-2	2.72903E1	-3.27233E1	-3.2603E1	2.68123E1	1.69875E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80012E1	-7.15256E-5	-8.80001E1	-4.76837E-5	5.57899E-3	9.3627E-2	2.73271E1	-3.26897E1	-3.25779E1	2.68024E1	1.70088E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.9968E-1
1.2E1	3.5E2	1.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80012E1	-3.8147E-4	-8.80002E1	-1.19209E-4	5.34058E-3	9.34362E-2	2.73026E1	-3.26585E1	-3.26422E1	2.68288E1	1.69723E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.99227E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80014E1	-4.05312E-4	-8.80003E1	-4.76837E-5	5.31673E-3	9.3174E-2	2.73228E1	-3.26321E1	-3.26291E1	2.67783E1	1.69808E-7	2.52046E-3	2.52046E-3	6.30458E-3	1.99016E-1
1.4E1	6.48E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80014E1	-2.38419E-4	-8.80004E1	9.53674E-5	5.55515E-3	9.31501E-2	2.72945E1	-3.26065E1	-3.26142E1	2.67746E1					
1.5E1	1.1E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80014E1	-3.8147E-4	-8.80005E1	2.38419E-5	5.29289E-3	9.33886E-2	2.73081E1	-3.26651E1	-3.26176E1	2.68118E1	1.69798E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9968E-1
1.6E1	3.202E3	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80014E1	-4.05312E-4	-8.80001E1	2.38419E-5	5.22137E-3	9.35555E-2	2.73263E1	-3.26573E1	-3.26413E1	2.68046E1	1.69728E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98937E-1
1.7E1	3.6106E4	1.4E1	6.87E2	4.7E2	-7.3401E-2	-8.80017E1	-6.67572E-4	-8.80004E1	7.15256E-5	5.34058E-3	9.3627E-2	2.72653E1	-3.27674E1	-3.25219E1	2.6798E1	1.69728E-7	2.51935E-3	2.51935E-3	6.32112E-3	1.99283E-1
1.8E1	1.55796E5	9.0E1	7.27E2	5.0E2	-7.3401E-2	-8.80016E1	-5.00679E-4	-8.80002E1	9.53674E-5	5.62668E-3	9.33409E-2	2.72968E1	-3.26349E1	-3.26844E1	2.67788E1					
1.9E1	3.485E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80015E1	-6.19888E-4	-8.80001E1	-1.43051E-4	5.74589E-3	9.31978E-2	2.72939E1	-3.27005E1	-3.26027E1	2.67697E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00021E-1
2.0E1	3.3E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80016E1	-5.24521E-4	-8.80004E1	-2.38419E-5	5.60284E-3	9.33886E-2	2.72979E1	-3.26849E1	-3.25996E1	2.67884E1	1.69643E-7	2.51867E-3	2.51867E-3	6.30278E-3	1.98894E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80017E1	-4.29153E-4	-8.80004E1	1.66893E-4	5.57899E-3	9.32217E-2	2.72846E1	-3.26539E1	-3.26431E1	2.68048E1	1.69654E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98075E-1
2.2E1	3.6E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80015E1	-4.29153E-4	-8.80004E1	1.66893E-4	5.72205E-3	9.3317E-2	2.73259E1	-3.26854E1	-3.2648E1	2.68487E1	1.6979E-7	2.52301E-3	2.52301E-3	6.33341E-3	1.97812E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80017E1	-4.52995E-4	-8.80003E1	7.15256E-5	5.60284E-3	9.34124E-2	2.73541E1	-3.26817E1	-3.26132E1	2.6846E1	1.69731E-7	2.52362E-3	2.52362E-3	6.33538E-3	1.98344E-1