[Scan]
initial_time=2016-02-18T00:15:00
final_time=2016-02-18T00:15:19
ip_count=19
run=1032
dataset=12
scan=695
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.7694E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.56211E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.31557E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.64644E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.55378E-8
mult1=-9.69609E-9
mult2=-2.83175E-9
rf_tmon=-4.01963E-3
rf_agc=3.51648E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.34749E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.78748E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20314E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.531E1
cs_ef1b_imon=3.06235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05271E1
cs_ea1_imon=2.16101E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99644E0
lens1_imon=1.50621E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.55895E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84004E1
cs_ef1a_imon=3.02306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.73679E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=2.1872E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.26058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.28399E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=4.20319E-8
tplens_vset=1.4E-1
tplens_vmon=1.59011E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2645E1
iondef3_imon=1.48144E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.85189E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=2.02792E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74417E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.9004E0
os_ea2_imon=-5.785E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70921E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11583E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.67101E-1
os_ef2bup_imon=-5.50268E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.52726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.28858E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7291E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.11172E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=9.91138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08509E0
cs_ionaccel_imon=-2.17982E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55907E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.21035E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82589E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.39225E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.58968E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64428E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.0068E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63021E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.85217E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74453E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-3.17052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23563E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5338E4	1.2E1	1.47E2	4.1E1	-7.38649E-2	-8.80016E1	-7.15256E-4	-8.80004E1	2.38419E-4	5.6982E-3	9.32217E-2	2.73305E1	-3.26502E1	-3.2636E1	2.68178E1	1.69875E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98764E-1
2.0E0	5.214E3	5.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80017E1	-3.57628E-4	-8.80004E1	2.38419E-5	5.93662E-3	9.3174E-2	2.73302E1	-3.26358E1	-3.26291E1	2.67842E1	1.69725E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9985E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80015E1	-5.48363E-4	-8.80005E1	2.38419E-5	5.57899E-3	9.34601E-2	2.73142E1	-3.26596E1	-3.26613E1	2.68088E1	1.69656E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.98696E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80017E1	-5.00679E-4	-8.80005E1	2.38419E-5	5.60284E-3	9.34362E-2	2.73063E1	-3.26847E1	-3.26229E1	2.67861E1	1.69718E-7	2.51549E-3	2.51549E-3	6.31251E-3	1.97571E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.45602E-2	-8.80018E1	-4.76837E-4	-8.80007E1	4.29153E-4	5.53131E-3	9.34601E-2	2.7321E1	-3.27027E1	-3.26207E1	2.68285E1	1.69767E-7	2.51346E-3	2.51346E-3	6.31017E-3	1.98469E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80017E1	-5.72205E-4	-8.80002E1	1.66893E-4	5.65052E-3	9.32455E-2	2.72985E1	-3.26675E1	-3.26008E1	2.68058E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80016E1	-2.86102E-4	-8.80003E1	-9.53674E-5	5.6982E-3	9.31978E-2	2.73177E1	-3.26488E1	-3.26212E1	2.67914E1	1.69806E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99931E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.8002E1	-4.76837E-4	-8.80006E1	-4.76837E-5	5.81741E-3	9.3317E-2	2.73201E1	-3.2647E1	-3.27023E1	2.67992E1	1.69802E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00847E-1
1.2E1	3.43E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80018E1	-5.48363E-4	-8.80006E1	2.38419E-4	5.93662E-3	9.38177E-2	2.72823E1	-3.26843E1	-3.26224E1	2.68088E1	1.69728E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9911E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80018E1	-5.72205E-4	-8.80006E1	2.6226E-4	5.84126E-3	9.37462E-2	2.73327E1	-3.26561E1	-3.26212E1	2.68238E1	1.69725E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9917E-1
1.4E1	6.64E2	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80018E1	-6.4373E-4	-8.80005E1	2.14577E-4	5.84126E-3	9.37223E-2	2.72396E1	-3.26158E1	-3.27065E1	2.68088E1	1.69806E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.99048E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80018E1	-8.10623E-4	-8.80005E1	0.0E0	5.81741E-3	9.37939E-2	2.73171E1	-3.2653E1	-3.26326E1	2.67812E1	1.69725E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.9883E-1
1.6E1	3.115E3	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80017E1	-6.91414E-4	-8.80004E1	1.90735E-4	5.55515E-3	9.34124E-2	2.73263E1	-3.26691E1	-3.25971E1	2.67998E1	1.69731E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99048E-1
1.7E1	3.6167E4	1.7E1	6.87E2	4.7E2	-7.41738E-2	-8.8002E1	-7.39098E-4	-8.80002E1	1.19209E-4	5.60284E-3	9.32932E-2	2.72937E1	-3.26903E1	-3.26158E1	2.67824E1	1.69725E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00021E-1
1.8E1	1.5432E5	8.6E1	7.27E2	5.0E2	-7.32464E-2	-8.80019E1	-6.91414E-4	-8.80002E1	-2.6226E-4	5.43594E-3	9.33647E-2	2.73063E1	-3.26651E1	-3.26615E1	2.67978E1	1.69653E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00876E-1
1.9E1	3.455E3	7.0E0	7.68E2	5.29E2	-7.47149E-2	-8.80016E1	-6.4373E-4	-8.80003E1	7.15256E-5	5.8651E-3	9.39131E-2	2.73169E1	-3.26478E1	-3.26142E1	2.67896E1	1.69949E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.9911E-1
2.0E1	3.14E2	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80016E1	-7.39098E-4	-8.80004E1	2.14577E-4	5.84126E-3	9.3627E-2	2.73393E1	-3.26506E1	-3.26074E1	2.67896E1	1.70015E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.99E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80017E1	-9.77516E-4	-8.80005E1	4.52995E-4	5.8651E-3	9.34601E-2	2.73248E1	-3.26735E1	-3.26173E1	2.68036E1	1.69581E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.99577E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80016E1	-6.91414E-4	-8.80006E1	0.0E0	5.76973E-3	9.36985E-2	2.72939E1	-3.2672E1	-3.26767E1	2.6801E1	1.69723E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.00231E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80018E1	-6.19888E-4	-8.80008E1	7.15256E-5	5.48363E-3	9.37462E-2	2.7291E1	-3.2667E1	-3.2645E1	2.6798E1	1.69653E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00192E-1