[Scan]
initial_time=2016-02-18T00:15:26
final_time=2016-02-18T00:15:46
ip_count=19
run=1032
dataset=12
scan=696
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44059E-2
qbias_imon=-3.84281E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.70059E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.34103E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.60565E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.55168E-8
mult1=-1.0185E-8
mult2=-2.70366E-9
rf_tmon=-5.34124E-3
rf_agc=3.34212E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.93531E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69866E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05451E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54307E1
cs_ef1b_imon=3.08794E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=2.17587E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98405E0
lens1_imon=1.3611E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64398E1
os_ef1alow_imon=2.95207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.57523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.7315E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10907E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.16101E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.29491E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=3.30814E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=4.2028E-8
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-1.14838E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.47967E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.60992E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98172E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.56769E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=2.0166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34071E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75024E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83433E0
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.80691E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.86322E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.53194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.26551E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.06575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.11006E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=9.91854E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56663E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.85605E1
mask2_imon=-3.8144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93763E3
defgrida_imon=6.48262E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.44888E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24019E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.58097E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07197E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64661E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=1.00735E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6655E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.89422E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59266E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.71595E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.51193E-1
res40_imon=-2.76727E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4915E4	1.8E1	1.47E2	4.1E1	-7.26282E-2	-8.80011E1	-4.29153E-4	-8.79999E1	-2.14577E-4	5.36442E-3	9.35793E-2	2.72962E1	-3.26703E1	-3.26372E1	2.68511E1	1.69653E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9951E-1
2.0E0	5.408E3	2.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80011E1	-3.09944E-4	-8.80004E1	2.38419E-4	5.65052E-3	9.34601E-2	2.72868E1	-3.26986E1	-3.25635E1	2.67842E1	1.69725E-7	2.52707E-3	2.52707E-3	6.29665E-3	2.01047E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80015E1	-2.86102E-4	-8.80003E1	7.15256E-5	5.22137E-3	9.37939E-2	2.7321E1	-3.26738E1	-3.26419E1	2.67872E1	1.69936E-7	2.52131E-3	2.52131E-3	6.32328E-3	2.00735E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80014E1	-4.05312E-4	-8.80004E1	7.15256E-5	5.36442E-3	9.35316E-2	2.73234E1	-3.26378E1	-3.26779E1	2.67662E1	1.69956E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.0064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80013E1	-2.86102E-4	-8.80003E1	3.33786E-4	5.57899E-3	9.377E-2	2.73165E1	-3.26591E1	-3.26254E1	2.68166E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00847E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80016E1	-2.86102E-4	-8.80004E1	4.76837E-5	5.29289E-3	9.36508E-2	2.73033E1	-3.26213E1	-3.26154E1	2.68105E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.01047E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80018E1	-1.43051E-4	-8.80005E1	1.43051E-4	5.48363E-3	9.3174E-2	2.73159E1	-3.26813E1	-3.26224E1	2.67944E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80018E1	-2.14577E-4	-8.80006E1	3.09944E-4	5.43594E-3	9.32455E-2	2.73382E1	-3.26474E1	-3.25783E1	2.67968E1	1.69949E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.99977E-1
1.2E1	3.55E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80017E1	-2.86102E-4	-8.80004E1	4.76837E-5	5.22137E-3	9.33886E-2	2.73149E1	-3.26503E1	-3.26341E1	2.68106E1	1.69728E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.98937E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80018E1	-2.38419E-4	-8.80004E1	7.15256E-5	5.24521E-3	9.3627E-2	2.72486E1	-3.26422E1	-3.26026E1	2.68172E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.98491E-1
1.4E1	6.37E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80018E1	-3.8147E-4	-8.80008E1	-4.76837E-5	5.76973E-3	9.35793E-2	2.73476E1	-3.26997E1	-3.26449E1	2.68059E1	1.69725E-7	2.52061E-3	2.52061E-3	6.26985E-3	1.9731E-1
1.5E1	1.15E2	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80019E1	-4.29153E-4	-8.80005E1	3.09944E-4	5.29289E-3	9.35555E-2	2.73147E1	-3.26879E1	-3.26152E1	2.68094E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98764E-1
1.6E1	3.148E3	2.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80019E1	-3.09944E-4	-8.80005E1	2.38419E-4	5.22137E-3	9.34839E-2	2.72727E1	-3.26384E1	-3.2662E1	2.68034E1	1.69725E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9968E-1
1.7E1	3.625E4	1.2E1	6.87E2	4.7E2	-7.36328E-2	-8.80017E1	-7.15256E-4	-8.80004E1	2.86102E-4	5.29289E-3	9.32932E-2	2.73123E1	-3.26675E1	-3.2638E1	2.6816E1	1.69653E-7	2.52384E-3	2.52384E-3	6.33977E-3	2.00363E-1
1.8E1	1.553E5	9.1E1	7.27E2	5.0E2	-7.40967E-2	-8.80018E1	-8.10623E-4	-8.80004E1	-9.53674E-5	5.26905E-3	9.34601E-2	2.73033E1	-3.26921E1	-3.26326E1	2.6786E1	1.69956E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.0064E-1
1.9E1	3.493E3	3.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80019E1	-9.53674E-4	-8.80007E1	-1.19209E-4	5.17368E-3	9.35078E-2	2.73249E1	-3.26759E1	-3.2608E1	2.67806E1	1.69798E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00021E-1
2.0E1	3.23E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80019E1	-5.96046E-4	-8.80002E1	9.53674E-5	5.14984E-3	9.34362E-2	2.72955E1	-3.26543E1	-3.26314E1	2.68172E1	1.69881E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.00463E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.46377E-2	-8.80016E1	-7.86781E-4	-8.80006E1	1.90735E-4	5.36442E-3	9.34362E-2	2.72962E1	-3.26756E1	-3.26526E1	2.68325E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80018E1	-8.10623E-4	-8.80001E1	3.09944E-4	5.38826E-3	9.32932E-2	2.73574E1	-3.27023E1	-3.25449E1	2.6813E1	1.69652E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.99061E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.44059E-2	-8.80018E1	-8.34465E-4	-8.80004E1	3.33786E-4	5.65052E-3	9.36031E-2	2.73021E1	-3.26638E1	-3.26325E1	2.68298E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1