[Scan]
initial_time=2016-02-18T00:18:06
final_time=2016-02-18T00:18:26
ip_count=19
run=1032
dataset=12
scan=702
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.78794E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.74744E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.33927E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.68456E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.55764E-8
mult1=-1.03063E-8
mult2=-2.68468E-9
rf_tmon=-5.40765E-3
rf_agc=3.19997E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.45764E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=3.08469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.17053E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.55913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.73312E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.16909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=1.27037E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01515E1
cs_anode1_imon=3.29084E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=4.1926E-8
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.51947E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98649E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.69572E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=2.01696E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.21343E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.10848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86434E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10742E0
os_ef2alow_imon=-2.77808E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.00738E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10409E1
os_restr2_imon=3.55177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.11237E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.89649E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-2.08972E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39005E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.44913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.37703E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.59143E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07551E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64241E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=1.00712E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62552E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66289E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.81013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95439E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2253E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.77808E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5389E4	1.4E1	1.47E2	4.1E1	-7.31692E-2	-8.80018E1	-6.91414E-4	-8.80001E1	2.38419E-4	5.34058E-3	9.35316E-2	2.72898E1	-3.26856E1	-3.26484E1	2.68178E1	1.6987E-7	2.52707E-3	2.52707E-3	6.32896E-3	2.00021E-1
2.0E0	5.462E3	6.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80019E1	-1.00136E-3	-8.8E1	9.53674E-5	5.34058E-3	9.35078E-2	2.73226E1	-3.26591E1	-3.2646E1	2.68022E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98937E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80019E1	-5.00679E-4	-8.8E1	-2.38419E-5	5.07832E-3	9.34601E-2	2.73005E1	-3.2666E1	-3.26364E1	2.67931E1	1.69731E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80018E1	-4.05312E-4	-8.80001E1	9.53674E-5	5.57899E-3	9.36031E-2	2.72997E1	-3.26464E1	-3.26561E1	2.6807E1	1.69794E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80018E1	-3.33786E-4	-8.79999E1	3.57628E-4	5.34058E-3	9.35793E-2	2.72915E1	-3.27068E1	-3.26649E1	2.6795E1	1.69728E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80019E1	-3.33786E-4	-8.80001E1	1.43051E-4	5.55515E-3	9.36508E-2	2.72871E1	-3.26368E1	-3.26242E1	2.67764E1	1.69798E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80013E1	-7.15256E-4	-8.80004E1	2.14577E-4	5.53131E-3	9.36031E-2	2.72991E1	-3.26771E1	-3.2614E1	2.68208E1	1.69728E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80016E1	-4.52995E-4	-8.80006E1	2.6226E-4	5.24521E-3	9.32693E-2	2.72961E1	-3.26639E1	-3.26158E1	2.68034E1	1.69728E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00325E-1
1.2E1	3.09E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80018E1	-2.14577E-4	-8.80003E1	1.19209E-4	5.43594E-3	9.36031E-2	2.7337E1	-3.2659E1	-3.26067E1	2.68215E1	1.69728E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99803E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80019E1	-3.8147E-4	-8.8E1	1.66893E-4	5.34058E-3	9.34601E-2	2.73101E1	-3.26541E1	-3.25879E1	2.68172E1	1.6986E-7	2.52405E-3	2.52405E-3	6.3074E-3	1.99119E-1
1.4E1	6.38E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.8002E1	-4.29153E-4	-8.80003E1	1.90735E-4	5.17368E-3	9.34362E-2	2.73033E1	-3.2602E1	-3.25996E1	2.68007E1	1.69581E-7	2.51952E-3	2.51952E-3	6.31879E-3	1.98804E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80017E1	-3.09944E-4	-8.80004E1	1.90735E-4	5.96046E-3	9.33647E-2	2.7269E1	-3.26723E1	-3.26326E1	2.67974E1	1.69507E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.9911E-1
1.6E1	3.146E3	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80021E1	-4.52995E-4	-8.80005E1	2.38419E-5	5.84126E-3	9.3627E-2	2.72986E1	-3.26826E1	-3.26372E1	2.68302E1	1.69654E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.99456E-1
1.7E1	3.6025E4	1.3E1	6.87E2	4.7E2	-7.26282E-2	-8.8002E1	-5.00679E-4	-8.80003E1	1.43051E-4	5.55515E-3	9.377E-2	2.73129E1	-3.26518E1	-3.26194E1	2.68226E1	1.69508E-7	2.52492E-3	2.52492E-3	6.29128E-3	1.99E-1
1.8E1	1.548E5	1.06E2	7.27E2	5.0E2	-7.25507E-2	-8.80018E1	-5.00679E-4	-8.80002E1	-1.19209E-4	5.24521E-3	9.36985E-2	2.73252E1	-3.26225E1	-3.26661E1	2.67962E1	1.69581E-7	2.50789E-3	2.50789E-3	6.31288E-3	1.98592E-1
1.9E1	3.491E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80019E1	-7.62939E-4	-8.8E1	-3.33786E-4	5.29289E-3	9.34601E-2	2.73243E1	-3.26645E1	-3.26356E1	2.67992E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.01022E-1
2.0E1	3.2E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80019E1	-5.96046E-4	-8.80003E1	2.6226E-4	5.17368E-3	9.34362E-2	2.72941E1	-3.26891E1	-3.26321E1	2.6816E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00325E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80018E1	-6.4373E-4	-8.80003E1	2.14577E-4	5.19753E-3	9.34362E-2	2.72924E1	-3.26677E1	-3.26202E1	2.68146E1	1.69689E-7	2.52008E-3	2.52008E-3	6.32626E-3	1.99085E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80021E1	-7.39098E-4	-8.80003E1	1.43051E-4	4.86374E-3	9.35316E-2	2.72006E1	-3.25515E1	-3.27095E1	2.6792E1					
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80023E1	-5.96046E-4	-8.80004E1	3.8147E-4	5.03063E-3	9.34362E-2	2.73243E1	-3.26711E1	-3.25996E1	2.6801E1	1.69728E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1