[Scan]
initial_time=2016-02-18T00:19:00
final_time=2016-02-18T00:19:19
ip_count=19
run=1032
dataset=12
scan=704
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.80619E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.07264E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.33634E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.56331E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.55764E-8
mult1=-9.67155E-9
mult2=-2.75447E-9
rf_tmon=-5.36027E-3
rf_agc=3.34447E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.32722E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6471E0
bslens_imon=2.4861E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.99306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05062E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53202E1
cs_ef1b_imon=3.0496E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02371E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.054E1
cs_ea1_imon=2.17553E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98474E0
lens1_imon=1.70162E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64653E1
os_ef1alow_imon=2.9806E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04073E1
cs_ea2_imon=1.54852E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84374E1
cs_ef1a_imon=3.00419E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.73238E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11128E1
os_restr1_imon=4.27656E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.17437E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63616E1
os_ef1bup_imon=3.07024E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22401E0
cs_ionrep_imon=1.27512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93397E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=3.29346E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=4.19753E-8
tplens_vset=1.4E-1
tplens_vmon=1.58623E0
tplens_imon=-3.23505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26389E1
iondef3_imon=1.48983E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26866E1
iondef2_imon=1.57322E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98581E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.46648E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29568E0
ionrepsh_imon=2.02531E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33555E1
lens5b_imon=2.17814E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74673E1
cs_ef2b_imon=3.11683E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86419E0
os_ea2_imon=-6.19864E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00611E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70894E1
cs_ef2a_imon=3.17374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10813E0
os_ef2alow_imon=-2.57953E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.59347E-1
os_ef2bup_imon=-5.42208E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.55177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30713E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.018E1
cs_anode2_imon=2.28825E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73247E1
iondef1_imon=1.08103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.08282E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.1048E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.89776E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09476E0
cs_ionaccel_imon=-2.03992E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.46374E-6
window_vset=0.0E0
window_vmon=1.52744E-1
window_imon=-1.09928E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39223E-4
mask2_vset=0.0E0
mask2_vmon=-1.86025E1
mask2_imon=-7.30697E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92679E3
multa_neg_imon=7.21042E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.79493E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5017E3
multb_neg_imon=7.40799E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4175E0
defgridb_imon=6.15573E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.59297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64457E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30855E1
cs_fil1_imon=1.00694E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66056E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66888E-2
os_fil2_imon=-2.72658E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82471E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34631E-1
cs_fil2_imon=-2.53E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.49465E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22409E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2815E-1
res40_imon=-2.67094E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=300
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4839E4	1.3E1	1.47E2	4.1E1	-7.16233E-2	-8.80017E1	-5.48363E-4	-8.8E1	2.38419E-5	5.38826E-3	9.36985E-2	2.7276E1	-3.27004E1	-3.25983E1	2.68204E1	1.69937E-7	2.5249E-3	2.5249E-3	6.31182E-3	1.97939E-1
2.0E0	5.329E3	1.0E0	3.16E2	1.6E2	-7.24736E-2	-8.8002E1	-5.24521E-4	-8.80002E1	2.38419E-5	5.29289E-3	9.34124E-2	2.728E1	-3.26554E1	-3.26383E1	2.68163E1	1.69664E-7	2.51498E-3	2.51498E-3	6.31357E-3	1.98505E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80023E1	-2.38419E-5	-8.80002E1	1.90735E-4	5.43594E-3	9.35316E-2	2.73073E1	-3.26378E1	-3.26529E1	2.68037E1	1.69731E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80021E1	-1.90735E-4	-8.80003E1	2.6226E-4	5.48363E-3	9.3317E-2	2.72945E1	-3.26946E1	-3.25929E1	2.68208E1	1.69649E-7	2.51854E-3	2.51854E-3	6.33809E-3	2.00307E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.8002E1	-2.14577E-4	-8.80002E1	1.90735E-4	5.55515E-3	9.34601E-2	2.73256E1	-3.26596E1	-3.26095E1	2.68059E1	1.69963E-7	2.51611E-3	2.51611E-3	6.31879E-3	1.99163E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8002E1	-4.29153E-4	-8.80006E1	1.43051E-4	5.55515E-3	9.33409E-2	2.72645E1	-3.26628E1	-3.26148E1	2.68119E1	1.69581E-7	2.51679E-3	2.51679E-3	6.29185E-3	1.98628E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80021E1	-7.15256E-4	-8.79997E1	7.15256E-5	5.55515E-3	9.36508E-2	2.72843E1	-3.26303E1	-3.26376E1	2.6807E1	1.6981E-7	2.52863E-3	2.52863E-3	6.3245E-3	1.97019E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.8002E1	-2.14577E-4	-8.80001E1	2.38419E-4	5.48363E-3	9.39608E-2	2.72927E1	-3.2659E1	-3.26201E1	2.68088E1	1.69431E-7	2.52473E-3	2.52473E-3	6.31299E-3	1.98696E-1
1.2E1	3.42E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80026E1	-3.33786E-4	-8.80003E1	2.38419E-4	5.60284E-3	9.34839E-2	2.72985E1	-3.26356E1	-3.26308E1	2.6837E1	1.69653E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98661E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80021E1	-1.66893E-4	-8.80005E1	1.66893E-4	5.79357E-3	9.35078E-2	2.7352E1	-3.26506E1	-3.26428E1	2.6783E1	1.69949E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.99283E-1
1.4E1	6.49E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80021E1	-2.14577E-4	-8.80001E1	2.38419E-4	5.84126E-3	9.34601E-2	2.73865E1	-3.27216E1	-3.25983E1	2.67818E1	1.69728E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00499E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80022E1	-4.29153E-4	-8.80005E1	3.57628E-4	5.67436E-3	9.39131E-2	2.72817E1	-3.26488E1	-3.26621E1	2.67758E1	1.69798E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.00021E-1
1.6E1	3.057E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-8.10623E-4	-8.80001E1	4.05312E-4	5.55515E-3	9.36508E-2	2.73328E1	-3.2695E1	-3.26402E1	2.68024E1	1.69654E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99803E-1
1.7E1	3.5875E4	2.7E1	6.87E2	4.7E2	-7.22418E-2	-8.80016E1	-3.33786E-4	-8.80004E1	3.09944E-4	5.22137E-3	9.34839E-2	2.73155E1	-3.26529E1	-3.26682E1	2.6804E1	1.6987E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00363E-1
1.8E1	1.53537E5	8.5E1	7.27E2	5.0E2	-7.13915E-2	-8.80017E1	-2.6226E-4	-8.80001E1	1.43051E-4	5.29289E-3	9.32455E-2	2.73122E1	-3.26638E1	-3.26467E1	2.68004E1	1.69806E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99754E-1
1.9E1	3.458E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80019E1	-3.8147E-4	-8.80005E1	9.53674E-5	5.4121E-3	9.33886E-2	2.73285E1	-3.26657E1	-3.26314E1	2.68034E1	1.69725E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9985E-1
2.0E1	3.01E2	0.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80017E1	-9.77516E-4	-8.80002E1	-2.38419E-5	5.65052E-3	9.34839E-2	2.73333E1	-3.26759E1	-3.26428E1	2.68172E1	1.69875E-7	2.52538E-3	2.52538E-3	6.29645E-3	1.99456E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80018E1	-5.24521E-4	-8.80006E1	2.14577E-4	5.43594E-3	9.34601E-2	2.73198E1	-3.26626E1	-3.26543E1	2.68058E1	1.69725E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00192E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80019E1	-7.62939E-4	-8.80004E1	2.38419E-4	5.34058E-3	9.34839E-2	2.73275E1	-3.26756E1	-3.25706E1	2.67989E1	1.69875E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00151E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80018E1	-6.19888E-4	-8.80005E1	7.15256E-5	5.26905E-3	9.3317E-2	2.73247E1	-3.26866E1	-3.26389E1	2.67938E1	1.69798E-7	2.52169E-3	2.52169E-3	6.28592E-3	1.98661E-1