[Scan]
initial_time=2016-02-18T00:19:26
final_time=2016-02-18T00:19:46
ip_count=19
run=1032
dataset=12
scan=705
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.80764E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.84614E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.28721E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.56822E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.55709E-8
mult1=-9.9812E-9
mult2=-2.75853E-9
rf_tmon=-4.04979E-3
rf_agc=3.40906E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=5.17726E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.74323E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=2.01732E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52956E1
cs_ef1b_imon=3.04541E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.17485E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02994E0
lens1_imon=1.55E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.55733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.01874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.73177E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.18639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.28796E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=4.19715E-8
tplens_vset=1.4E-1
tplens_vmon=1.59577E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.5777E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=2.04327E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.19865E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.09659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.89558E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.5749E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.54095E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.28858E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.10163E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=9.90633E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56033E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.85851E1
mask2_imon=-9.29243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.26385E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.59395E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06506E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64139E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00536E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66219E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80487E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.9731E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.70124E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4847E4	2.4E1	1.47E2	4.1E1	-7.26282E-2	-8.80014E1	-6.19888E-4	-8.80001E1	4.76837E-5	5.76973E-3	9.39608E-2	2.73184E1	-3.26509E1	-3.26318E1	2.68302E1	1.69581E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99977E-1
2.0E0	5.32E3	0.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80015E1	-9.05991E-4	-8.80004E1	1.19209E-4	5.53131E-3	9.35793E-2	2.72859E1	-3.26975E1	-3.2629E1	2.67788E1	1.69652E-7	2.51603E-3	2.51603E-3	6.2863E-3	1.99394E-1
3.0E0	5.0E0	1.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80017E1	-8.10623E-4	-8.80004E1	-1.19209E-4	5.34058E-3	9.37462E-2	2.73147E1	-3.26825E1	-3.2617E1	2.68118E1	1.69949E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80019E1	-1.0252E-3	-8.80004E1	-1.66893E-4	5.26905E-3	9.36031E-2	2.72576E1	-3.26981E1	-3.2623E1	2.67938E1	1.69802E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80019E1	-7.15256E-4	-8.80008E1	1.90735E-4	5.10216E-3	9.35555E-2	2.73171E1	-3.26981E1	-3.25695E1	2.68136E1	1.70023E-7	2.52647E-3	2.52647E-3	6.34037E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80019E1	-6.67572E-4	-8.80008E1	-7.15256E-5	5.79357E-3	9.33647E-2	2.73069E1	-3.26813E1	-3.26002E1	2.678E1	1.6987E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80016E1	-6.67572E-4	-8.80006E1	-1.66893E-4	5.43594E-3	9.35078E-2	2.73051E1	-3.26236E1	-3.26146E1	2.68034E1	1.69356E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.00463E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80019E1	-6.4373E-4	-8.80004E1	2.38419E-5	5.126E-3	9.36508E-2	2.73129E1	-3.26314E1	-3.2629E1	2.6801E1	1.69654E-7	2.5188E-3	2.5188E-3	6.36797E-3	1.98937E-1
1.2E1	3.53E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80016E1	-6.67572E-4	-8.80004E1	1.43051E-4	5.60284E-3	9.35793E-2	2.72979E1	-3.26428E1	-3.26326E1	2.67944E1	1.69654E-7	2.5199E-3	2.5199E-3	6.27461E-3	1.99456E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80018E1	-7.15256E-4	-8.80004E1	-7.15256E-5	5.4121E-3	9.34362E-2	2.73039E1	-3.26855E1	-3.26254E1	2.6825E1	1.69875E-7	2.52538E-3	2.52538E-3	6.35692E-3	1.98592E-1
1.4E1	6.3E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80018E1	-8.10623E-4	-8.80004E1	3.57628E-4	5.26905E-3	9.3317E-2	2.73081E1	-3.26765E1	-3.26038E1	2.67794E1	1.69581E-7	2.52428E-3	2.52428E-3	6.3514E-3	1.99456E-1
1.5E1	8.8E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80018E1	-6.67572E-4	-8.80002E1	2.86102E-4	5.17368E-3	9.36985E-2	2.73219E1	-3.2653E1	-3.26627E1	2.67956E1	1.69875E-7	2.51334E-3	2.51334E-3	6.25284E-3	2.00499E-1
1.6E1	3.053E3	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.8002E1	-2.86102E-4	-8.80003E1	1.19209E-4	5.62668E-3	9.37223E-2	2.73181E1	-3.26608E1	-3.26219E1	2.6819E1	1.69728E-7	2.52099E-3	2.52099E-3	6.25284E-3	1.99456E-1
1.7E1	3.5726E4	2.4E1	6.87E2	4.7E2	-7.286E-2	-8.80019E1	-5.72205E-4	-8.80005E1	1.43051E-4	5.6982E-3	9.34839E-2	2.73279E1	-3.2653E1	-3.26182E1	2.67914E1	1.69581E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9934E-1
1.8E1	1.53947E5	9.5E1	7.27E2	5.0E2	-7.30918E-2	-8.80017E1	-3.8147E-4	-8.80001E1	-9.53674E-5	5.4121E-3	9.32932E-2	2.73088E1	-3.26542E1	-3.26119E1	2.68148E1	1.69654E-7	2.51771E-3	2.51771E-3	6.25284E-3	1.98764E-1
1.9E1	3.465E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80018E1	-2.14577E-4	-8.8E1	7.15256E-5	5.34058E-3	9.31263E-2	2.73299E1	-3.26537E1	-3.26172E1	2.6768E1	1.69881E-7	2.52139E-3	2.52139E-3	6.26289E-3	1.99401E-1
2.0E1	3.28E2	1.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80015E1	-3.09944E-4	-8.79999E1	7.15256E-5	5.38826E-3	9.31978E-2	2.73147E1	-3.26446E1	-3.2644E1	2.68186E1	1.6987E-7	2.51739E-3	2.51739E-3	6.24316E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80018E1	-2.38419E-4	-8.8E1	2.6226E-4	5.65052E-3	9.34124E-2	2.73099E1	-3.26729E1	-3.26488E1	2.67995E1	1.69654E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99283E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80018E1	-5.24521E-4	-8.79999E1	7.15256E-5	5.65052E-3	9.33886E-2	2.72945E1	-3.26437E1	-3.2636E1	2.68082E1	1.69728E-7	2.51443E-3	2.51443E-3	6.38459E-3	1.98419E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80023E1	-5.48363E-4	-8.8E1	4.76837E-5	5.36442E-3	9.34839E-2	2.73225E1	-3.26753E1	-3.2632E1	2.68262E1	1.69798E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.9731E-1