[Scan]
initial_time=2016-02-18T00:27:37
final_time=2016-02-18T00:27:56
ip_count=19
run=1032
dataset=13
scan=723
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.20136E-1
ql1_imon=1.59714E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.76135E-9
ql3_vset=
ql3_vmon=-9.1301E0
ql3_imon=6.79439E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.3715E-10
mult1=-1.021E-8
mult2=-2.63278E-9
rf_tmon=-5.2935E-3
rf_agc=3.26246E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.43106E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.04901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.01905E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04561E1
cs_ea1_imon=2.20658E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42002E0
lens1_imon=2.86941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.54651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.00757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.7135E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.18711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.06235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.2646E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.24759E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.65906E-8
tplens_vset=1.4E-1
tplens_vmon=1.63062E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.93649E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85292E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.21335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.21225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.59893E-1
os_ef2bup_imon=-5.44141E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.52366E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.26839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.0463E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83047E-1
olens1_imon=9.75261E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-2.11134E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.62082E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82583E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86218E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.82261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=5.92641E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.6193E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06861E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6283E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=1.00572E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.58672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64505E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.57439E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-3.94538E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22358E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.72507E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.21328E-1	-7.98106E-1	-9.13179E0	-9.14209E0	5.43594E-3	9.30071E-2	2.73249E1	-3.26675E1	-3.26056E1	2.67972E1	1.69654E-7	2.51225E-3	2.51225E-3	6.28006E-3	1.99283E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.20947E-1	-7.98106E-1	-9.13169E0	-9.14204E0	5.62668E-3	9.3174E-2	2.72823E1	-3.26717E1	-3.26482E1	2.68136E1	1.69943E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.20422E-1	-7.98106E-1	-9.13162E0	-9.14197E0	5.36442E-3	9.31978E-2	2.72962E1	-3.26797E1	-3.26325E1	2.68016E1	1.69581E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.20208E-1	-7.98202E-1	-9.13155E0	-9.14168E0	5.67436E-3	9.34601E-2	2.72964E1	-3.26897E1	-3.26474E1	2.68157E1	1.69652E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.20446E-1	-7.98345E-1	-9.131E0	-9.14176E0	5.81741E-3	9.33886E-2	2.73357E1	-3.26603E1	-3.26362E1	2.68118E1	1.69725E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.20494E-1	-7.98249E-1	-9.13141E0	-9.14207E0	5.76973E-3	9.32217E-2	2.73117E1	-3.27215E1	-3.26134E1	2.67884E1	1.69725E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.20422E-1	-7.98392E-1	-9.13131E0	-9.14235E0	5.74589E-3	9.32932E-2	2.72992E1	-3.26856E1	-3.26349E1	2.68296E1	1.69581E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00151E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.20351E-1	-7.98535E-1	-9.13146E0	-9.14207E0	5.84126E-3	9.34362E-2	2.73033E1	-3.26669E1	-3.2638E1	2.67962E1	1.698E-7	2.52026E-3	2.52026E-3	6.32099E-3	1.99312E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.20422E-1	-7.98225E-1	-9.13126E0	-9.14204E0	5.93662E-3	9.32932E-2	2.72891E1	-3.26611E1	-3.26025E1	2.6821E1					
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.20518E-1	-7.98416E-1	-9.13136E0	-9.14197E0	5.84126E-3	9.34362E-2	2.73267E1	-3.26735E1	-3.26512E1	2.68268E1	1.69673E-7	2.51807E-3	2.51807E-3	6.30396E-3	1.99464E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.20279E-1	-7.98535E-1	-9.13131E0	-9.14204E0	5.67436E-3	9.32217E-2	2.73033E1	-3.26384E1	-3.26325E1	2.68316E1	1.70097E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.20231E-1	-7.9844E-1	-9.13134E0	-9.14207E0	5.65052E-3	9.30786E-2	2.73111E1	-3.26512E1	-3.26296E1	2.67943E1	1.69725E-7	2.51847E-3	2.51847E-3	6.25916E-3	1.9968E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.19969E-1	-7.98464E-1	-9.13129E0	-9.14199E0	5.81741E-3	9.32693E-2	2.73201E1	-3.27005E1	-3.26368E1	2.67968E1	1.69581E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.00192E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.20112E-1	-7.98368E-1	-9.1316E0	-9.14221E0	5.76973E-3	9.34124E-2	2.72809E1	-3.26349E1	-3.26461E1	2.6804E1	1.69728E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.20208E-1	-7.98106E-1	-9.13136E0	-9.14228E0	5.81741E-3	9.3317E-2	2.71992E1	-3.25666E1	-3.26413E1	2.68028E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.20136E-1	-7.98535E-1	-9.13131E0	-9.14207E0	5.65052E-3	9.33886E-2	2.73261E1	-3.2638E1	-3.26218E1	2.68292E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.20065E-1	-7.98512E-1	-9.13064E0	-9.14237E0	5.57899E-3	9.31501E-2	2.72967E1	-3.26927E1	-3.25725E1	2.67968E1	1.69949E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.19778E-1	-7.98512E-1	-9.13038E0	-9.14218E0	5.60284E-3	9.32217E-2	2.73277E1	-3.26764E1	-3.26173E1	2.6792E1	1.70023E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.20112E-1	-7.98845E-1	-9.13007E0	-9.14195E0	5.67436E-3	9.30309E-2	2.73357E1	-3.26711E1	-3.26176E1	2.6847E1	1.69725E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.01219E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.20136E-1	-7.98655E-1	-9.1301E0	-9.14192E0	5.43594E-3	9.31263E-2	2.73063E1	-3.26933E1	-3.26476E1	2.6831E1	1.69653E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.00534E-1