[Scan]
initial_time=2016-02-18T00:28:03
final_time=2016-02-18T00:28:23
ip_count=19
run=1032
dataset=13
scan=724
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08708E-4
ql1_vset=
ql1_vmon=-8.19468E-1
ql1_imon=1.46542E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.86634E-9
ql3_vset=
ql3_vmon=-9.13026E0
ql3_imon=3.60659E-9
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=1.37472E-10
mult1=-9.94508E-9
mult2=-2.76253E-9
rf_tmon=-4.206E-3
rf_agc=3.31834E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.52593E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68037E0
bslens_imon=2.745E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=3.06992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.20277E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30826E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03177E1
cs_ea2_imon=1.55329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83938E1
cs_ef1a_imon=3.02415E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.7092E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.20454E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27038E0
cs_ionrep_imon=1.28288E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=3.26165E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.66807E-8
tplens_vset=1.4E-1
tplens_vmon=1.60604E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98654E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.00054E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=2.02191E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.20879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82607E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47879E-1
os_ef2bup_imon=-5.618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.53303E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.24973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.12785E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68146E1
iondef4_imon=1.06647E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.08194E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=9.76457E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-2.00323E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.38951E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.81532E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.32146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.57178E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06747E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62859E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=1.00527E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62552E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64339E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73673E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.38362E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.83415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22425E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92929E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.20112E-1	-7.98869E-1	-9.13041E0	-9.14211E0	5.6982E-3	9.31025E-2	2.73225E1	-3.26813E1	-3.26176E1	2.68163E1	1.69725E-7	2.51096E-3	2.51096E-3	6.29665E-3	1.9917E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.20184E-1	-7.98726E-1	-9.13062E0	-9.14245E0	5.53131E-3	9.31263E-2	2.73417E1	-3.26813E1	-3.26266E1	2.67889E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.20041E-1	-7.98368E-1	-9.13057E0	-9.14202E0	5.55515E-3	9.33647E-2	2.73294E1	-3.26845E1	-3.26208E1	2.68048E1	1.69731E-7	2.51581E-3	2.51581E-3	6.34099E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.19969E-1	-7.98702E-1	-9.13062E0	-9.14211E0	5.72205E-3	9.34839E-2	2.73099E1	-3.26044E1	-3.26597E1	2.67854E1	1.6993E-7	2.51679E-3	2.51679E-3	6.27633E-3	1.98955E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.19993E-1	-7.98631E-1	-9.13033E0	-9.14211E0	5.38826E-3	9.34362E-2	2.72996E1	-3.26229E1	-3.27031E1	2.6802E1	1.70023E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.20041E-1	-7.98535E-1	-9.13033E0	-9.14214E0	5.55515E-3	9.3317E-2	2.72839E1	-3.26744E1	-3.26242E1	2.68178E1	1.69581E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.97994E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.20017E-1	-7.98583E-1	-9.13038E0	-9.14235E0	5.43594E-3	9.34124E-2	2.73219E1	-3.26591E1	-3.26404E1	2.68094E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.20041E-1	-7.98798E-1	-9.13074E0	-9.14233E0	5.67436E-3	9.34362E-2	2.73284E1	-3.26591E1	-3.26389E1	2.67932E1	1.69949E-7	2.51771E-3	2.51771E-3	6.28552E-3	1.97903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.19969E-1	-7.98297E-1	-9.13062E0	-9.14173E0	5.84126E-3	9.34839E-2	2.73352E1	-3.26413E1	-3.26278E1	2.68064E1	1.69802E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.20017E-1	-7.98631E-1	-9.1305E0	-9.14223E0	5.81741E-3	9.34601E-2	2.73363E1	-3.26969E1	-3.2641E1	2.67769E1	1.69875E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.20136E-1	-7.9875E-1	-9.13038E0	-9.14216E0	5.84126E-3	9.32932E-2	2.73147E1	-3.26945E1	-3.26428E1	2.67986E1	1.69581E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00534E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.19898E-1	-7.9844E-1	-9.13036E0	-9.14214E0	5.62668E-3	9.33886E-2	2.73063E1	-3.26826E1	-3.26472E1	2.67896E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00499E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.19993E-1	-7.98631E-1	-9.13038E0	-9.14221E0	5.8651E-3	9.32217E-2	2.73021E1	-3.26856E1	-3.26325E1	2.67854E1	1.70023E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99803E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.19898E-1	-7.98488E-1	-9.13038E0	-9.14226E0	5.57899E-3	9.31978E-2	2.73063E1	-3.2659E1	-3.26154E1	2.68128E1	1.69798E-7	2.52599E-3	2.52599E-3	6.28592E-3	2.00534E-1
1.8E1	9.4E1	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.19635E-1	-7.98726E-1	-9.13014E0	-9.14187E0	5.8651E-3	9.33409E-2	2.7357E1	-3.27346E1	-3.26219E1	2.68129E1	1.69653E-7	2.51847E-3	2.51847E-3	6.2752E-3	1.9968E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.19707E-1	-7.98225E-1	-9.13038E0	-9.14218E0	5.84126E-3	9.31501E-2	2.72961E1	-3.26687E1	-3.26651E1	2.68005E1	1.69653E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00876E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.19921E-1	-7.98631E-1	-9.13031E0	-9.14216E0	5.57899E-3	9.32693E-2	2.73045E1	-3.26831E1	-3.2632E1	2.67812E1	1.69798E-7	2.52599E-3	2.52599E-3	6.33977E-3	2.00705E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.19707E-1	-7.98273E-1	-9.13057E0	-9.14252E0	5.60284E-3	9.32217E-2	2.73468E1	-3.26868E1	-3.26162E1	2.67782E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.19373E-1	-7.98178E-1	-9.13026E0	-9.14197E0	5.72205E-3	9.34362E-2	2.72769E1	-3.26482E1	-3.2647E1	2.68088E1	1.69943E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19468E-1	-7.98297E-1	-9.13026E0	-9.14223E0	5.8651E-3	9.31025E-2	2.72937E1	-3.26735E1	-3.26164E1	2.68146E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3514E-3	2.00151E-1